Ultrahigh-Sensitivity Piezoresistive Pressure Sensors for Detection of Tiny Pressure
Abstract
High-sensitivity pressure sensors are crucial for the ultrasensitive touch technology and E-skin, especially at the tiny-pressure range below 100 Pa. However, it is highly challenging to substantially promote sensitivity beyond the current level at several to 200 kPa –1 and to improve the detection limit lower than 0.1 Pa, which is significant for the development of pressure sensors toward ultrasensitive and highly precise detection. Here, we develop an efficient strategy to greatly improve the sensitivity near to 2000 kPa –1 using short-channel coplanar device structure and sharp microstructure, which is systematically proposed for the first time and rationalized by the mathematic calculation and analysis. Significantly, benefiting from the ultrahigh sensitivity, the detection limit is improved to be as small as 0.075 Pa. The sensitivity and detection limit are both superior to the current levels and far surpass the function of human skin. Furthermore, the sensor shows fast response time (50 μs), excellent reproducibility and stability, and low power consumption. Remarkably, the sensor shows excellent detection capacity in the tiny-pressure range, including light-emitting diode switching with a pressure of 7 Pa, ringtone (2–20 Pa) recognition, and ultrasensitive (0.1 Pa) electronic glove. This work represents a performance and strategic progress in the field of pressure sensing.
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The development of high-sensitivity pressure sensors is significant for ultrasensitive touch technology and the development of high-precision E-skins, especially in the micro-pressure range below 100 Pa.
“On the other hand, the development of high-sensitivity pressure sensors is also significant for ultrasensitive touch technology and the development of high-precision Eskins, especially in the micro-pressure range below 100 Pa 109 .”
From Recent advances in intelligent wearable systems: from multiscale biomechanical features towards human motion intent prediction (2026) · cites this paper as [109]
This type of sensor has high sensitivity (0.1 Pa) and fast response (50 μs), providing precise mechanical signals and valuable data processing time for HMIP.
“The high sensitivity (0.1 Pa) 109 and fast response (50 μs) 109 of this type of sensor provide precise mechanical signals and valuable data processing time for HMIP.”
From Recent advances in intelligent wearable systems: from multiscale biomechanical features towards human motion intent prediction (2026) · cites this paper as [109]
Mechanical sensors detect deformation and contact force using piezoresistive/piezoelectric effects or capacitance changes, and are used for limb flexion analysis, posture adjustment and rehabilitation training.
“Detect deformation and contact force using | piezoresistive/piezoelectric effects or capacitance | changes.”
From Recent advances in intelligent wearable systems: from multiscale biomechanical features towards human motion intent prediction (2026) · cites this paper as [109]
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- Authors
- Li, H., Wu, K., Xu, Z., Wang, Z., Meng, Y., & Li, L.
- Affiliations
- Chinese Academy of Sciences (CN)
- Corresponding author
- Li, Liqiang
- Venue
- ACS Applied Materials & Interfaces
- Publisher
- American Chemical Society (ACS)
- Published
- 2018-05-31
- Volume
- 10
- Issue
- 24
- Pages
- 20826-20834
- ISSN
- 1944-8244 (ISSN-L)
- 1944-8252
- OpenAlex
- W2806645267
- Cited by
- 197
- References
- 45
- Citations by year
- 2026: 13 · 2025: 21 · 2024: 32 · 2023: 40 · 2022: 27 · 2021: 26 · 2020: 20 · 2019: 16 · 2018: 2
- FWCI
- 6.39
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- ACS Applied Materials & Interfaces (publishedVersion)
- PubMed (publishedVersion)
- Funders
- Ministry of Science and Technology of the People's Republic of China (2016YFB0401100)
- Natural Science Foundation of Jiangsu Province (BK20150368)
- National Natural Science Foundation of China (21573277, 51633006, 51503221)
- Chinese Academy of Sciences (QYZDB-SSW-SLH031)
- Topics
- Physical Sciences › Engineering › Biomedical Engineering › Advanced Sensor and Energy Harvesting Materials
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
- Physical Sciences › Engineering › Biomedical Engineering › Acoustic Wave Resonator Technologies
- Keywords
- piezoresistive pressure sensor, detection limit, electronic skin, tactile sensors, low power consumption
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