Microstructural analysis and electro-optic properties of thick epitaxial BaTiO3 films integrated on silicon (001)
Abstract
Recent advances in epitaxial oxide deposition have enabled the fabrication of thick films of ferroelectric perovskite ${\mathrm{BaTiO}}_{3}$ capable of providing a robust electro-optic response via the Pockels effect in silicon photonic devices. We report a microstructure analysis of such films integrated on Si(001) by molecular beam epitaxy, showing how the crystallographic and polarization orientation change as a function of thickness. The measured electro-optic properties of the film correlate well with the microstructural analysis and demonstrate the potential of Si-integrated ${\mathrm{BaTiO}}_{3}$ for silicon photonics. An effective Pockels coefficient of up to 268 pm/V has been demonstrated in 110-nm-thick films in transmission measurements and 352 pm/V in waveguide measurements.
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The results shown by out-of-plane XRD are opposite to what has been expected in prior studies.
“The results shown by OOP XRD are opposite to what has been expected in prior studies 20,27 .”
From Enhancement of Electro-Optic Response in BaTiO3 Films Integrated on Si via Heating and Cooling Rate Control (2025) · cites this paper as [20]
The high effective Pockels response is due to extensive relaxation while maintaining a high level of epitaxy, compared to the authors' previous work.
“which we think is due to extensive relaxation while maintaining a high level of epitaxy when compared to our previous work 20 ].”
From Enhancement of Electro-Optic Response in BaTiO3 Films Integrated on Si via Heating and Cooling Rate Control (2025) · cites this paper as [20]
Cites
Saleh, B. E. A., & Teich, M. C. (1991) · doi:10.1002/0471213748 · Cited by 3,383 · see citing works
Reed, G. T., Mashanovich, G., Gardes, F. Y., & Thomson, D. J. (2010) · Nature Photonics · doi:10.1038/nphoton.2010.179 · Cited by 2,470 · see citing works
Adams, M. (1984) · IEEE Journal of Quantum Electronics · doi:10.1109/jqe.1984.1072309 · Cited by 2,418 · see citing works
Lithium niobate: Summary of physical properties and crystal structure
Weis, R. S., & Gaylord, T. K. (1985) · Applied Physics A Solids and Surfaces · doi:10.1007/bf00614817 · Cited by 1,868 · see citing works
Okada, Y., & Tokumaru, Y. (1984) · Journal of Applied Physics · doi:10.1063/1.333965 · Cited by 1,214 · see citing works
He, M., Xu, M., Ren, Y., Jian, J., Ruan, Z., Xu, Y., Gao, S., Sun, S., Wen, X., Zhou, L., et al. (2019) · Nature Photonics · doi:10.1038/s41566-019-0378-6 · Cited by 1,204 · see citing works
Crystalline Oxides on Silicon: The First Five Monolayers
McKee, R. A., Walker, F. J., & Chisholm, M. F. (1998) · Physical Review Letters · doi:10.1103/physrevlett.81.3014 · Cited by 1,019 · see citing works
Experimental demonstration of reservoir computing on a silicon photonics chip
Vandoorne, K., Mechet, P., Vaerenbergh, T. V., Fiers, M., Morthier, G. I., Verstraeten, D., Schrauwen, B., Dambre, J., & Bienstman, P. (2014) · Nature Communications · doi:10.1038/ncomms4541 · Cited by 890 · see citing works
Measurement of the displacement field of dislocations to 0.03 Å by electron microscopy
Hÿtch, M., Putaux, J., & Pénisson, J. M. (2003) · Nature · doi:10.1038/nature01638 · Cited by 598 · see citing works
Large Pockels effect in micro- and nanostructured barium titanate integrated on silicon
Abel, S., Eltes, F., Ortmann, J. E., Messner, A., Castera, P., Wagner, T., Urbonas, D., Rosa, A., Gutierrez, A. M., Tulli, D., et al. (2019) · Nature Materials · doi:10.1038/s41563-018-0208-0 · Cited by 554 · see citing works
Self-citationDielectric, elastic, piezoelectric, electro-optic, and elasto-optic tensors of BaTiO 3 crystals
Zgonik, M., Bernasconi, P. G., Duelli, M., SCHLESSER, R., Günter, P., Garrett, M. H., Rytz, D., Zhu, Y., & Wu, X. (1994) · Physical review. B, Condensed matter · doi:10.1103/physrevb.50.5941 · Cited by 553 · see citing works
Speck, J. S., & Pompe, W. (1994) · Journal of Applied Physics · doi:10.1063/1.357097 · Cited by 510 · see citing works
Dielectric and optical properties of melt-grown BaTiO3
