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Hole Compensation Mechanism of P-Type GaN Films

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Nakamura, Shuji, Iwasa, Naruhito, Masayuki Senoh, Masayuki Senoh, Takashi Mukai, Takashi Mukai·1992·Japanese Journal of Applied Physics

Abstract

Low-resistivity p-type GaN films, which were obtained by N 2-ambient thermal annealing or low-energy electron-beam irradiation (LEEBI) treatment, showed a resistivity as high as 1×10 6 Ω·cm after NH 3-ambient thermal annealing at temperatures above 600°C. In the case of N 2-ambient thermal annealing at temperatures between room temperature and 1000°C, the low-resistivity p-type GaN films showed no change in resistivity, which was almost constant between 2 Ω·cm and 8 Ω·cm. These results indicate that atomic hydrogen produced by NH 3 dissociation at temperatures above 400°C is related to the hole compensation mechanism. A hydrogenation process whereby acceptor-H neutral complexes are formed in p-type GaN films was proposed. The formation of acceptor-H neutral complexes causes hole compensation, and deep-level and weak blue emissions in photoluminescence.

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Metadata

Authors
Nakamura, S., Iwasa, N., Masayuki Senoh, M. S., & Takashi Mukai, T. M.
Venue
Japanese Journal of Applied Physics
Published
1992-05-01
Volume
31
Issue
5R
Pages
1258
ISSN
  • 0021-4922 (ISSN-L)
  • 1347-4065
OpenAlex
W2003757926
Cited by
1,079
References
8
FWCI
12.47
Type
journal article
Language
en
Open access
bronze

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CoChat. (2026). Citation check: Hole Compensation Mechanism of P-Type GaN Films. https://app.cochat.ai/papers/10.1143/jjap.31.1258
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Nakamura, S., Iwasa, N., Masayuki Senoh, M. S., & Takashi Mukai, T. M. (1992). Hole Compensation Mechanism of P-Type GaN Films. Japanese Journal of Applied Physics. https://doi.org/10.1143/jjap.31.1258

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