Cited by 307Industrial Vision Systems and Defect DetectionNon-Destructive Testing TechniquesInfrastructure Maintenance and Monitoring

Automated visual inspection in the semiconductor industry: A survey

Huang, Szu-Hao, Pan, Ying-Cheng·2015·Computers in Industry

Integrity signals

Registry

Crossref · 10.1016/j.compind.2014.10.006

Cites

59 of 59 references verified0 citation errors · 0 not checkable

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Cites

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1 of the 60 references couldn’t be matched to a known paper.

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Authors
Huang, S.-H., & Pan, Y.-C.
Affiliations
National Tsing Hua University (TW)
Corresponding author
Huang, Szu-Hao
Venue
Computers in Industry
Publisher
Elsevier BV
Published
2015-01
Volume
66
Pages
1-10
ISSN
0166-3615 (ISSN-L)
OpenAlex
W2092243497
Cited by
307
References
60
Citations by year
2026: 20 · 2025: 33 · 2024: 35 · 2023: 33 · 2022: 30 · 2021: 38 · 2020: 42 · 2019: 23 · 2018: 26 · 2017: 8 · 2016: 15 · 2015: 4
FWCI
16.93
Type
journal article
Language
en
Open access
closed
Locations
Computers in Industry (publishedVersion)
Topics
  • Physical Sciences › Engineering › Industrial and Manufacturing Engineering › Industrial Vision Systems and Defect Detection
  • Physical Sciences › Engineering › Mechanical Engineering › Non-Destructive Testing Techniques
  • Physical Sciences › Engineering › Civil and Structural Engineering › Infrastructure Maintenance and Monitoring
Keywords
automated visual inspection, semiconductor manufacturing, optical inspection, image processing, defect detection, wafer inspection, thin-film transistor liquid crystal display, light-emitting diodes, projection method, learning-based approaches, hybrid algorithm, production line automation, quality control

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