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Cited by 457

The DOI matches its Crossref record; 11 of the 11 references it cites were found in a registry or an index.

Rational Design of Capacitive Pressure Sensors Based on Pyramidal Microstructures for Specialized Monitoring of Biosignals

Ruth, Sara Rachel Arussy, Beker, Levent, Tran, Helen, Feig, Vivian Rachel, Matsuhisa, Naoji, Bao, Zhenan·2020·Advanced Functional Materials

Abstract

There is an increasing demand for specialized pressure sensors in various applications. Previously, capacitive pressure sensors have been shown to have wide versatility in use, with a high degree of potential tuning possible through manipulating the geometry or material selection of the dielectric layer. However, in order to make sensors that are tunable and predictable, the design and fabrication method first needs to be developed. Presented here is an improved fabrication method to achieve tunable, consistent, and reproducible pressure sensors by using a pyramid microstructured dielectric layer along with a lamination layer. The as‐produced sensor performance is able to match predicted trends. Further, a simple model based on this system is developed and its efficacy is experimentally confirmed. Then, the model to predict a wide range of material and microstructure geometric properties prior to device fabrication is used to provide trends on sensor performance. Finally, it is demonstrated that the new method can be used to targetedly design a pressure sensor for a specific application—in vitro pulse sensing.

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Metadata

Authors
Ruth, S. R. A., Beker, L., Tran, H., Feig, V. R., Matsuhisa, N., & Bao, Z.
Venue
Advanced Functional Materials
Publisher
Wiley
Published
2019-06-26
Volume
30
Issue
29
ISSN
  • 1616-301X (ISSN-L)
  • 1616-3028
OpenAlex
W2955678149
Cited by
457
References
11
FWCI
14.93
Type
journal article
Language
en
Open access
closed

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CoChat. (2026). Citation check: Rational Design of Capacitive Pressure Sensors Based on Pyramidal Microstructures for Specialized Monitoring of Biosignals. https://app.cochat.ai/papers/10.1002/adfm.201903100
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Ruth, S. R. A., Beker, L., Tran, H., Feig, V. R., Matsuhisa, N., & Bao, Z. (2020). Rational Design of Capacitive Pressure Sensors Based on Pyramidal Microstructures for Specialized Monitoring of Biosignals. Advanced Functional Materials. https://doi.org/10.1002/adfm.201903100

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