Cited by 66Ferroelectric and Piezoelectric MaterialsFerroelectric and Negative Capacitance DevicesMultiferroics and related materials

Ultra-Flat BaTiO3 Epitaxial Films on Si(001) with Large out-of-Plane Polarization

Scigaj, M., Dix, N., Fina, I., Bachelet, R., Warot-Fonrose, B., Fontcuberta, J., Sánchez, F.·2013·Applied Physics Letters

Abstract

Ferroelectric BaTiO3 is rarely used in monolithic Si devices due to the low quality of BaTiO3 films on Si, as polycrystallinity, degradation of bottom Pt electrodes, low polarization, and high roughness. Here, we overcome these limitations by using a buffer structure that combines yttria-stabilized zirconia, CeO2, and conducting LaNiO3. BaTiO3 films on the multilayered buffer, with total thickness of the buffer below 100 nm, are epitaxial, display remnant polarization of 6–10 μC/cm2, and have roughness of a few Å. These unprecedented properties pave the way to integrate ferroelectric BaTiO3 into Si platforms.

Integrity signals

Registry

Crossref · 10.1063/1.4798246

Cites

37 of 37 references verified0 citation errors · 0 not checkable

Statistics

Recomputing p-values needs the paper’s full text.

Claims the paper makes

This paper’s full text isn’t openly available, so its claims and self-check weren’t run. The registry and citation checks still apply.

Claims other papers make about this one

Each is checked against this paper’s own text: does it say what the citing paper says it does?

  • Crystalline quality and optical properties of BTO epitaxial films critically depend on lattice-substrate matching and the use of buffer thin films to avoid polycrystalline phases.

    “where the crystalline quality and optical properties critically depend on lattice-substrate matching and the use of buffer thin films to avoid the formation of polycrystalline phases [213,215].”

    From Metal Oxide Thin Films for Advanced Photonic Applications (2026) · cites this paper as [215]

Cites

Flagged first, then by citations

1 of the 38 references couldn’t be matched to a known paper.

Cited by

Sorted by citations

Authors
Scigaj, M., Dix, N., Fina, I., Bachelet, R., Warot-Fonrose, B., Fontcuberta, J., & Sánchez, F.
Affiliations
  • Institut de Ciència de Materials de Barcelona (ICMAB-CSIC) 1 , Campus UAB, Bellaterra 08193, Spain
  • Institut de Ciència de Materials de Barcelona (ES)
  • Centre National de la Recherche Scientifique (FR)
Venue
Applied Physics Letters
Published
2013-03-18
Volume
102
Issue
11
ISSN
  • 0003-6951 (ISSN-L)
  • 1077-3118
OpenAlex
W2021074416
Cited by
65
References
38
Citations by year
2026: 3 · 2025: 5 · 2024: 2 · 2022: 8 · 2021: 3 · 2020: 7 · 2019: 5 · 2018: 5 · 2017: 2 · 2016: 10 · 2015: 8 · 2014: 4 · 2013: 3
FWCI
3.76
Type
journal article
Language
en
Open access
closed
Locations
Applied Physics Letters (publishedVersion)
Funders
Spanish Ministry of Science and Innovation (MAT2011-29269-C03)
Topics
  • Physical Sciences › Materials Science › Materials Chemistry › Ferroelectric and Piezoelectric Materials
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Ferroelectric and Negative Capacitance Devices
  • Physical Sciences › Materials Science › Electronic, Optical and Magnetic Materials › Multiferroics and related materials
Keywords
barium titanate, ferroelectric thin films, epitaxial thin films, Si(100) substrate, out-of-plane polarization, remnant polarization, film roughness, monolithic integration

About these checks

Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.

Statistics and arithmetic are recomputed, not judged.

Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.

What counts as a claim ›How we measure confidence ›How we check this ›

Are you an author, or do you see a problem with this page? Request a review