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Noise processes in nanomechanical resonators
Abstract
Nanomechanical resonators can be fabricated to achieve high natural resonance frequencies, approaching 1 GHz, with quality factors in excess of 104. These resonators are candidates for use as highly selective rf filters and as precision on-chip clocks. Some fundamental and some nonfundamental noise processes will present limits to the performance of such resonators. These include thermomechanical noise, Nyquist–Johnson noise, and adsorption–desorption noise; other important noise sources include those due to thermal fluctuations and defect motion-induced noise. In this article, we develop a self-contained formalism for treating these noise sources, and use it to estimate the impact that these noise processes will have on the noise of a model nanoscale resonator, consisting of a doubly clamped beam of single-crystal Si with a natural resonance frequency of 1 GHz.
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Cites
Statistics of atomic frequency standards
Allan, D. W. (1966) · Proceedings of the IEEE · doi:10.1109/proc.1966.4634 · Cited by 2,692
Cited by
Ekinci, K. L., & Roukes, M. L. (2005) · Review of Scientific Instruments · doi:10.1063/1.1927327 · Cited by 1,374
Self-citationCantilever transducers as a platform for chemical and biological sensors
Lavrik, N. V., Sepaniak, M. J., & Datskos, P. G. (2004) · Review of Scientific Instruments · doi:10.1063/1.1763252 · Cited by 1,117
Biosensors based on nanomechanical systems
Tamayo, J., Kosaka, P. M., Ruz, J. J., San Paulo, Á., & Calleja, M. (2013) · Chem. Soc. Rev. · doi:10.1039/c2cs35293a · Cited by 391
A self-sustaining ultrahigh-frequency nanoelectromechanical oscillator
Feng, X. L., White, C. J., Hajimiri, A., & Roukes, M. L. (2008) · Nature Nanotechnology · doi:10.1038/nnano.2008.125 · Cited by 300
Self-citationDissipation in nanoelectromechanical systems
Imboden, M., & Mohanty, P. (2014) · Physics Reports · doi:10.1016/j.physrep.2013.09.003 · Cited by 273
Metadata
- Authors
- Cleland, A. N., & Roukes, M. L.
- Venue
- Journal of Applied Physics
- Publisher
- AIP Publishing
- Published
- 2002-09-01
- Volume
- 92
- Issue
- 5
- Pages
- 2758-2769
- ISSN
- 0021-8979 (ISSN-L)
- 1089-7550
- OpenAlex
- W1979563351
- Cited by
- 461
- References
- 1
- FWCI
- 8.76
- Type
- journal article
- Language
- en
- Open access
- closed
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