Study of High Transmittance of SiO2/Nb2O5 Multilayer Thin Films Deposited by Plasma-Assisted Reactive Magnetron Sputtering
Open accessAbstract
SiO2/Nb2O5 multilayer thin films were designed for the special application of an aviation lighting system emitting green light. For optical components in this system to meet requirements such as a high transmittance and durability, SiO2/Nb2O5 multilayer thin films of 60 individual layers were fabricated by a plasma-assisted reactive magnetron sputtering method. As a result, the transmittance spectra were confirmed to have a flat top surface and a square bandwidth. The transmittances of the SiO2/Nb2O5 multilayer thin films in the range of 500 nm to 550 nm was approximately 96.14%. The reason for high transmittance was attributed to the almost matching between the designed and fabricated SiO2/Nb2O5 multilayer thin films. It was found that there was little difference in the total thickness between the designed and fabricated SiO2/Nb2O5 multilayer thin films without interlayer diffusion. The surface roughness and hardness of the SiO2/Nb2O5 multilayer thin films on a glass substrate was 2.32 nm ± 0.19 nm and 6.6 GPa, respectively. These results indicate that SiO2/Nb2O5 multilayer thin films can be applied not only to the optical filters used in aviation lighting devices, but also to various optics applications because of high transmittance.
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Silicon dioxide (SiO2) is the most commonly used material to fabricate dielectric mirrors.
“The most commonly used material to fabricate dielectric mirrors is silicon dioxide (SiO2).”
From Metal Oxide Thin Films for Advanced Photonic Applications (2026) · cites this paper as [31]
The Introduction (page unavailable) calls SiO2 a well-known low-refractive-index material in optical multilayer systems, and the Results and Discussion describe SiO2-containing commercial coatings. These passages support its use in such coatings, but do not establish that it is the most commonly used material for dielectric mirrors. (LLM, conf=0.82)
Experimental — accuracy not yet measuredThe SiO2/TiO2 pair offers the largest optical contrast, making it suitable for high-reflectance dielectric mirrors with a smaller number of pairs and sharper stopbands.
“However, the pair SiO2/TiO2 offers the largest optical contrast, rendering it perfect for high-reflectance dielectric mirrors with a smaller number of pairs and sharper stopbands.”
From Metal Oxide Thin Films for Advanced Photonic Applications (2026) · cites this paper as [31]
The Results and Discussion section (page not supplied) reports a higher refractive index for TiO2 than for the paper’s Nb2O5 film and describes a commercial SiO2/TiO2 coating with 36 layers. It does not establish that SiO2/TiO2 has the largest optical contrast, or that it produces high-reflectance mirrors with fewer pairs and sharper stopbands; the comparison concerns coating transmittance. (LLM, conf=0.83)
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Sorted by citations
Metal Oxide Thin Films for Advanced Photonic Applications
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- Authors
- Kim, S., In, J.-H., Kim, S. H., Han, K., Lim, D., Hwang, Y. S., Lee, K. M., & Choi, J. H.
- Affiliations
- Korea Photonics Technology Institute, Gwangju 61007, Republic of Korea
- Korea Photonics Technology Institute (KR)
- Cultural Heritage Administration (KR)
- Corresponding author
- Choi, Ju Hyeon
- Venue
- Applied Sciences
- Publisher
- MDPI AG
- Published
- 2023-12-15
- Volume
- 13
- Issue
- 24
- Pages
- 13271
- ISSN
- 2076-3417 (ISSN-L)
- OpenAlex
- W4389793176
- Cited by
- 11
- References
- 33
- Citations by year
- 2026: 6 · 2025: 4 · 2024: 1
- FWCI
- 0.76
- Type
- journal article
- Language
- en
- Open access
- gold
- doi.org
- Licence
- Locations
- Applied Sciences (publishedVersion, cc-by)
- DOAJ (DOAJ: Directory of Open Access Journals) (submittedVersion, cc-by-sa)
- Funders
- Materials and Components Technology Development Program of MOTIE/KEIT (20018828, P0017725, NRF-2022M3H4A3085283)
- Industrial Infrastructure Program for Smart Specialization of MOTIE/KIAT (20018828, P0017725, NRF-2022M3H4A3085283)
- Nano and Material Technology Development Program through the National Research Foundation of Korea (NRF), funded by the Ministry of Science and ICT (20018828, P0017725, NRF-2022M3H4A3085283)
- Topics
- Physical Sciences › Materials Science › Surfaces, Coatings and Films › Optical Coatings and Gratings
- Physical Sciences › Materials Science › Materials Chemistry › Advanced Materials and Semiconductor Technologies
- Physical Sciences › Engineering › Mechanics of Materials › Metal and Thin Film Mechanics
- Keywords
- high transmittance, optical filters, aircraft lighting, green emission, surface roughness, hardness, interlayer diffusion, optical coatings
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