The DOI matches its Crossref record; 14 of the 14 references it cites were found in a registry or an index.
Methods of isfet fabrication
Overview
Integrity signals
Registry
Cites
Statistics
Verification
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Claims other papers make about this one
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In the citing paper
“We cannot signify the body effects in the SG operation, because the sensitivity of devices is in a similar distribution from 39.82 mV/pH to 47.19 mV/pH (Figure S3), within the reported sensitivity of 25 to 48 mV/pH25.”
From Performance Enhancement of Capacitive-Coupling Dual-gate Ion-Sensitive Field-Effect Transistor in Ultra-Thin-Body (2014) · cites this paper as [25]
Citations
Cites
Bergveld, P. (1972) · IEEE Transactions on Biomedical Engineering · doi:10.1109/tbme.1972.324137 · Cited by 654
A Water-Amine-Complexing Agent System for Etching Silicon
Finne, R. M., & Klein, D. L. (1967) · Journal of The Electrochemical Society · doi:10.1149/1.2426793 · Cited by 309
Potassium ion-sensitive field effect transistor
Moss, S. D., Janata, J., & Johnson, C. C. (1975) · Analytical Chemistry · doi:10.1021/ac60363a005 · Cited by 237
An Integrated Field-Effect Electrode for Biopotential Recording
Matsuo, T., & Wise, K. D. (1974) · IEEE Transactions on Biomedical Engineering · doi:10.1109/tbme.1974.324338 · Cited by 235
Self-citationIntegrated Micro Multi Ion Sensor Using Field Effect of Semiconductor
Esashi, M., & Matsuo, T. (1978) · IEEE Transactions on Biomedical Engineering · doi:10.1109/tbme.1978.326245 · Cited by 198
Self-citationAboaf, J. A. (1967) · Journal of The Electrochemical Society · doi:10.1149/1.2426787 · Cited by 143
Selected Properties of Pyrolytic Ta[sub 2]O[sub 5] Films
Knausenberger, W. H., & Tauber, R. N. (1973) · Journal of The Electrochemical Society · doi:10.1149/1.2403602 · Cited by 89
Applications of Immobilized Enzymes in Analytical Chemistry
Bowers, L. D., & Carr, P. W. (1976) · Analytical Chemistry · doi:10.1021/ac60371a033 · Cited by 68
Field effect potentiometric sensors
Buck, R. P., Hackleman, D. E., & Kenan, W. R. (1977) · Analytical Chemistry · doi:10.1021/ac50022a051 · Cited by 63
Properties of Vapor-Deposited Aluminum Arsenide
Sigai, A. G., Abrahams, M. S., & Blanc, J. (1972) · Journal of The Electrochemical Society · doi:10.1149/1.2404375 · Cited by 16
Research works printed but not linked: 4
- Abe, 1979, ISFETs using inorganic gate this films, IEEE trans. Electroc Devices, ED-26, 1939, 1944
- Tarui, 1969, Si MOS characteristics using vapor grown Al2O3 films, Rep. Electro. Tech. Lab. Jpn., 33, 578
- Comte, 1977, Reference ISFET for compensation, Proc. 30th ACEMB, 41-3
- Matsuo, 1978, Charasteristics of Parylene Gate ISFET, Extended Abstr. 153rd Meetings, ECS, Vol. 78-1, No. 83, Seattle
Cited by
Nakata, S., Arie, T., Akita, S., & Takei, K. (2017) · ACS Sensors · doi:10.1021/acssensors.7b00047 · Cited by 379
Simultaneous DNA amplification and detection using a pH-sensing semiconductor system
Toumazou, C., Shepherd, L. M., Reed, S. C., Chen, G. I., Patel, A., Garner, D. M., Wang, C.-J. A., Ou, C.-P., Amin-Desai, K., Athanasiou, P., et al. (2013) · Nature Methods · doi:10.1038/nmeth.2520 · Cited by 356
Surface chemistry and tip-sample interactions in atomic force microscopy
Senden, T. J., & Drummond, C. J. (1995) · Colloids and Surfaces A: Physicochemical and Engineering Aspects · doi:10.1016/0927-7757(94)02954-q · Cited by 252
A physical model for drift in pH ISFETs
Jamasb, S., Collins, S., & Smith, R. L. (1998) · Sensors and Actuators B: Chemical · doi:10.1016/s0925-4005(98)00040-9 · Cited by 239
Ion-sensing devices with silicon nitride and borosilicate glass insulators
Harame, D. L., Bousse, L. J., Shott, J. D., & Meindl, J. D. (1987) · IEEE Transactions on Electron Devices · doi:10.1109/t-ed.1987.23140 · Cited by 225
Metadata
- Authors
- Matsuo, T., & Esashi, M.
- Affiliations
- Tohoku University (JP)
- Venue
- Sensors and Actuators
- Publisher
- Elsevier BV
- Published
- 1981-01
- Volume
- 1
- Pages
- 77-96
- ISSN
- 0250-6874 (ISSN-L)
- OpenAlex
- W2015173632
- Cited by
- 343
- References
- 14
- Citations by year
- 2026: 1 · 2025: 5 · 2024: 6 · 2023: 2 · 2022: 2 · 2021: 8 · 2020: 4 · 2019: 10 · 2018: 12 · 2017: 10 · 2016: 11 · 2015: 10 · 2014: 10 · 2013: 10 · 2012: 10
- FWCI
- 3.76
- Type
- journal article
- Language
- en
- Open access
- closed
- Licence
- www.elsevier.com/tdm/userlicense/1.0/ (tdm)
- Locations
- Sensors and Actuators (publishedVersion)
- Topics
- Physical Sciences › Chemistry › Analytical Chemistry › Analytical Chemistry and Sensors
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Analog and Mixed-Signal Circuit Design
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Semiconductor materials and devices
- Keywords
- ion-sensitive field-effect transistor, ion-selective electrodes, IGFET, ion migration, electrolyte solutions, integrated circuit fabrication, biomedical sensors
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
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Cite CoChat for the checks on this page, and the paper for its own findings.
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- CoChat. (2026). Citation check: Methods of isfet fabrication. https://app.cochat.ai/papers/10.1016/0250-6874(81)80006-6
- The paper
- Matsuo, T., & Esashi, M. (1981). Methods of isfet fabrication. Sensors and Actuators. https://doi.org/10.1016/0250-6874(81)80006-6
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
