Phonon-boundary scattering in thin silicon layers
Abstract
Temperature fields in microdevices made from silicon-on-insulator (SOI) wafers are strongly influenced by the lateral thermal conductivity of the silicon overlayer, which is diminished by phonon scattering on the layer boundaries. This study measures the thermal conductivity of single-crystal silicon layers in SOI substrates at temperatures between 20 and 320 K using Joule heating and electrical-resistance thermometry in microfabricated structures. Data for layers of thickness between 0.4 and 1.6 μm demonstrate the large reduction resulting from phonon-boundary scattering, particularly at low temperatures, and are consistent with predictions based on the phonon Boltzmann transport equation.
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The thermal conductivity of thin single-crystal silicon layers has been reported for a range of thicknesses from 20 nm to 3 μm.
“The thermal conductivity of thin single-crystal silicon layers has been reported for a range of thicknesses from 20 nm [8] to 3 l m [7,11,12].”
From Mean Free Path Effects on the Experimentally Measured Thermal Conductivity of Single-Crystal Silicon Microbridges (2013) · cites this paper as [11]
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- Authors
- Asheghi, M., Leung, Y. K., Wong, S. S., & Goodson, K. E.
- Affiliations
- Stanford University (US)
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 1997-09-29
- Volume
- 71
- Issue
- 13
- Pages
- 1798-1800
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W2086218869
- Cited by
- 337
- References
- 9
- Citations by year
- 2026: 5 · 2025: 11 · 2024: 8 · 2023: 9 · 2022: 7 · 2021: 9 · 2020: 13 · 2019: 15 · 2018: 15 · 2017: 25 · 2016: 28 · 2015: 35 · 2014: 20 · 2013: 16 · 2012: 16
- FWCI
- 1.31
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Applied Physics Letters (publishedVersion)
- Topics
- Physical Sciences › Materials Science › Materials Chemistry › Thermal properties of materials
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advancements in Semiconductor Devices and Circuit Design
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
- Keywords
- phonon boundary scattering, thermal conductivity, silicon-on-insulator, silicon thin films, Joule heating, phonon Boltzmann transport equation, low-temperature thermal transport, microfabricated structures
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