Fabrication and Characterization of a Parylene-Based Three-Dimensional Microelectrode Array for Use in Retinal Prosthesis
Abstract
A novel Parylene-based shape-transferring technique was developed to fabricate 3-D microelectrodes, which fulfilled the requirements of the high-density microelectrode array (MEA) used in retinal prosthesis. A process combining anisotropic and isotropic etching was utilized to form the 3-D silicon-tip array whose shape was transferred to the Parylene C film as a flexible and biocompatible substrate. Platinum was chosen as the electrode material owing to its high charge delivery capacity and chemical inertness in the physiological environment. An aluminum-photoresist dual-layer lift-off process was employed for platinum patterning on the substrate with high tips. To avoid the cracking problem existing in the platinum-Parylene C structure, a gold intermediate layer was introduced to retard the tendency. To test the superiority of the present 3-D flexible MEA compared with the planar one, electrical properties of MEAs were characterized bothin vitroandin vivo. The experimental results showed that the impedance of the 3-D electrode was about 72.7% of the planar one at 1 kHz with the same footprintin vitro, and 71.5%in vivo. The preliminary surgical experiment validated the feasibility of the 3-D MEA in retinal prosthesis.
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Fabrication of 3D microneedle electrodes by assembling 2D probe combs or etching bulk materials is expensive and time consuming.
“Because these approaches require special equipment or platforms, microneedle structures that are fabricated either by assembling 2D probe combs or etching bulk materials are expensive and time consuming.”
From A flexible three-dimensional electrode mesh: An enabling technology for wireless brain–computer interface prostheses (2016) · cites this paper as [12]
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- Authors
- Wang, R., Huang, X., Liu, G., Wang, W., Dong, F., & Li, Z.
- Affiliations
- Peking University (CN)
- Chinese Academy of Medical Sciences & Peking Union Medical College (CN)
- Venue
- Journal of Microelectromechanical Systems
- Published
- 2010-04
- Volume
- 19
- Issue
- 2
- Pages
- 367-374
- ISSN
- 1057-7157 (ISSN-L)
- 1941-0158
- OpenAlex
- W2141145927
- Cited by
- 63
- References
- 29
- Citations by year
- 2025: 1 · 2024: 1 · 2023: 3 · 2022: 3 · 2021: 4 · 2020: 4 · 2019: 6 · 2018: 6 · 2017: 2 · 2016: 8 · 2015: 6 · 2014: 8 · 2013: 4 · 2012: 3
- FWCI
- 1.41
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Journal of Microelectromechanical Systems (publishedVersion)
- Funders
- University of California, Davis
- Topics
- Life Sciences › Neuroscience › Cellular and Molecular Neuroscience › Neuroscience and Neural Engineering
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
- Physical Sciences › Engineering › Biomedical Engineering › Analog and Mixed-Signal Circuit Design
- Keywords
- Parylene C, retinal prosthesis, platinum electrode, electrode impedance, surgical implantation
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