A Flexible Microneedle Electrode Array With Solid Silicon Needles
Abstract
We propose a novel fabrication process to make flexible microneedle electrode array. The process includes creation of a silicon microneedle electrode array using a silicon-on-insulator substrate followed by its release using parylene films as the support material. The proposed structure provides flexibility of a parylene thin film and rigidity of a silicon structure. Using tissue-penetration tests and impedance spectroscopy, we demonstrate that such a structure is promising in invasive neural electrical stimulation and recording.
Integrity signals
Registry
Cites
Statistics
Claims the paper makes
Claims other papers make about this one
Each is checked against this paper’s own text: does it say what the citing paper says it does?
Fabrication of 3D microneedle electrodes by assembling 2D probe combs or etching bulk materials is expensive and time consuming.
“Because these approaches require special equipment or platforms, microneedle structures that are fabricated either by assembling 2D probe combs or etching bulk materials are expensive and time consuming.”
From A flexible three-dimensional electrode mesh: An enabling technology for wireless brain–computer interface prostheses (2016) · cites this paper as [13]
Cites
What is the Young's Modulus of Silicon?
Hopcroft, M. A., Nix, W. D., & Kenny, T. W. (2010) · Journal of Microelectromechanical Systems · doi:10.1109/jmems.2009.2039697 · Cited by 2,135 · see citing works
Kinetics of rapid electrode reactions
Randles, J. E. B. (1947) · Discussions of the Faraday Society · doi:10.1039/df9470100011 · Cited by 1,900 · see citing works
Evaluation of MEMS materials of construction for implantable medical devices
Kotzar, G., Freas, M., Abel, P. B., Fleischman, A. J., Roy, S., Zorman, C. A., Moran, J. M., & Melzak, J. M. (2002) · Biomaterials · doi:10.1016/s0142-9612(02)00007-8 · Cited by 440 · see citing works
Retinal Prosthesis for the Blind
Margalit, E., Maia, M., Weiland, J. D., Greenberg, R. J., Fujii, G. Y., Torres, G. F., Piyathaisere, D. V., O’Hearn, T. M., Liu, W., Lazzi, G., et al. (2002) · Survey of Ophthalmology · doi:10.1016/s0039-6257(02)00311-9 · Cited by 425 · see citing works
Meng, E. F., Li, P.-Y., & Tai, Y. (2008) · Journal of Micromechanics and Microengineering · doi:10.1088/0960-1317/18/4/045004 · Cited by 159 · see citing works
An electrically active microneedle array for electroporation
Choi, S., Kim, Y. C., Park, J., et al. (2009) · Biomedical Microdevices · doi:10.1007/s10544-009-9381-x · Cited by 131 · see citing works
Biocompatibility of polyimide microelectrode array for retinal stimulation
Seo, J.-M., Kim, S. J., Chung, H., Kim, E., Yu, H. G., & Yu, Y. S. (2003) · Materials Science and Engineering C · doi:10.1016/j.msec.2003.09.019 · Cited by 119 · see citing works
Wang, R., Huang, X., Liu, G., Wang, W., Dong, F., & Li, Z. (2010) · Journal of Microelectromechanical Systems · doi:10.1109/jmems.2009.2039773 · Cited by 63 · see citing works
Self-citationA novel method of fabricating convoluted shaped electrode arrays for neural and retinal prostheses
Bhandari, R., Negi, S., Rieth, L. W., Normann, R. A., & Solzbacher, F. (2007) · Sensors and Actuators A Physical · doi:10.1016/j.sna.2007.10.072 · Cited by 59 · see citing works
A novel masking method for high aspect ratio penetrating microelectrode arrays
Bhandari, R., Negi, S., Rieth, L. W., Normann, R. A., & Solzbacher, F. (2009) · Journal of Micromechanics and Microengineering · doi:10.1088/0960-1317/19/3/035004 · Cited by 38 · see citing works
Design and fabrication of novel three-dimensional multi-electrode array using SOI wafer
