Cited by 111Semiconductor materials and devicesSemiconductor materials and interfacesFerroelectric and Negative Capacitance Devices

Trapping and trap creation studies on nitrided and reoxidized-nitrided silicon dioxide films on silicon

DiMaria, D. J., Stathis, J. H.·1991·Journal of Applied Physics

Abstract

Alternative gate insulators for silicon-based technologies involving nitridation or reoxidation-nitridation of silicon dioxide layers are shown to be inferior to as-grown oxide in terms of charge trapping over a wide range of fields under uniform electron-injection conditions. Although nitrided layers seem to suppress trap generation more effectively than does silicon dioxide, background trapping in the as-fabricated oxynitride layers formed near their interfaces is greatly increased. The apparent reduction in trapped charges universally reported in reoxidized-nitrided oxides under high-field injection conditions is shown to be due to a decrease in occupation of these sites at fields exceeding 8 MV/cm.

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Crossref · 10.1063/1.350357

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  • Carbohydrates reduce symptoms of fatigue and overreaching.

    “reduce symptoms of fatigue and overreaching [64–67]”

    From Periodized Nutrition for Athletes (2017) · cites this paper as [67]

  • In trained rowers performing daily hard training for 4 weeks, a high-carbohydrate diet (10 g/kg/day) increased mean power output in 2500-m time trials by 10.7%, compared with 1.6% with a normal carbohydrate diet (5 g/kg/day).

    “Mean power output in 2500-m time trials increased 10.7% in the high-carbohydrate group and 1.6% in the normal carbohydrate group.”

    From Periodized Nutrition for Athletes (2017) · cites this paper as [67]

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Authors
DiMaria, D. J., & Stathis, J. H.
Affiliations
IBM Research - Thomas J. Watson Research Center (US)
Venue
Journal of Applied Physics
Published
1991-08-01
Volume
70
Issue
3
Pages
1500-1509
ISSN
  • 0021-8979 (ISSN-L)
  • 1089-7550
OpenAlex
W1986207778
Cited by
111
References
46
Citations by year
2019: 2 · 2018: 1 · 2017: 1 · 2014: 2 · 2013: 4 · 2012: 2
FWCI
10.21
Type
journal article
Language
en
Open access
closed
Locations
Journal of Applied Physics (publishedVersion)
Topics
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Semiconductor materials and devices
  • Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Semiconductor materials and interfaces
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Ferroelectric and Negative Capacitance Devices
Keywords
charge trapping, SiO2 thin films, gate dielectric, electron injection, trap generation, Si/SiO2 interface

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