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Cited by 964

The DOI matches its Crossref record; 33 of the 33 references it cites were found in a registry or an index.

Physical Mechanisms behind the Field‐Cycling Behavior of HfO2‐Based Ferroelectric Capacitors

Open access
Pešić, Milan, Fengler, Franz Paul Gustav, Larcher, Luca, Padovani, Andrea, Schenk, Tony, Grimley, Everett D., Sang, Xiahan, LeBeau, James M., Slesazeck, Stefan, Schroeder, Uwe, Mikolajick, Thomas·2016·Advanced Functional Materials

Abstract

Novel hafnium oxide (HfO 2)‐based ferroelectrics reveal full scalability and complementary metal oxide semiconductor integratability compared to perovskite‐based ferroelectrics that are currently used in nonvolatile ferroelectric random access memories (FeRAMs). Within the lifetime of the device, two main regimes of wake‐up and fatigue can be identified. Up to now, the mechanisms behind these two device stages have not been revealed. Thus, the main scope of this study is an identification of the root cause for the increase of the remnant polarization during the wake‐up phase and subsequent polarization degradation with further cycling. Combining the comprehensive ferroelectric switching current experiments, Preisach density analysis, and transmission electron microscopy (TEM) study with compact and Technology Computer Aided Design (TCAD) modeling, it has been found out that during the wake‐up of the device no new defects are generated but the existing defects redistribute within the device. Furthermore, vacancy diffusion has been identified as the main cause for the phase transformation and consequent increase of the remnant polarization. Utilizing trap density spectroscopy for examining defect evolution with cycling of the device together with modeling of the degradation results in an understanding of the main mechanisms behind the evolution of the ferroelectric response.

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Crossref · 10.1002/adfm.201600590

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Metadata

Authors
Pešić, M., Fengler, F. P. G., Larcher, L., Padovani, A., Schenk, T., Grimley, E. D., Sang, X., LeBeau, J. M., Slesazeck, S., Schroeder, U., & Mikolajick, T.
Venue
Advanced Functional Materials
Publisher
Wiley
Published
2016-05-06
Volume
26
Issue
25
Pages
4601-4612
ISSN
  • 1616-301X (ISSN-L)
  • 1616-3028
OpenAlex
W2346962696
Cited by
964
References
33
FWCI
24.85
Type
journal article
Language
en
Open access
green

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CoChat. (2026). Citation check: Physical Mechanisms behind the Field‐Cycling Behavior of HfO2‐Based Ferroelectric Capacitors. https://app.cochat.ai/papers/10.1002/adfm.201600590
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Pešić, M., Fengler, F. P. G., Larcher, L., Padovani, A., Schenk, T., Grimley, E. D., Sang, X., LeBeau, J. M., Slesazeck, S., Schroeder, U., & Mikolajick, T. (2016). Physical Mechanisms behind the Field‐Cycling Behavior of HfO2‐Based Ferroelectric Capacitors. Advanced Functional Materials. https://doi.org/10.1002/adfm.201600590

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