Cited by 337Thermal properties of materialsAdvancements in Semiconductor Devices and Circuit DesignPhotonic and Optical Devices

Phonon-boundary scattering in thin silicon layers

Asheghi, M., Leung, Y. K., Wong, S. S., Goodson, K. E.·1997·Applied Physics Letters

Abstract

Temperature fields in microdevices made from silicon-on-insulator (SOI) wafers are strongly influenced by the lateral thermal conductivity of the silicon overlayer, which is diminished by phonon scattering on the layer boundaries. This study measures the thermal conductivity of single-crystal silicon layers in SOI substrates at temperatures between 20 and 320 K using Joule heating and electrical-resistance thermometry in microfabricated structures. Data for layers of thickness between 0.4 and 1.6 μm demonstrate the large reduction resulting from phonon-boundary scattering, particularly at low temperatures, and are consistent with predictions based on the phonon Boltzmann transport equation.

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Crossref · 10.1063/1.119402

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Authors
Asheghi, M., Leung, Y. K., Wong, S. S., & Goodson, K. E.
Affiliations
Stanford University (US)
Venue
Applied Physics Letters
Published
1997-09-29
Volume
71
Issue
13
Pages
1798-1800
ISSN
  • 0003-6951 (ISSN-L)
  • 1077-3118
OpenAlex
W2086218869
Cited by
337
References
9
Citations by year
2026: 5 · 2025: 11 · 2024: 8 · 2023: 9 · 2022: 7 · 2021: 9 · 2020: 13 · 2019: 15 · 2018: 15 · 2017: 25 · 2016: 28 · 2015: 35 · 2014: 20 · 2013: 16 · 2012: 16
FWCI
1.31
Type
journal article
Language
en
Open access
closed
Locations
Applied Physics Letters (publishedVersion)
Topics
  • Physical Sciences › Materials Science › Materials Chemistry › Thermal properties of materials
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Advancements in Semiconductor Devices and Circuit Design
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
Keywords
phonon boundary scattering, thermal conductivity, silicon-on-insulator, silicon thin films, Joule heating, phonon Boltzmann transport equation, low-temperature thermal transport, microfabricated structures

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