The DOI matches its Crossref record; 17 of the 17 references it cites were found in a registry or an index.
What is the Young's Modulus of Silicon?
Abstract
The Young's modulus (E) of a material is a key parameter for mechanical engineering design. Silicon, the most common single material used in microelectromechanical systems (MEMS), is an anisotropic crystalline material whose material properties depend on orientation relative to the crystal lattice. This fact means that the correct value ofEfor analyzing two different designs in silicon may differ by up to 45%. However, perhaps, because of the perceived complexity of the subject, many researchers oversimplify silicon elastic behavior and use inaccurate values for design and analysis. This paper presents the best known elasticity data for silicon, both in depth and in a summary form, so that it may be readily accessible to MEMS designers.
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Cites
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Cited by
Larrañeta, E., Lutton, R. E. M., Woolfson, A. D., & Donnelly, R. F. (2016) · Materials Science and Engineering: R: Reports · doi:10.1016/j.mser.2016.03.001 · Cited by 964
Microelectromechanical Systems (MEMS) for Biomedical Applications
Chircov, C., & Grumezescu, A. M. (2022) · Micromachines · doi:10.3390/mi13020164 · Cited by 243
Controlling the motion of multiple objects on a Chladni plate
Zhou, Q., Sariola, V., Latifi, K., & Liimatainen, V. (2016) · Nature Communications · doi:10.1038/ncomms12764 · Cited by 103
A Flexible Microneedle Electrode Array With Solid Silicon Needles
Wang, R., Zhao, W., Wang, W., & Li, Z. (2012) · Journal of Microelectromechanical Systems · doi:10.1109/jmems.2012.2203790 · Cited by 55
Integrated photonic devices in single crystal diamond
Mi, S., Kiss, M., Graziosi, T., & Quack, N. (2020) · Journal of Physics: Photonics · doi:10.1088/2515-7647/aba171 · Cited by 53
Metadata
- Authors
- Hopcroft, M. A., Nix, W. D., & Kenny, T. W.
- Venue
- Journal of Microelectromechanical Systems
- Published
- 2010-04
- Volume
- 19
- Issue
- 2
- Pages
- 229-238
- ISSN
- 1057-7157 (ISSN-L)
- 1941-0158
- OpenAlex
- W2157763436
- Cited by
- 2,119
- References
- 17
- FWCI
- 58.31
- Type
- journal article
- Language
- en
- Open access
- closed
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
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