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Flexible Dome and Bump Shape Piezoelectric Tactile Sensors Using PVDF-TrFE Copolymer
Abstract
In this paper, a new mold-transfer method to pattern piezoelectric polymer has been developed and applied to fabricate innovative dome and bump shape polyvinylidene-fluoride-trifluoroethylene (PVDF-TrFE) films. The dome and bump shape PVDF-TrFE films have been successfully fabricated and characterized as a sensing component for flexible tactile sensors. The tactile sensors developed using these polymer microstructures show a high sensitivity which can measure as small as 40 mN force for bump shape sensors and 25 mN for dome shape sensors. The newly developed fabrication method provides a flexible way to pattern the piezoelectric polymer with different shapes and dimensions, including bump and dome shape piezoelectric polymer microstructures. In addition, a selective dc poling method for the PVDF-TrFE film has been developed for fabricating precisely located piezoelectric sensors with minimum crosstalk. The bump and dome shape PVDF-TrFE films developed in this paper can have numerous applications for microcatheters or other minimally invasive biomedical devices.
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“We use P(VDF-TrFE) as flexible piezoelectric materials with high mechanical strength and biocompatibility43.”
From A Flexible and Wearable Human Stress Monitoring Patch (2016) · cites this paper as [43]
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Metadata
- Authors
- Li, C., Wu, P.-M., Lee, S., Gorton, A., Schulz, M. J., & Ahn, C. H.
- Affiliations
- University of Cincinnati (US)
- Venue
- Journal of Microelectromechanical Systems
- Published
- 2008-04
- Volume
- 17
- Issue
- 2
- Pages
- 334-341
- ISSN
- 1057-7157 (ISSN-L)
- 1941-0158
- OpenAlex
- W2158076978
- Cited by
- 245
- References
- 21
- Citations by year
- 2026: 7 · 2025: 11 · 2024: 6 · 2023: 16 · 2022: 19 · 2021: 21 · 2020: 27 · 2019: 21 · 2018: 16 · 2017: 19 · 2016: 10 · 2015: 16 · 2014: 16 · 2013: 9 · 2012: 12
- FWCI
- 4.20
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Journal of Microelectromechanical Systems (publishedVersion)
- Funders
- University of Cincinnati
- Topics
- Physical Sciences › Engineering › Biomedical Engineering › Advanced Sensor and Energy Harvesting Materials
- Physical Sciences › Materials Science › Electronic, Optical and Magnetic Materials › Dielectric materials and actuators
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
- Keywords
- piezoelectric tactile sensor, flexible sensors, microcatheter, crosstalk reduction
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