Flip Chip Assembly of Thinned Silicon Die on Flex Substrates
Abstract
Driven by a growing range of applications in the automotive, industrial, military, aerospace, computer, telecommunication, consumer electronics, and medical electronics industries, miniaturization and the use of flex circuits continue to be of prime interest to electronics manufacturers. The assembly of thinned silicon die (25-100 mum) onto flex substrates provides options for ultrathin, flexible electronics for applications ranging from smart cards to space-based radars. For high-density applications, 3-D modules can be fabricated by stacking and laminating preassembled and tested flex layers and then processing vertical interconnections. This paper describes a low cost, highly manufacturable process developed for flip chip assembly of thinned die to poly-imide flex substrates that eliminates the need for special handling tools and techniques. In this paper, solder bumped thinned die are reflow soldered to the patterned flex using a method that maintains the flex substrate flat during die placement and reflow. Reflow is followed by underfill dispense and cure. The underfill dispense process is critical to avoid underfill flowing onto the top of the thin silicon die and will be discussed. Parts assembled using these processes have undergone reliability testing, a high degree of reliability has been found, and those results are presented.
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Flip-chip bonding has been extensively used on flexible substrates in several variations, including reflow soldering and thermocompression processes for thin dice (50 μm).
“Flip-chip bonding has been extensively used on flexible substrates in several variations, including reflow soldering and thermocompression processes for thin dice (50 μm) (Banda et al. 2008; Zhang et al. 2009), but dispensing the underfill without allowing the material to flow on top of the very thin die is challenging.”
From Realizing flexible bioelectronic medicines for accessing the peripheral nerves – technology considerations (2018) · cites this paper as Banda et al. 2008
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The challenge of ultra thin chip assembly
Feil, M., Adler, C., Hemmetzberger, D., et al. (2004) · 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC) · doi:10.1109/ectc.2004.1319312 · Cited by 56 · see citing works
Ultra-thin electronic device package
Chen, K. Y., Zenner, R. L. D., Ameson, M., & Mountain, D. (2000) · IEEE Transactions on Advanced Packaging · doi:10.1109/6040.826758 · Cited by 45 · see citing works
Foldable Flex and Thinned Silicon Multichip Packaging Technology
Balde, J. W. (2003) · Emerging technology in advanced packaging series · doi:10.1007/978-1-4615-0231-9 · Cited by 30 · see citing works
Experimental investigation of bare silicon wafer warp
Draney, N. R., Liu, J. J., & Jiang, T. (2004) · IEEE Workshop on Microelectronics and Electron Devices (WMED) · doi:10.1109/wmed.2004.1297371 · Cited by 28 · see citing works
Ultra thin chips for miniaturized products
Jung, E., Neumann, A., Wojakowski, D., et al. (2003) · 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC) · doi:10.1109/ectc.2002.1008241 · Cited by 23 · see citing works
Cost-performance wafer thinning technology
Wu, L. W., Chan, J., & Hsiao, C. S. (2004) · 2022 IEEE 72nd Electronic Components and Technology Conference (ECTC) · doi:10.1109/ectc.2003.1216488 · Cited by 20 · see citing works
Advantages of wet chemical spin-processing for wafer thinning and packaging applications
Hendrix, M., Drews, S., & Hurd, T. (2002) · IEEE/CPMT International Electronics Manufacturing Technology Symposium · doi:10.1109/iemt.2000.910733 · Cited by 12 · see citing works
Implantable flexible wireless pressure sensor module
Shin, K.-H., Moon, C., Lee, T.-H., et al. (2006) · Proceedings of IEEE Sensors/Proceedings of IEEE Sensors ... · doi:10.1109/icsens.2004.1426302 · Cited by 12 · see citing works
Ultra thin chips for miniaturized products
Jung, E., Ostmann, A., Wojakowski, D., et al. (2002) · doi:10.1109/polytr.2001.973287 · Cited by 11 · see citing works
a Low Cost Near-Hermetic Multichip Module Based on Liquid Crystal Polymer Dielectrics
Noll, T., Jayaraj, K., Farrell, B., et al. (1996) · Multichip Modules · Cited by 6 · see citing works
Ultrathin Assemblies on Flexible Substrates
Pahl, B., Kallmayer, C., Aschenbrenner, R., et al. (2006) · Electronic Packaging Technology Conference · doi:10.1109/eptc.2005.1614482 · Cited by 5 · see citing works
Silicon thinning and stacked packages
New, D. (2003) · doi:10.1109/iemt.2002.1032722 · Cited by 5 · see citing works
Recent Advancements in Flex Circuit Technology Using Liquid Crystal Polymer Substrates
Yang, R. X., & Hayden, T. F. (2003) · Emerging technology in advanced packaging series · doi:10.1007/978-1-4615-0231-9_11 · Cited by 3 · see citing works
High Performance Organic Packaging Materials. Liquid Crystal Polymer Material for LSI-Mounting.
Tanaka, Y., & Onodera, M. (1999) · Journal of The Japan Institute of Electronics Packaging · doi:10.5104/jiep.2.84 · Cited by 2 · see citing works
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Giagka, V., & Serdijn, W. A. (2018) · Bioelectronic Medicine · doi:10.1186/s42234-018-0010-y · Cited by 58 · see citing works
Flexible Electronics: Thin Silicon Die on Flexible Substrates
Zhang, T., Hou, Z., Johnson, R. W., Del Castillo, L., Moussessian, A., Greenwell, R., & Blalock, B. J. (2009) · IEEE Transactions on Electronics Packaging Manufacturing · doi:10.1109/tepm.2009.2028880 · Cited by 40 · see citing works
Self-citation
- Authors
- Banda, C., Johnson, R. W., Zhang, T., Hou, Z., & Charles, H. K.
- Affiliations
- GE Global Research (United States) (US)
- Seagate (United States) (US)
- Johns Hopkins University (US)
- ORCID
- Zhang, Tan
- Venue
- IEEE Transactions on Electronics Packaging Manufacturing
- Published
- 2008-01
- Volume
- 31
- Issue
- 1
- Pages
- 1-8
- ISSN
- 1521-334X (ISSN-L)
- OpenAlex
- W2130790779
- Cited by
- 63
- References
- 14
- Citations by year
- 2026: 2 · 2024: 2 · 2022: 3 · 2021: 5 · 2020: 1 · 2019: 3 · 2018: 6 · 2016: 7 · 2015: 5 · 2014: 5 · 2013: 5 · 2012: 5
- FWCI
- 3.59
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- IEEE Transactions on Electronics Packaging Manufacturing (publishedVersion)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Electronic Packaging and Soldering Technologies
- Physical Sciences › Engineering › Electrical and Electronic Engineering › 3D IC and TSV technologies
- Physical Sciences › Engineering › Industrial and Manufacturing Engineering › Manufacturing Process and Optimization
- Keywords
- flip-chip bonding, polyimide substrate, solder bumping, reflow soldering, flexible electronics, 3D stacking, reliability testing
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