The DOI matches its Crossref record; 19 of the 19 references it cites were found in a registry or an index.
Crystal grain nucleation in amorphous silicon
Abstract
The solid phase crystallization of chemical vapor deposited amorphous silicon films onto oxidized silicon wafers, induced either by thermal annealing or by ion beam irradiation at high substrate temperatures, has been extensively developed and it is reviewed here. We report and discuss a large variety of processing conditions. The structural and thermodynamical properties of the starting phase are emphasized. The morphological evolution of the amorphous towards the polycrystalline phase is investigated by transmission electron microscopy and it is interpreted in terms of a physical model containing few free parameters related to the thermodynamical properties of amorphous silicon and to the kinetical mechanisms of crystal grain growth. A direct extension of this model explains also the data concerning the ion-assisted crystal grain nucleation.
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Citations
Cites
Kinetics of Phase Change. I General Theory
Avrami, M. (1939) · The Journal of Chemical Physics · doi:10.1063/1.1750380 · Cited by 11,399
Kinetics of Phase Change. II Transformation-Time Relations for Random Distribution of Nuclei
Avrami, M. (1940) · The Journal of Chemical Physics · doi:10.1063/1.1750631 · Cited by 8,714
Granulation, Phase Change, and Microstructure Kinetics of Phase Change. III
Avrami, M. (1941) · The Journal of Chemical Physics · doi:10.1063/1.1750872 · Cited by 6,593
Kinetische Behandlung der Keimbildung in übersättigten Dämpfen
Becker, R., & Döring, W. (1935) · Annalen der Physik · doi:10.1002/andp.19354160806 · Cited by 3,155
Frankel, J. (1946) · Clarendon Press eBooks · Cited by 3,090
Rate of Nucleation in Condensed Systems
Turnbull, D., & Fisher, J. C. (1949) · The Journal of Chemical Physics · doi:10.1063/1.1747055 · Cited by 2,159
Direct Measurements of the Surface Energies of Crystals
Gilman, J. J. (1960) · Journal of Applied Physics · doi:10.1063/1.1735524 · Cited by 837
Statistical theory of nucleation, condensation and coagulation
Binder, K., & Stauffer, D. (1976) · Advances in Physics · doi:10.1080/00018737600101402 · Cited by 699
Homogeneous nucleation and growth of droplets in vapours
Feder, J., Russell, K. C., Lothe, J., & Pound, G. M. (1966) · Advances in Physics · doi:10.1080/00018736600101264 · Cited by 674
Transient nucleation in condensed systems
Kelton, K. F., Greer, A. L., & Thompson, C. V. (1983) · The Journal of Chemical Physics · doi:10.1063/1.445731 · Cited by 495
Cited by
Black silicon: fabrication methods, properties and solar energy applications
Liu, X., Coxon, P. R., Peters, M., Hoex, B., Cole, J. M., & Fray, D. J. (2014) · Energy Environ. Sci. · doi:10.1039/c4ee01152j · Cited by 511
Nonthermal Plasma Synthesis of Nanocrystals: Fundamental Principles, Materials, and Applications
Kortshagen, U. R., Sankaran, R. M., Pereira, R. N., Girshick, S. L., Wu, J. J., & Aydil, E. S. (2016) · Chemical Reviews · doi:10.1021/acs.chemrev.6b00039 · Cited by 437
Metadata
- Authors
- Spinella, C., Lombardo, S., & Priolo, F.
- Venue
- Journal of Applied Physics
- Publisher
- AIP Publishing
- Published
- 1998-11-15
- Volume
- 84
- Issue
- 10
- Pages
- 5383-5414
- ISSN
- 0021-8979 (ISSN-L)
- 1089-7550
- OpenAlex
- W2067128404
- Cited by
- 356
- References
- 19
- FWCI
- 11.67
- Type
- journal article
- Language
- en
- Open access
- closed
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