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Phonon-boundary scattering in thin silicon layers
Abstract
Temperature fields in microdevices made from silicon-on-insulator (SOI) wafers are strongly influenced by the lateral thermal conductivity of the silicon overlayer, which is diminished by phonon scattering on the layer boundaries. This study measures the thermal conductivity of single-crystal silicon layers in SOI substrates at temperatures between 20 and 320 K using Joule heating and electrical-resistance thermometry in microfabricated structures. Data for layers of thickness between 0.4 and 1.6 μm demonstrate the large reduction resulting from phonon-boundary scattering, particularly at low temperatures, and are consistent with predictions based on the phonon Boltzmann transport equation.
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“The thermal conductivity of thin single-crystal silicon layers has been reported for a range of thicknesses from 20 nm [8] to 3 l m [7,11,12].”
From Mean Free Path Effects on the Experimentally Measured Thermal Conductivity of Single-Crystal Silicon Microbridges (2013) · cites this paper as [11]
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Self-citation
Metadata
- Authors
- Asheghi, M., Leung, Y. K., Wong, S. S., & Goodson, K. E.
- Affiliations
- Stanford University (US)
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 1997-09-29
- Volume
- 71
- Issue
- 13
- Pages
- 1798-1800
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W2086218869
- Cited by
- 337
- References
- 9
- Citations by year
- 2026: 5 · 2025: 11 · 2024: 8 · 2023: 9 · 2022: 7 · 2021: 9 · 2020: 13 · 2019: 15 · 2018: 15 · 2017: 25 · 2016: 28 · 2015: 35 · 2014: 20 · 2013: 16 · 2012: 16
- FWCI
- 1.31
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Applied Physics Letters (publishedVersion)
- Topics
- Physical Sciences › Materials Science › Materials Chemistry › Thermal properties of materials
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advancements in Semiconductor Devices and Circuit Design
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
- Keywords
- phonon boundary scattering, thermal conductivity, silicon-on-insulator, silicon thin films, Joule heating, phonon Boltzmann transport equation, low-temperature thermal transport, microfabricated structures
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
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