Thermal conductivity of epitaxial layers of dilute SiGe alloys
Abstract
The thermal conductivities of micron-thick epitaxial layers of dilute ${\mathrm{Si}}_{1\ensuremath{-}x}{\mathrm{Ge}}_{x}$ alloys, $2\ifmmode\times\else\texttimes\fi{}{10}^{\ensuremath{-}4}<x<0.01$, are measured in the temperature range $297<T<550\phantom{\rule{0.3em}{0ex}}\mathrm{K}$ using time-domain thermoreflectance. These new data are used to test competing models for the strength of phonon scattering by heavy impurity atoms. Even though the mass difference between Ge and Si is much larger than the Si atomic mass, we find that the thermal conductivity of dilute SiGe alloys is adequately described by the scattering strength for point defects derived by perturbation theory by Klemens in 1955.
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TDTR is often used to measure the through-plane thermal conductivity Kz of the sample and the transducer/sample interface conductance G without much elaboration.
“Therefore, TDTR is often used to measure the through-plane thermal conductivity Kz of the sample and the transducer/sample interface conductance G without much elaboration.”
From Tutorial: Time-domain thermoreflectance (TDTR) for thermal property characterization of bulk and thin film materials (2018) · cites this paper as [121]
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- Authors
- Cahill, D. G., Watanabe, F., Rockett, A., & Vining, C. B.
- Affiliations
- University of Illinois Urbana-Champaign (US)
- Venue
- Physical Review B
- Publisher
- American Physical Society (APS)
- Published
- 2005-06-08
- Volume
- 71
- Issue
- 23
- ISSN
- 1098-0121 (ISSN-L)
- 1550-235X
- OpenAlex
- W2042230937
- Cited by
- 67
- References
- 23
- Citations by year
- 2025: 1 · 2023: 1 · 2022: 3 · 2018: 10 · 2017: 5 · 2016: 8 · 2015: 4 · 2014: 3 · 2013: 7 · 2012: 4
- FWCI
- 2.04
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Physical Review B (publishedVersion)
- Topics
- Physical Sciences › Materials Science › Materials Chemistry › Thermal properties of materials
- Physical Sciences › Materials Science › Materials Chemistry › Advanced Thermoelectric Materials and Devices
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Semiconductor materials and interfaces
- Keywords
- thermal conductivity, epitaxial layers, phonon scattering, point defects, time-domain thermoreflectance
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