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Flexible Dome and Bump Shape Piezoelectric Tactile Sensors Using PVDF-TrFE Copolymer
Abstract
In this paper, a new mold-transfer method to pattern piezoelectric polymer has been developed and applied to fabricate innovative dome and bump shape polyvinylidene-fluoride-trifluoroethylene (PVDF-TrFE) films. The dome and bump shape PVDF-TrFE films have been successfully fabricated and characterized as a sensing component for flexible tactile sensors. The tactile sensors developed using these polymer microstructures show a high sensitivity which can measure as small as 40 mN force for bump shape sensors and 25 mN for dome shape sensors. The newly developed fabrication method provides a flexible way to pattern the piezoelectric polymer with different shapes and dimensions, including bump and dome shape piezoelectric polymer microstructures. In addition, a selective dc poling method for the PVDF-TrFE film has been developed for fabricating precisely located piezoelectric sensors with minimum crosstalk. The bump and dome shape PVDF-TrFE films developed in this paper can have numerous applications for microcatheters or other minimally invasive biomedical devices.
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“We use P(VDF-TrFE) as flexible piezoelectric materials with high mechanical strength and biocompatibility43.”
From A Flexible and Wearable Human Stress Monitoring Patch (2016) · cites this paper as [43]
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Metadata
- Authors
- Li, C., Wu, P.-M., Lee, S., Gorton, A., Schulz, M. J., & Ahn, C. H.
- Affiliations
- University of Cincinnati (US)
- Venue
- Journal of Microelectromechanical Systems
- Published
- 2008-04
- Volume
- 17
- Issue
- 2
- Pages
- 334-341
- ISSN
- 1057-7157 (ISSN-L)
- 1941-0158
- OpenAlex
- W2158076978
- Cited by
- 245
- References
- 21
- Citations by year
- 2026: 7 · 2025: 11 · 2024: 6 · 2023: 16 · 2022: 19 · 2021: 21 · 2020: 27 · 2019: 21 · 2018: 16 · 2017: 19 · 2016: 10 · 2015: 16 · 2014: 16 · 2013: 9 · 2012: 12
- FWCI
- 4.20
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Journal of Microelectromechanical Systems (publishedVersion)
- Funders
- University of Cincinnati
- Topics
- Physical Sciences › Engineering › Biomedical Engineering › Advanced Sensor and Energy Harvesting Materials
- Physical Sciences › Materials Science › Electronic, Optical and Magnetic Materials › Dielectric materials and actuators
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
- Keywords
- piezoelectric tactile sensor, flexible sensors, microcatheter, crosstalk reduction
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
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