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Ultra-low-loss high-aspect-ratio Si_3N_4 waveguides
Open accessAbstract
We characterize an approach to make ultra-low-loss waveguides using stable and reproducible stoichiometric Si3N4 deposited with low-pressure chemical vapor deposition. Using a high-aspect-ratio core geometry, record low losses of 8-9 dB/m for a 0.5 mm bend radius down to 3 dB/m for a 2 mm bend radius are measured with ring resonator and optical frequency domain reflectometry techniques. From a waveguide loss model that agrees well with experimental results, we project that 0.1 dB/m total propagation loss is achievable at a 7 mm bend radius with this approach.
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“Also, SiN waveguides can have lower scattering losses from sidewall roughness in comparison to Si waveguides [27,28].”
From Integrated 1 × 3 MEMS silicon nitride photonics switch (2022) · cites this paper as [28]
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Integrated TE and TM optical circulators on ultra-low-loss silicon nitride platform
Pintus, P., Pasquale, F. D., & Bowers, J. E. (2013) · Optics Express · doi:10.1364/oe.21.005041 · Cited by 74
Self-citationVertical integration of high-Q silicon nitride microresonators into silicon-on-insulator platform
Li, Q., Eftekhar, A. A., Sodagar, M., Xia, Z., Atabaki, A. H., & Adibi, A. (2013) · Optics Express · doi:10.1364/oe.21.018236 · Cited by 72
Nonlinear silicon nitride waveguides based on a PECVD deposition platform
Wang, L., Xie, W., Thourhout, D. V., Zhang, Y., Yu, H., & Wang, S. H. (2018) · Optics Express · doi:10.1364/oe.26.009645 · Cited by 72
Lin, P. T., Singh, V., Lin, H. G., Tiwald, T. E., Kimerling, L. C., & Agarwal, A. (2013) · Advanced Optical Materials · doi:10.1002/adom.201300205 · Cited by 72
Selvaraja, S. K., & Sethi, P. (2018) · InTech eBooks · doi:10.5772/intechopen.77150 · Cited by 71
Wang, M., Zhao, K., Wu, J., Li, Y., Yang, Y., Huang, S. W., Zhao, J., Tweedle, T., Carpenter, D. M., Zheng, G., et al. (2021) · International Journal of Extreme Manufacturing · doi:10.1088/2631-7990/abe171 · Cited by 71
“Meanwhile, the OBR can also be used to estimate the propagation loss of the sample from the Rayleigh profile slope [54, 55].”
MethodSodagar, M., Pourabolghasem, R., Eftekhar, A. A., & Adibi, A. (2014) · Optics Express · doi:10.1364/oe.22.016767 · Cited by 70
Integrated multi-wavelength control of an ion qubit
Niffenegger, R., Stuart, J., Sorace-Agaskar, C. M., Kharas, D., Bramhavar, S., Bruzewicz, C., Loh, W., Maxson, R., McConnell, R., Reens, D., et al. (2020) · RePEc: Research Papers in Economics · Cited by 68
Optical Interconnects Finally Seeing the Light in Silicon Photonics: Past the Hype
Mekawey, H. I., Elsayed, M., Ismail, Y., & Swillam, M. A. (2022) · Nanomaterials · doi:10.3390/nano12030485 · Cited by 69
Wu, B.-H., Alexander, R. N., Liu, S., & Zhang, Z. (2020) · Physical Review Research · doi:10.1103/physrevresearch.2.023138 · Cited by 67
“1 dB/m [77].”
BackgroundInfluentialSilicon nitride stress-optic microresonator modulator for optical control applications
Wang, J., Liu, K., Harrington, M., Rudy, R. Q., & Blumenthal, D. J. (2022) · Optics Express · doi:10.1364/oe.467721 · Cited by 65
Self-citationCMOS-compatible 75 mW erbium-doped distributed feedback laser
Hosseini, E. S., Purnawirman, Bradley, J. D. B., Sun, J., Leake, G., Adam, T. N., Coolbaugh, D. D., & Watts, M. R. (2014) · Optics Letters · doi:10.1364/ol.39.003106 · Cited by 66
Low-loss chip-scale programmable silicon photonic processor
Xie, Y., Hong, S., Yan, H., Zhang, C., Zhang, L., Zhuang, L., & Daoxin Dai, A. (2022) · Opto-Electronic Advances · doi:10.29026/oea.2023.220030 · Cited by 65
Opportunities for photonic integrated circuits in optical gas sensors
Hänsel, A., & Heck, M. J. R. (2020) · Journal of Physics Photonics · doi:10.1088/2515-7647/ab6742 · Cited by 68
Self-citationLow-loss and low-crosstalk multi-channel mode (de)multiplexer with ultrathin silicon waveguides
Li, C., & Daoxin Dai, A. (2017) · Optics Letters · doi:10.1364/ol.42.002370 · Cited by 63
Recent Progress of Supercontinuum Generation in Nanophotonic Waveguides
Fang, Y., Bao, C., Li, S., Wang, Z., Geng, W., Wang, Y., Han, X., Jiang, J., Zhang, W., Pan, Z., et al. (2022) · Laser & Photonics Review · doi:10.1002/lpor.202200205 · Cited by 62
A general design algorithm for low optical loss adiabatic connections in waveguides
Chen, T., Lee, H., Li, J., & Vahala, K. J. (2012) · Optics Express · doi:10.1364/oe.20.022819 · Cited by 61
Optoelectromechanical phase shifter with low insertion loss and a 13π tuning range
Grottke, T., Hartmann, W., Schuck, C., & Pernice, W. H. P. (2020) · Optics Express · doi:10.1364/oe.413202 · Cited by 60
Silicon nitride chirped spiral Bragg grating with large group delay
Du, Z., Xiang, C., Fu, T., Chen, M., Yang, S., Bowers, J. E., & Chen, H. (2020) · APL Photonics · doi:10.1063/5.0022963 · Cited by 58
Self-citationRoadmap on material-function mapping for photonic-electronic hybrid neural networks
Miscuglio, M., Adam, G. C., Kuzum, D., & Sorger, V. J. (2019) · APL Materials · doi:10.1063/1.5109689 · Cited by 58
“40 In contrast to SOI, due to the fundamental flexibility of the deposition techniques 41 , Si 3 N 4 also allows for easy integration and 3D stacking flexibility with either SOI or CMOS platforms 42 .”
