Cited by 245Advanced Sensor and Energy Harvesting MaterialsDielectric materials and actuatorsAdvanced MEMS and NEMS Technologies

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Flexible Dome and Bump Shape Piezoelectric Tactile Sensors Using PVDF-TrFE Copolymer

Chunyan Li, Pei-Ming Wu, Soohyun Lee, Gorton, A., Schulz, M.J., Ahn, C.H.·2008·Journal of Microelectromechanical Systems

DOI 10.1109/jmems.2007.911375

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Abstract

In this paper, a new mold-transfer method to pattern piezoelectric polymer has been developed and applied to fabricate innovative dome and bump shape polyvinylidene-fluoride-trifluoroethylene (PVDF-TrFE) films. The dome and bump shape PVDF-TrFE films have been successfully fabricated and characterized as a sensing component for flexible tactile sensors. The tactile sensors developed using these polymer microstructures show a high sensitivity which can measure as small as 40 mN force for bump shape sensors and 25 mN for dome shape sensors. The newly developed fabrication method provides a flexible way to pattern the piezoelectric polymer with different shapes and dimensions, including bump and dome shape piezoelectric polymer microstructures. In addition, a selective dc poling method for the PVDF-TrFE film has been developed for fabricating precisely located piezoelectric sensors with minimum crosstalk. The bump and dome shape PVDF-TrFE films developed in this paper can have numerous applications for microcatheters or other minimally invasive biomedical devices.

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Authors: Li, C., Wu, P.-M., Lee, S., Gorton, A., Schulz, M. J., & Ahn, C. H.
Affiliations: University of Cincinnati (US)
ORCID: Chunyan Li
Schulz, M.J.
Ahn, C.H.
Venue: Journal of Microelectromechanical Systems
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Published: 2008-04
Volume: 17
Issue: 2
Pages: 334-341
ISSN: 1057-7157 (ISSN-L)
1941-0158
DOI: 10.1109/jmems.2007.911375
OpenAlex: W2158076978
Cited by: 245
References: 21
Citations by year: 2026: 7 · 2025: 11 · 2024: 6 · 2023: 16 · 2022: 19 · 2021: 21 · 2020: 27 · 2019: 21 · 2018: 16 · 2017: 19 · 2016: 10 · 2015: 16 · 2014: 16 · 2013: 9 · 2012: 12
FWCI: 4.20
Type: journal article
Language: en
Open access: closed
Licence: ieeexplore.ieee.org/Xplorehelp/downloads/license-information/IEEE.html (vor)
Locations: Journal of Microelectromechanical Systems (publishedVersion)
Funders: University of Cincinnati
Topics: Physical Sciences › Engineering › Biomedical Engineering › Advanced Sensor and Energy Harvesting Materials
Physical Sciences › Materials Science › Electronic, Optical and Magnetic Materials › Dielectric materials and actuators
Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
Keywords: piezoelectric tactile sensor, flexible sensors, microcatheter, crosstalk reduction

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Flexible Dome and Bump Shape Piezoelectric Tactile Sensors Using PVDF-TrFE Copolymer

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