The DOI matches its Crossref record; 28 of the 28 references it cites were found in a registry or an index.
Frontiers of silicon-on-insulator
Abstract
Silicon-on-insulator (SOI) wafers are precisely engineered multilayer semiconductor/dielectric structures that provide new functionality for advanced Si devices. After more than three decades of materials research and device studies, SOI wafers have entered into the mainstream of semiconductor electronics. SOI technology offers significant advantages in design, fabrication, and performance of many semiconductor circuits. It also improves prospects for extending Si devices into the nanometer region (<10 nm channel length). In this article, we discuss methods of forming SOI wafers, their physical properties, and the latest improvements in controlling the structure parameters. We also describe devices that take advantage of SOI, and consider their electrical characteristics.
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Citations
Cites
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Self-citationThreshold voltage of thin-film Silicon-on-insulator (SOI) MOSFET's
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Cited by
Ultra-thin fully-depleted SOI MOSFETs: Special charge properties and coupling effects
Eminente, S., Cristoloveanu, S., Clerc, R., Ohata, A., & Ghibaudo, G. (2007) · Solid-State Electronics · doi:10.1016/j.sse.2007.01.016 · Cited by 139
Self-citationUltrasound-induced wireless energy harvesting: from materials strategies to functional applications
Jiang, L., Yang, Y., Chen, Y., & Zhou, Q. (2020) · Nano Energy · doi:10.1016/j.nanoen.2020.105131 · Cited by 131
Emerging heterogeneous integrated photonic platforms on silicon
Fathpour, S. (2014) · Nanophotonics · doi:10.1515/nanoph-2014-0024 · Cited by 74
Role of low-energy phonons with mean-free-paths >0.8 μ m in heat conduction in silicon
Jiang, P., Lindsay, L., & Koh, Y. K. (2016) · Journal of Applied Physics · doi:10.1063/1.4954674 · Cited by 42
Metadata
- Authors
- Celler, G. K., & Cristoloveanu, S.
- Venue
- Journal of Applied Physics
- Publisher
- AIP Publishing
- Published
- 2003-05-01
- Volume
- 93
- Issue
- 9
- Pages
- 4955-4978
- ISSN
- 0021-8979 (ISSN-L)
- 1089-7550
- OpenAlex
- W2079699561
- Cited by
- 699
- References
- 28
- FWCI
- 47.26
- Type
- journal article
- Language
- en
- Open access
- closed
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Data sources
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