MethodPiezoelectrically tunable, narrow linewidth photonic integrated extended-DBR lasers
Siddharth, A., Attanasio, A., Bianconi, S., Lihachev, G., Zhang, J., Qiu, Z., Bancora, A., Kenning, S., Wang, R. N., Voloshin, A., et al. (2024) · Optica · doi:10.1364/optica.524703 · Cited by 57
A Survey of Silicon Photonics for Energy-Efficient Manycore Computing
Pasricha, S., & Nikdast, M. (2020) · IEEE Design and Test · doi:10.1109/mdat.2020.2982628 · Cited by 56
“Silicon nitride waveguides with losses smaller than 1 dB/m have been proposed, but this comes at the expense of lateral and/or vertical confinement [26]–[28].”
BackgroundInterferometric optical gyroscope based on an integrated silica waveguide coil with low loss
Liu, D., Li, H., Wang, X., Liu, H., Ni, P., Liu, N., & Feng, L. (2020) · Optics Express · doi:10.1364/oe.392510 · Cited by 55
Graphene photodetector integrated on silicon nitride waveguide
Wang, J., Cheng, Z., Chen, Z., Xu, J., Tsang, H. K., & Shu, C. (2015) · Journal of Applied Physics · doi:10.1063/1.4917378 · Cited by 54
Towards low loss non-volatile phase change materials in mid index waveguides
Faneca, J., Zeimpekis, I., Ilie, S. T., Bucio, T. D., Grabska, K., Hewak, D. W., & Gardes, F. Y. (2021) · Neuromorphic Computing and Engineering · doi:10.1088/2634-4386/ac156e · Cited by 54
Tuning Optimization of Ring Resonator Delays for Integrated Optical Beam Forming Networks
Liu, Y., Wichman, A., Isaac, B. J., Kalkavage, J. H., Adles, E. J., Clark, T. R., & Klamkin, J. (2017) · Journal of Lightwave Technology · doi:10.1109/jlt.2017.2762641 · Cited by 54
“Given that ultra-low loss waveguides have been developed in the past years [18], we may express the delay spectrum of a single ORR analytically with a lossless ring waveguide assumption as [19]”
Gatkine, P. R., Veilleux, S., & Dagenais, M. (2019) · Applied Sciences · doi:10.3390/app9020290 · Cited by 55
“In the last few years, silicon nitride on silica (Si3N4/SiO2) has emerged as a low-loss and high index contrast material for photonic devices [63,64].”
BackgroundPhoto-induced second-order nonlinearity in stoichiometric silicon nitride waveguides
Porcel, M. A. G., Mak, J., Taballione, C., Schermerhorn, V. K., Epping, J. P., van der Slot, P. J. M., & Boller, K. J. (2017) · Optics Express · doi:10.1364/oe.25.033143 · Cited by 53
“Photonic integrated circuits (PICs) realized with various different material platforms, e.g., SOI (silicon on insulator) [1, 2], InP [3, 4], polymers [3], SiO2 [3, 2] and SiN [5, 6], have gained a tremendously growing importance in modern photonic technologies.”
BackgroundInfluentialHigh-quality Si_3N_4 circuits as a platform for graphene-based nanophotonic devices
Gruhler, N., Benz, C., Jang, H., Ahn, J., Danneau, R., & Pernice, W. H. P. (2013) · Optics Express · doi:10.1364/oe.21.031678 · Cited by 52
Integrated structured light manipulation
Wang, J., Li, K., & Quan, Z. (2024) · Photonics Insights · doi:10.3788/pi.2024.r05 · Cited by 53
Metadata
- Authors
- Bauters, J. F., Heck, M. J. R., John, D., Dai, D., Tien, M.-C., Barton, J. S., Leinse, A., Heideman, R. G., Blumenthal, D. J., & Bowers, J. E.
- Affiliations
- University of California, Santa Barbara (US)
- Venue
- Optics Express
- Publisher
- Optica Publishing Group
- Published
- 2011-02-03
- Volume
- 19
- Issue
- 4
- Pages
- 3163
- ISSN
- 1094-4087 (ISSN-L)
- OpenAlex
- W2169561975
- Cited by
- 492
- References
- 28
- Citations by year
- 2026: 33 · 2025: 48 · 2024: 37 · 2023: 22 · 2022: 38 · 2021: 38 · 2020: 39 · 2019: 30 · 2018: 35 · 2017: 47 · 2016: 33 · 2015: 25 · 2014: 17 · 2013: 22 · 2012: 14
- FWCI
- 14.56
- Type
- journal article
- Language
- en
- Open access
- gold
- doi.org
- Locations
- Optics Express (publishedVersion)
- PubMed (publishedVersion)
- Funders
- Defense Advanced Research Projects Agency
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Photorefractive and Nonlinear Optics
- Physical Sciences › Physics and Astronomy › Condensed Matter Physics › GaN-based semiconductor devices and materials
- Keywords
- silicon nitride waveguides, low-loss waveguides, low-pressure chemical vapor deposition, bending loss, ring resonator, optical frequency domain reflectometry, integrated photonics
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