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High-sensitivity waveguide-integrated bolometer based on free-carrier absorption for Si photonic sensors
Open accessAbstract
Conventional photon detectors necessarily face critical challenges regarding strong wavelength-selective response and narrow spectral bandwidth, which are undesirable for spectroscopic applications requiring a wide spectral range. With this perspective, herein, we overcome these challenges through a free-carrier absorption-based waveguide-integrated bolometer for infrared spectroscopic sensors on a silicon-on-insulator (SOI) platform featuring a spectrally flat response at near-infrared (NIR) range (1520-1620 nm). An in-depth thermal analysis was conducted with a systematic investigation of geometry dependence on the detectors. We achieved great performances: temperature coefficient of resistance (TCR) of -3.786%/K and sensitivity of -26.75%/mW with a low wavelength dependency, which are record-high values among reported waveguide bolometers so far, to our knowledge. In addition, a clear on-off response with the rise/fall time of 24.2/29.2 µs and a 3-dB roll-off frequency of ∼22 kHz were obtained, sufficient for a wide range of sensing applications. Together with the possibility of expanding an operation range to the mid-infrared (MIR) band, as well as simplicity in the detector architecture, our work here presents a novel strategy for integrated photodetectors covering NIR to MIR at room temperature for the development of the future silicon photonic sensors with ultrawide spectral bandwidth.
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The device is sufficiently robust for MIR lab-on-a-chip systems expected to operate at a bandwidth of several tens of kHz level.
“This suggests that our device is sufficiently robust for MIR lab-on-a-chip systems, which can be expected to operate at a bandwidth of several tens of kHz level, based on our previous work with the Si-on-insulator (SOI) platform in the near-infrared wavelength range35.”
From Room-temperature waveguide-integrated photodetector using bolometric effect for mid-infrared spectroscopy applications (2025) · cites this paper as [35]
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Cited by
Sorted by citations
Shim, J., Lim, J., Kim, I., Jeong, J., Kim, B. H., Kim, S. K., Geum, D.-M., & Kim, S. (2025) · Light: Science & Applications · doi:10.1038/s41377-025-01803-3 · Cited by 31
“…of the art in waveguide-integrated MIR PDs by exploiting the bolometric effect with free-carrier absorption (FCA) in Ge 31,32 and titanium oxide-based bolometric material 33 – 35 , providing a pragmatic approach with high fabrication robustness for uncooled MIR photodetection without foreign…”
Self-citationKim, I., Lim, J., Shim, J., Park, J., Ahn, S.-Y., Lim, H., & Kim, S. (2024) · ACS Sensors · doi:10.1021/acssensors.4c00941 · Cited by 23
Self-citation
Metadata
- Authors
- Shim, J., Lim, J., Geum, D.-M., You, J.-B., Yoon, H., Kim, J. P., Baek, W. J., Kim, I., Han, J.-H., & Kim, S.
- Affiliations
- Korea Advanced Institute of Science and Technology (KR)
- National NanoFab Center (KR)
- Korea Institute of Science and Technology (KR)
- ORCID
- Venue
- Optics Express
- Publisher
- Optica Publishing Group
- Published
- 2022-11-04
- Volume
- 30
- Issue
- 23
- Pages
- 42663
- ISSN
- 1094-4087 (ISSN-L)
- OpenAlex
- W4304698091
- Cited by
- 13
- References
- 1
- Citations by year
- 2026: 1 · 2025: 2 · 2024: 9 · 2023: 1
- FWCI
- 0.82
- Type
- journal article
- Language
- en
- Open access
- gold
- doi.org
- Locations
- Optics Express (publishedVersion)
- Funders
- National Research Foundation of Korea (2020R1F1A105271813, 2022M3I8A107725711)
- Korea Institute of Science and Technology (2E31372)
- National NanoFab Center (PA0107005)
- BrainKorea 21 (BK21) FOUR
- Institute for Information and Communications Technology Promotion (2022-0-00208)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced Fiber Optic Sensors
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Photorefractive and Nonlinear Optics
- Keywords
- free carrier absorption, silicon photonics, silicon-on-insulator, infrared detectors, temperature coefficient of resistance, thermal analysis, near-infrared spectroscopy, mid-infrared detection, room-temperature photodetection, wavelength-selective detection
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