Sensitivity increase for coating thickness determination using THz waveguides
Open accessAbstract
We report on layer thickness determination down to a thickness of 2.5 microns using terahertz waveguide spectroscopy. Compared to typical single-pass transmission measurements in the time domain, the effective THz pulse delay is considerably increased for a given layer thickness by using the high filling factor of the THz waveguide. This corresponds to a sensitivity increase up to a factor of 50 for the measured delay, allowing the direct measurement of layer thicknesses down to below hundredths of a THz wavelength.
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The approach combines prior work on terahertz wave compression using metal flares with the sensing capabilities of terahertz surface waveguides.
“This approach combines our previous work on THz wave compression using metal flares 12 and the sensing capabilities of THz surface waveguides.13”
From Highly sensitive terahertz measurement of layer thickness using a two-cylinder waveguide sensor (2010) · cites this paper as [13]
Cites
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Self-citationUndistorted guided-wave propagation of subpicosecond terahertz pulses
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Self-citationHigh-resolution time-of-flight terahertz tomography using a femtosecond fiber laser
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Highly sensitive terahertz measurement of layer thickness using a two-cylinder waveguide sensor
Theuer, M., Beigang, R., & Grischkowsky, D. (2010) · Applied Physics Letters · doi:10.1063/1.3481080 · Cited by 38 · see citing works
Self-citation
- Authors
- Theuer, M., Beigang, R., & Grischkowsky, D.
- Affiliations
- Oklahoma State University (US)
- Fraunhofer Institute for Physical Measurement Techniques (DE)
- Venue
- Optics Express
- Publisher
- Optica Publishing Group
- Published
- 2010-05-14
- Volume
- 18
- Issue
- 11
- Pages
- 11456
- ISSN
- 1094-4087 (ISSN-L)
- OpenAlex
- W2013195116
- Cited by
- 16
- References
- 12
- Citations by year
- 2019: 2 · 2016: 1 · 2014: 2 · 2013: 2 · 2012: 6
- FWCI
- 2.77
- Type
- journal article
- Language
- en
- Open access
- gold
- doi.org
- Locations
- Optics Express (publishedVersion)
- PubMed (publishedVersion)
- Publikationsdatenbank der Fraunhofer-Gesellschaft (Fraunhofer-Gesellschaft) (submittedVersion, other-oa)
- Fraunhofer-Publica (Fraunhofer-Gesellschaft) (submittedVersion)
- Funders
- National Science Foundation
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Terahertz technology and applications
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Microwave and Dielectric Measurement Techniques
- Physical Sciences › Engineering › Mechanics of Materials › Thermography and Photoacoustic Techniques
- Keywords
- terahertz waveguides, coating thickness measurement, layer thickness measurement, sensitivity enhancement, filling factor, time-domain spectroscopy
- MeSH terms
- Adsorption, Equipment Design, Refractometry, Sensitivity and Specificity, Reproducibility of Results, Computer-Aided Design, Equipment Failure Analysis, Terahertz Spectroscopy
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