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Cited by 538

The DOI matches its Crossref record; 21 of the 21 references it cites were found in a registry or an index.

Microengineering Pressure Sensor Active Layers for Improved Performance

Ruth, Sara Rachel Arussy, Feig, Vivian Rachel, Tran, Helen, Bao, Zhenan·2020·Advanced Functional Materials

Abstract

Pressure sensors play an integral role in a wide range of applications, such as soft robotics and health monitoring. In order to meet this demand, many groups microengineer the active layer—the layer that deforms under pressure and dictates changes in the output signal—of capacitive, resistive/piezoresistive, piezoelectric, and triboelectric pressure sensors in order to improve sensor performance. Geometric microengineering of the active layer has been shown to improve performance parameters such as sensitivity, dynamic range, limit of detection, and response and relaxation times. There are a wide range of implemented designs, including microdomes, micropyramids, lines or microridges, papillae, microspheres, micropores, and microcylinders, each offering different advantages for a particular application. It is important to compare the techniques by which the microengineered active layers are designed and fabricated as they may provide additional insights on compatibility and sensing range limits. To evaluate each fabrication method, it is critical to take into account the active layer uniformity, ease of fabrication, shape and size versatility and tunability, and scalability of both the device and the fabrication process. By better understanding how microengineering techniques and design compares, pressure sensors can be targetedly designed and implemented.

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Metadata

Authors
Ruth, S. R. A., Feig, V. R., Tran, H., & Bao, Z.
Venue
Advanced Functional Materials
Publisher
Wiley
Published
2020-08-09
Volume
30
Issue
39
ISSN
  • 1616-301X (ISSN-L)
  • 1616-3028
OpenAlex
W3048243984
Cited by
538
References
21
FWCI
20.50
Type
journal article
Language
en
Open access
closed

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CoChat. (2026). Citation check: Microengineering Pressure Sensor Active Layers for Improved Performance. https://app.cochat.ai/papers/10.1002/adfm.202003491
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Ruth, S. R. A., Feig, V. R., Tran, H., & Bao, Z. (2020). Microengineering Pressure Sensor Active Layers for Improved Performance. Advanced Functional Materials. https://doi.org/10.1002/adfm.202003491

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