Chu, H.-Y., Kuo, T.-Y., Chang, B., Lu, S.-W., Chiao, C., & Fang, W. (2006) · Sensors and Actuators A Physical · doi:10.1016/j.sna.2006.02.010 · Cited by 23 · see citing works
A robust batch-fabricated high-density cochlear electrode array
Johnson, A. C., & Wise, K. D. (2010) · Proceedings, IEEE micro electro mechanical systems · doi:10.1109/memsys.2010.5442379 · Cited by 16 · see citing works
Mechanical assembly of a microelectrode array for use in a wireless intracortical recording device
Fofonoff, T., Wiseman, C., Dyer, R., Malasek, J., Burgert, J., Martel, S. M., Hunter, I. W., Hatsopoulos, N. G., & Donoghue, J. P. (2003) · International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology (MMB) · doi:10.1109/mmb.2002.1002328 · Cited by 16 · see citing works
Design and fabrication of a microelectrode array dedicated for cortical electrical stimulation
Pigeon, S., Michel Meunier, A., Sawan, M., & Martel, S. M. (2004) · Conference proceedings - Canadian Conference on Electrical and Computer Engineering · doi:10.1109/ccece.2003.1226019 · Cited by 14 · see citing works
A novel fabrication method of flexible micro electrode array for neural recording
Wang, T., Yang, W., Huang, H.-H., et al. (2007) · Proceedings, IEEE micro electro mechanical systems · doi:10.1109/memsys.2007.4432972 · Cited by 12 · see citing works
Fabrication and properties of 3D flexible parylene-based microelectrode array with silicon tips
Wang, R., Zhao, W. G., Wang, W., et al. (2011) · Proceedings, IEEE micro electro mechanical systems · doi:10.1109/memsys.2011.5734409 · Cited by 5 · see citing works
Self-citationHong, S., Lee, S. M., Yoo, H. J., et al. (2011) · International Conference on Solid-State Sensors, Actuators and Microsystems · doi:10.1109/transducers.2011.5969312 · Cited by 4 · see citing works
Solid Silicon Microneedles for Safe and Effective Drug Delivery to Human Eye
Abser, N. (2011) · Cited by 3 · see citing works
Flagged first, then by citations
Cited by
Sorted by citations
Xiang, Z., Liu, J., & Lee, C. (2016) · Microsystems & Nanoengineering · doi:10.1038/micronano.2016.12 · Cited by 100 · see citing works
Byun, D., Cho, S. J., & Kim, S. (2013) · Journal of Micromechanics and Microengineering · doi:10.1088/0960-1317/23/12/125010 · Cited by 39 · see citing works
Recording nerve signals in canine sciatic nerves with a flexible penetrating microelectrode array
Byun, D., Cho, S.-J., Lee, B. H., Min, J., Lee, J.-H., & Kim, S. (2017) · Journal of Neural Engineering · doi:10.1088/1741-2552/aa7493 · Cited by 23 · see citing works
- Authors
- Wang, R., Zhao, W., Wang, W., & Li, Z.
- Affiliations
- Peking University (CN)
- Chinese Academy of Sciences (CN)
- Venue
- Journal of Microelectromechanical Systems
- Published
- 2012-10
- Volume
- 21
- Issue
- 5
- Pages
- 1084-1089
- ISSN
- 1057-7157 (ISSN-L)
- 1941-0158
- OpenAlex
- W2011118497
- Cited by
- 55
- References
- 18
- Citations by year
- 2026: 1 · 2025: 7 · 2024: 2 · 2023: 1 · 2022: 4 · 2021: 6 · 2020: 2 · 2019: 3 · 2018: 6 · 2017: 5 · 2016: 5 · 2015: 5 · 2014: 3 · 2013: 5
- FWCI
- 1.71
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Journal of Microelectromechanical Systems (publishedVersion)
- Funders
- Tsinghua University
- Topics
- Life Sciences › Neuroscience › Cellular and Molecular Neuroscience › Neuroscience and Neural Engineering
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
- Physical Sciences › Engineering › Biomedical Engineering › Analog and Mixed-Signal Circuit Design
- Keywords
- silicon microneedles, silicon-on-insulator, tissue penetration, neural recording, flexible electronics, impedance spectroscopy
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
