The DOI matches its Crossref record; 19 of the 19 references it cites were found in a registry or an index.
Very High Frequency Silicon Nanowire Electromechanical Resonators
Abstract
We demonstrate very high frequency (VHF) nanomechanical resonators based upon single-crystal silicon nanowires (SiNWs), which are prepared by the bottom-up chemical synthesis. Metallized SiNW resonators operating near 200 MHz are realized with quality factor Q ≈ 2000−2500. Pristine SiNWs, with fundamental resonances as high as 215 MHz, are measured using a VHF readout technique that is optimized for these high resistance devices. The pristine resonators provide the highest Q 's, as high as Q ≈ 13 100 for an 80 MHz device. SiNWs excel at mass sensing; characterization of their mass responsivity and frequency stability demonstrates sensitivities approaching 10 zeptograms. These SiNW resonators offer significant potential for applications in resonant sensing, quantum electromechanical systems, and high frequency signal processing.
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Cites
Single spin detection by magnetic resonance force microscopy
Rugar, D., Budakian, R., Mamin, H. J., & Chui, B. W. (2004) · Nature · doi:10.1038/nature02658 · Cited by 1,630
Engelbrecht, R. S., Hsu, H., Amplifiers, P., et al. (1959) · Cited by 1,413
Ekinci, K. L., & Roukes, M. L. (2005) · Review of Scientific Instruments · doi:10.1063/1.1927327 · Cited by 1,374
Self-citationZeptogram-Scale Nanomechanical Mass Sensing
Yang, Y. T., Callegari, C., Feng, X. L., Ekinci, K. L., & Roukes, M. L. (2006) · Nano Letters · doi:10.1021/nl052134m · Cited by 1,041
Self-citationSingle-crystal metallic nanowires and metal/semiconductor nanowire heterostructures
Wu, Y., Xiang, J., Yang, C., Lu, W., & Lieber, C. M. (2004) · Nature · doi:10.1038/nature02674 · Cited by 999
Approaching the Quantum Limit of a Nanomechanical Resonator
LaHaye, M. D., Buu, O., Camarota, B., & Schwab, K. C. (2004) · Science · doi:10.1126/science.1094419 · Cited by 870
Giant piezoresistance effect in silicon nanowires
He, R., & Yang, P. (2006) · Nature Nanotechnology · doi:10.1038/nnano.2006.53 · Cited by 722
Self-citationUltimate limits to inertial mass sensing based upon nanoelectromechanical systems
Ekinci, K. L., Yang, Y. T., & Roukes, M. L. (2004) · Journal of Applied Physics · doi:10.1063/1.1642738 · Cited by 695
Self-citationControlled Growth of Si Nanowire Arrays for Device Integration
Hochbaum, A. I., Fan, R., He, R., & Yang, P. (2005) · Nano Letters · doi:10.1021/nl047990x · Cited by 657
Self-citationNanometre-scale displacement sensing using a single electron transistor
Knobel, R. G., & Cleland, A. N. (2003) · Nature · doi:10.1038/nature01773 · Cited by 599
Putting Mechanics into Quantum Mechanics
Schwab, K. C., & Roukes, M. L. (2005) · Physics Today · doi:10.1063/1.2012461 · Cited by 593
Self-citationNanodevice motion at microwave frequencies
Henry Huang, X. M., Zorman, C. A., Mehregany, M., & Roukes, M. L. (2003) · Nature · doi:10.1038/421496a · Cited by 587
Self-citationFabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals
Cleland, A. N., & Roukes, M. L. (1996) · Applied Physics Letters · doi:10.1063/1.117548 · Cited by 538
Self-citationNanowire-based very-high-frequency electromechanical resonator
Husain, A., Hone, J., Postma, H. W. C., Huang, X. M. H., Drake, T., Barbic, M., Scherer, A., & Roukes, M. L. (2003) · Applied Physics Letters · doi:10.1063/1.1601311 · Cited by 333
Self-citationCross, M. C., & Lifshitz, R. (2001) · Physical Review B · doi:10.1103/physrevb.64.085324 · Cited by 263
Verbridge, S. S., Shapiro, D. F., Craighead, H. G., & Parpia, J. M. (2007) · Nano Letters · doi:10.1021/nl070716t · Cited by 198
Si Nanowire Bridges in Microtrenches: Integration of Growth into Device Fabrication
He, R., Gao, D., Fan, R., et al. (2005) · Advanced Materials · doi:10.1002/adma.200401959 · Cited by 149
Self-citationNanomechanical displacement sensing using a quantum point contact
Cleland, A. N., Aldridge, J. S., Driscoll, D. C., & Gossard, A. C. (2002) · Applied Physics Letters · doi:10.1063/1.1497436 · Cited by 93
Intrinsic Noise Properties of Atomic Point Contact Displacement Detectors
Flowers-Jacobs, N. E., Schmidt, D. R., & Lehnert, K. W. (2007) · Physical Review Letters · doi:10.1103/physrevlett.98.096804 · Cited by 84
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Nanosensors for trace explosive detection
Senesac, L., & Thundat, T. G. (2008) · Materials Today · doi:10.1016/s1369-7021(08)70017-8 · Cited by 368
Dopant profiling and surface analysis of silicon nanowires using capacitance–voltage measurements
Garnett, E. C., Tseng, Y.-C., Khanal, D. R., Wu, J., Bokor, J., & Yang, P. (2009) · Nature Nanotechnology · doi:10.1038/nnano.2009.43 · Cited by 174
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Metadata
- Authors
- Feng, X. L., He, R., Yang, P., & Roukes, M. L.
- Venue
- Nano Letters
- Publisher
- American Chemical Society (ACS)
- Published
- 2007-06-22
- Volume
- 7
- Issue
- 7
- Pages
- 1953-1959
- ISSN
- 1530-6984 (ISSN-L)
- 1530-6992
- OpenAlex
- W2103114895
- Cited by
- 401
- References
- 19
- FWCI
- 27.41
- Type
- journal article
- Language
- en
- Open access
- closed
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