The DOI matches its Crossref record; 1 of the 1 references it cites were found in a registry or an index.
Thin-film piezoelectric MEMS
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Citations
Cites
Powering pacemakers from heartbeat vibrations using linear and nonlinear energy harvesters
Amin Karami, M., & Inman, D. J. (2012) · Applied Physics Letters · doi:10.1063/1.3679102 · Cited by 390
Cited by
A rhombohedral ferroelectric phase in epitaxially strained Hf0.5Zr0.5O2 thin films
Wei, Y., Nukala, P., Salverda, M., Matzen, S., Zhao, H. J., Momand, J., Everhardt, A. S., Agnus, G., Blake, G. R., Lecoeur, P., et al. (2018) · Nature Materials · doi:10.1038/s41563-018-0196-0 · Cited by 587
Microstructure Analysis of Porous Lead Zirconate–Titanate Films
Atanova, A. V., Zhigalina, O. M., Khmelenin, D. N., Orlov, G. A., Seregin, D. S., Sigov, A. S., & Vorotilov, K. A. (2022) · Journal of the American Ceramic Society · doi:10.1111/jace.18064 · Cited by 15
Effect of Metal Electrodes on the Steady-State Leakage Current in PZT Thin Film Capacitors
Podgorny, Y. V., Antonovich, A. N., Petrushin, A. A., Sigov, A. S., & Vorotilov, K. A. (2022) · Journal of Electroceramics · doi:10.1007/s10832-022-00288-5 · Cited by 10
Zhigalina, O. M., Atanova, A. V., Khmelenin, D. N., Kotova, N. M., Seregin, D. S., & Vorotilov, K. A. (2019) · Crystallography Reports · doi:10.1134/s1063774519060282 · Cited by 2
Metadata
- Authors
- Eom, C.-B., & Trolier-McKinstry, S.
- Venue
- MRS Bulletin
- Published
- 2012-11
- Volume
- 37
- Issue
- 11
- Pages
- 1007-1017
- ISSN
- 0883-7694 (ISSN-L)
- 1938-1425
- OpenAlex
- W2162939606
- Cited by
- 316
- References
- 1
- FWCI
- 8.95
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Thin-film piezoelectric MEMS. https://app.cochat.ai/papers/10.1557/mrs.2012.273
- The paper
- Eom, C.-B., & Trolier-McKinstry, S. (2012). Thin-film piezoelectric MEMS. MRS Bulletin. https://doi.org/10.1557/mrs.2012.273
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.