The DOI matches its Crossref record; 28 of the 28 references it cites were found in a registry or an index.
Ultra-low-loss high-aspect-ratio Si_3N_4 waveguides
Open accessAbstract
We characterize an approach to make ultra-low-loss waveguides using stable and reproducible stoichiometric Si3N4 deposited with low-pressure chemical vapor deposition. Using a high-aspect-ratio core geometry, record low losses of 8-9 dB/m for a 0.5 mm bend radius down to 3 dB/m for a 2 mm bend radius are measured with ring resonator and optical frequency domain reflectometry techniques. From a waveguide loss model that agrees well with experimental results, we project that 0.1 dB/m total propagation loss is achievable at a 7 mm bend radius with this approach.
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“Also, SiN waveguides can have lower scattering losses from sidewall roughness in comparison to Si waveguides [27,28].”
From Integrated 1 × 3 MEMS silicon nitride photonics switch (2022) · cites this paper as [28]
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Citations
Cites
Analysis of curved optical waveguides by conformal transformation
Heiblum, M., & Harris, J. (1975) · IEEE Journal of Quantum Electronics · doi:10.1109/jqe.1975.1068563 · Cited by 741 · cited 1×
“To simulate bend radiation loss, the curved waveguide is transformed into an equivalent straight waveguide through a conformal mapping of the refractive index [19 ].”
MethodA theoretical analysis of scattering loss from planar optical waveguides
Payne, F. P., & Lacey, J. P. R. (1994) · Optical and Quantum Electronics · doi:10.1007/bf00708339 · Cited by 542
Optical Fiber Communications: Principles and Practice
Senior, J. M., & Kazovsky, L. G. (1987) · Physics Today · doi:10.1063/1.2820238 · Cited by 497 · cited 2×
“Propagation loss values for silicon oxynitride, silicon nitride, Ge-doped SiO 2 , P-doped SiO 2 , and polymer waveguide cores are shown as red squares in the figure with index contrasts ranging from 0.25 to 25% [1,6,7,11,22 – 32].”
BackgroundInfluentialEffect of size and roughness on light transmission in a Si/SiO2 waveguide: Experiments and model
Lee, K. C. Y., Lim, D. R. C. S., Luan, H.-C., Agarwal, A., Foresi, J. S., & Kimerling, L. C. (2000) · Applied Physics Letters · doi:10.1063/1.1308532 · Cited by 438
Vector Finite Difference Modesolver for Anisotropic Dielectric Waveguides
Fallahkhair, A. B., Li, K. S., & Murphy, T. E. (2008) · Journal of Lightwave Technology · doi:10.1109/jlt.2008.923643 · Cited by 402
Ay, F., & Aydınlı, A. (2004) · Optical Materials · doi:10.1016/j.optmat.2003.12.004 · Cited by 271
Barwicz, T., & Haus, H. A. (2005) · Journal of Lightwave Technology · doi:10.1109/jlt.2005.850816 · Cited by 237 · cited 10×
“…G is the dyadic Green’s function for one -layer media, 2 ( , ) shape F is the power array factor corresponding to the electric field shape at the sidewall as defined in [15], and 2 ( , ) pol S is the normalized power radiation profile of a point source with x, y, or z polarization, e.g.”
BackgroundMethodInfluentialPhotonic technologies for angular velocity sensing
Ciminelli, C., Dell’Olio, F., Campanella, C. E., & Armenise, M. N. (2010) · Advances in Optics and Photonics · doi:10.1364/aop.2.000370 · Cited by 211
Silica-based optical integrated circuits
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Ultra-Low-Loss Polymer Waveguides
Yeniay, A., Gao, R., TAKAYAMA, K., Gao, R., & Garito, A. F. (2004) · Journal of Lightwave Technology · doi:10.1109/jlt.2003.822206 · Cited by 112
Research works printed but not linked: 1
- Ciminelli, 2009, J. Eur. Opt. Soc. Rapid Publ., 4, 1
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Integrated microwave photonics
Marpaung, D. A. I., Roeloffzen, C. G. H., Heideman, R., Leinse, A., Sales, S., & Capmany, J. (2013) · Laser & Photonics Review · doi:10.1002/lpor.201200032 · Cited by 790
Self-citationSilicon nitride in silicon photonics
Blumenthal, D. J., Heideman, R., Geuzebroek, D., Leinse, A., & Roeloffzen, C. (2018) · Proceedings of the IEEE · doi:10.1109/jproc.2018.2861576 · Cited by 641
“Reprinted with permission from [55], c ©OSA 2011.”
BackgroundSelf-citationDaoxin Dai, A., Bauters, J. F., & Bowers, J. E. (2012) · Light Science & Applications · doi:10.1038/lsa.2012.1 · Cited by 521
Self-citationHybrid Silicon Photonic Integrated Circuit Technology
Heck, M. J. R., Bauters, J. F., Davenport, M. L., Doylend, J. K., Jain, S., Kurczveil, G., Srinivasan, S., Tang, Y., & Bowers, J. E. (2012) · IEEE Journal of Selected Topics in Quantum Electronics · doi:10.1109/jstqe.2012.2235413 · Cited by 423
Self-citationPlanar waveguides with less than 01 dB/m propagation loss fabricated with wafer bonding
Bauters, J. F., Heck, M. J. R., John, D. D., Barton, J. S., Bruinink, C. M., Leinse, A., Heideman, R., Blumenthal, D. J., & Bowers, J. E. (2011) · Optics Express · doi:10.1364/oe.19.024090 · Cited by 418
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Metadata
- Authors
- Bauters, J. F., Heck, M. J. R., John, D., Dai, D., Tien, M.-C., Barton, J. S., Leinse, A., Heideman, R. G., Blumenthal, D. J., & Bowers, J. E.
- Affiliations
- University of California, Santa Barbara (US)
- Venue
- Optics Express
- Publisher
- Optica Publishing Group
- Published
- 2011-02-03
- Volume
- 19
- Issue
- 4
- Pages
- 3163
- ISSN
- 1094-4087 (ISSN-L)
- OpenAlex
- W2169561975
- Cited by
- 492
- References
- 28
- Citations by year
- 2026: 33 · 2025: 48 · 2024: 37 · 2023: 22 · 2022: 38 · 2021: 38 · 2020: 39 · 2019: 30 · 2018: 35 · 2017: 47 · 2016: 33 · 2015: 25 · 2014: 17 · 2013: 22 · 2012: 14
- FWCI
- 14.56
- Type
- journal article
- Language
- en
- Open access
- gold
- doi.org
- Locations
- Optics Express (publishedVersion)
- PubMed (publishedVersion)
- Funders
- Defense Advanced Research Projects Agency
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Photorefractive and Nonlinear Optics
- Physical Sciences › Physics and Astronomy › Condensed Matter Physics › GaN-based semiconductor devices and materials
- Keywords
- silicon nitride waveguides, low-loss waveguides, low-pressure chemical vapor deposition, bending loss, ring resonator, optical frequency domain reflectometry, integrated photonics
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