Wemple, S. H., DiDomenico, M., & Camlibel, I. (1968) · Journal of Physics and Chemistry of Solids · doi:10.1016/0022-3697(68)90164-9 · Cited by 469 · see citing works
A phenomenological thermodynamic potential for BaTiO3 single crystals
Li, Y., Cross, L. E., & Chen, L. (2005) · Journal of Applied Physics · doi:10.1063/1.2042528 · Cited by 446 · see citing works
A strong electro-optically active lead-free ferroelectric integrated on silicon
Abel, S., Stöferle, T., Marchiori, C., Rossel, C., Rossell, M. D., Erni, R., Caimi, D., Sousa, M., Chelnokov, A., Offrein, B. J., et al. (2013) · Nature Communications · doi:10.1038/ncomms2695 · Cited by 350 · see citing works
Active Silicon Integrated Nanophotonics: Ferroelectric BaTiO3 Devices
Xiong, C., Pernice, W. H. P., Ngai, J. H., Reiner, J. W., Kumah, D. P., Walker, F. J., Ahn, C., & Tang, H. X. (2014) · Nano Letters · doi:10.1021/nl404513p · Cited by 299 · see citing works
Dubourdieu, C., Bruley, J., Arruda, T. M., Posadas, A. B., Jordan‐Sweet, J., Frank, M. M., Cartier, E., Frank, D. J., Kalinin, S. V., Demkov, A. A., et al. (2013) · Nature Nanotechnology · doi:10.1038/nnano.2013.192 · Cited by 277 · see citing works
Self-citationHybrid silicon and lithium niobate electro-optical ring modulator
Chen, L., Xu, Q., Wood, M. G., & Reano, R. M. (2014) · Optica · doi:10.1364/optica.1.000112 · Cited by 276 · see citing works
High-resolution characterization of the forbidden Si 200 and Si 222 reflections
Zaumseil, P. (2015) · Journal of Applied Crystallography · doi:10.1107/s1600576715004732 · Cited by 274 · see citing works
Temperature-strain phase diagram for BaTiO3 thin films
Li, Y., & Chen, L. (2006) · Applied Physics Letters · doi:10.1063/1.2172744 · Cited by 243 · see citing works
Pompe, W., Gong, X.-Y., Suo, Z., & Speck, J. S. (1993) · Journal of Applied Physics · doi:10.1063/1.355215 · Cited by 233 · see citing works
Hybrid Silicon Photonics for Optical Interconnects
Heck, M. J. R., Chen, H., Fang, A. W., Koch, B. R., Liang, D., Park, H., Sysak, M. N., & Bowers, J. E. (2010) · IEEE Journal of Selected Topics in Quantum Electronics · doi:10.1109/jstqe.2010.2051798 · Cited by 219 · see citing works
Self-citationAn integrated optical modulator operating at cryogenic temperatures
Eltes, F., Villarreal-Garcia, G. E., Caimi, D., Siegwart, H., Gentile, A. A., Hart, A., Stark, P., Marshall, G. D., Thompson, M. G., Barreto, J., et al. (2020) · Nature Materials · doi:10.1038/s41563-020-0725-5 · Cited by 182 · see citing works
Micro‐structured integrated electro‐optic LiNbO<sub>3</sub>modulators
Janner, D., Tulli, D., García‐Granda, M., Belmonte, M., & Pruneri, V. (2009) · Laser & Photonics Reviews · doi:10.1002/lpor.200810073 · Cited by 164 · see citing works
c -axis oriented epitaxial BaTiO3 films on (001) Si
Vaithyanathan, V., Lettieri, J., Tian, W., Sharan, A., Vasudevarao, A., Li, Y. L., Kochhar, A., Ma, H., Levy, J., Zschack, P., et al. (2006) · Journal of Applied Physics · doi:10.1063/1.2203208 · Cited by 123 · see citing works
Mechanism of cleaning Si(100) surface using Sr or SrO for the growth of crystalline SrTiO3 films
Wei, Y., Hu, X., Liang, Y. L., Jordan, D. C., Craigo, B., Droopad, R., Yu, Z., Demkov, A., Edwards, J. L., & Ooms, W. J. (2002) · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · doi:10.1116/1.1491547 · Cited by 114 · see citing works
Self-citationMicrostructure and ferroelectricity of BaTiO <sub>3</sub> thin films on Si for integrated photonics
Kormondy, K. J., Popoff, Y., Sousa, M., Eltes, F., Caimi, D., Rossell, M. D., Fiebig, M., Hoffmann, P., Marchiori, C., Reinke, M., et al. (2017) · Nanotechnology · doi:10.1088/1361-6528/aa53c2 · Cited by 111 · see citing works
Self-citationInfluence of BaTiO_3 ferroelectric orientation for electro-optic modulation on silicon
Castera, P., Tulli, D., Gutierrez, A. M., & Sanchis, P. (2015) · Optics Express · doi:10.1364/oe.23.015332 · Cited by 81 · see citing works
Band offsets at heterojunctions between SrTiO3 and BaTiO3 and Si(100)
Amy, F., Wan, A. S., Kahn, A., Walker, F. J., & McKee, R. A. (2004) · Journal of Applied Physics · doi:10.1063/1.1766417 · Cited by 72 · see citing works
Epitaxial integration of BaTiO3 on Si for electro-optic applications
Guo, W., Posadas, A. B., & Demkov, A. A. (2021) · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · doi:10.1116/6.0000923 · Cited by 62 · see citing works
Self-citationChannel waveguides and y-junctions in x-cut single-crystal lithium niobate thin film
Cai, L., Kong, R., Wang, Y., & Hu, H. (2015) · Optics Express · doi:10.1364/oe.23.029211 · Cited by 56 · see citing works
Design rules for strong electro-optic materials
Hamze, A., Reynaud, M., Geler-Kremer, J., & Demkov, A. A. (2020) · npj Computational Materials · doi:10.1038/s41524-020-00399-z · Cited by 56 · see citing works
Self-citationTHE THERMAL EXPANSION OF CUBIC BARIUM TITANATE (BaTiO3) FROM 350 °C TO 1050 °C
Bland, J. A. C. (1959) · Canadian Journal of Physics · doi:10.1139/p59-046 · Cited by 40 · see citing works
Kim, Y., Han, J., Ahn, D., & Kim, S. (2021) · Micromachines · doi:10.3390/mi12060625 · Cited by 32 · see citing works
Ferroelectric domain architecture and poling of BaTiO3 on Si
Nordlander, J., Eltes, F., Reynaud, M., Nürnberg, J., Luca, G. D., Caimi, D., Demkov, A. A., Abel, S., Fiebig, M., Fompeyrine, J., et al. (2020) · Physical Review Materials · doi:10.1103/physrevmaterials.4.034406 · Cited by 31 · see citing works
Self-citationHsu, M. M., Thourhout, D. V., Pantouvaki, M., Meersschaut, J., Conard, T. S., Richard, O., Bender, H., Favia, P., Vila, M., Cid, R., et al. (2017) · Applied Physics Express · doi:10.7567/apex.10.065501 · Cited by 27 · see citing works
Electro-optic response in epitaxially stabilized orthorhombic mm2 BaTiO3
Reynaud, M., Chen, P., Li, W., Paoletta, T., Kwon, S., Lee, D., Beskin, I. M., Posadas, A. B., Kim, M. J., Landis, C. M., et al. (2021) · Physical Review Materials · doi:10.1103/physrevmaterials.5.035201 · Cited by 20 · see citing works
Self-citationMechanism of oxidation protection of the Si(001) surface by sub-monolayer Sr template
Fredrickson, K., Seo, H., & Demkov, A. A. (2016) · Journal of Applied Physics · doi:10.1063/1.4960575 · Cited by 18 · see citing works
Self-citationSi-integrated ferroelectrics for photonics and optical computing
Demkov, A. A., & Posadas, A. B. (2022) · MRS Bulletin · doi:10.1557/s43577-022-00332-3 · Cited by 18 · see citing works
Self-citationThermo-electro-mechanical phase-field modeling of paraelectric to ferroelectric transitions
Woldman, A. Y., & Landis, C. M. (2019) · International Journal of Solids and Structures · doi:10.1016/j.ijsolstr.2019.06.012 · Cited by 17 · see citing works
Optical switches and modulators in deep freeze
Mashanovich, G. Z. (2020) · Nature Materials · doi:10.1038/s41563-020-0739-z · Cited by 11 · see citing works
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Reynaud, M., Waqar, M., Du, C., Posadas, A. B., Pan, X., & Demkov, A. A. (2025) · Communications Materials · doi:10.1038/s43246-025-00908-x · Cited by 14 · see citing works
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- Authors
- Reynaud, M., Dong, Z., Park, H., Li, W., Posadas, A. B., Warner, J. H., Wasserman, D., & Demkov, A. A.
- Affiliations
- The University of Texas at Austin (US)
- Texas Materials Institute (US)
- Corresponding author
- Demkov, Alexander A.
- ORCID
- Venue
- Physical Review Materials
- Publisher
- American Physical Society (APS)
- Published
- 2022-09-02
- Volume
- 6
- Issue
- 9
- ISSN
- 2475-9953 (ISSN-L)
- OpenAlex
- W4294276270
- Cited by
- 16
- References
- 41
- Citations by year
- 2026: 6 · 2025: 3 · 2024: 5 · 2023: 2
- FWCI
- 0.70
- Type
- journal article
- Language
- en
- Open access
- closed
- Licence
- Locations
- Physical Review Materials (publishedVersion)
- Funders
- Air Force Office of Scientific Research (FA9550-18-1-0053)
- Topics
- Physical Sciences › Materials Science › Materials Chemistry › Ferroelectric and Piezoelectric Materials
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Photorefractive and Nonlinear Optics
- Physical Sciences › Materials Science › Electronic, Optical and Magnetic Materials › Multiferroics and related materials
- Keywords
- BaTiO3 thin films, perovskite ferroelectrics, Pockels effect, electro-optic effect, silicon photonics, epitaxial oxide films, polarization direction, crystal orientation, film thickness dependence, microstructure
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