Ultrafast thermoreflectance techniques for measuring thermal conductivity and interface thermal conductance of thin films
Abstract
The thermal conductivity of thin films and interface thermal conductance of dissimilar materials play a critical role in the functionality and the reliability of micro/nanomaterials and devices. The ultrafast laser-based thermoreflectance techniques, including the time-domain thermoreflectance (TDTR) and the frequency-domain thermoreflectance (FDTR) techniques are excellent approaches for the challenging measurements of interface thermal conductance of dissimilar materials. Both TDTR and FDTR signals on a trilayer structure which consists of a thin film metal transducer, a target thin film, and a substrate are studied by a thermal conduction model. The sensitivity of TDTR signals to the thermal conductivity of thin films is analyzed to show that the modulation frequency needs to be selected carefully for a high precision TDTR measurement. However, such a frequency selection, which is closely related to the unknown thermal properties and consequently hard to make before TDTR measurement, can be avoided in FDTR measurement. We also found out that in FDTR method, the heat transport in a trilayer structure could be divided into three regimes, and the thermal conductivity of thin films and interface thermal conductance can be obtained subsequently by fitting the data in different frequency range of one FDTR measurement, based on the regime map. Both TDTR and FDTR measurements are then conducted along with the analysis to obtain the thermal conductivity of SiO2 thin films and interface thermal conductance between SiO2 and Si. FDTR measurement results agree well with the TDTR measurements, but promises to be a much easier implementation than TDTR measurements.
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Over the past two decades, TDTR has emerged and evolved as a reliable, powerful, and versatile technique to measure thermal properties of a wide range of bulk and thin film materials and their interfaces.
“Over the past two decades, ultrafast laser-based time-domain thermoreflectance (TDTR) has emerged and evolved as a reliable, powerful, and versatile technique to measure the thermal properties of a wide range of bulk and thin film materials and their interfaces.”
From Tutorial: Time-domain thermoreflectance (TDTR) for thermal property characterization of bulk and thin film materials (2018) · cites this paper as [25]
The two-tint and two-color approaches can effectively filter the reflected pump beam but at a significant sacrifice of laser power.
“Both the two-tint and the two-color approach can effectively filter the reflected pump beam but at a significant sacrifice of the laser power.”
From Tutorial: Time-domain thermoreflectance (TDTR) for thermal property characterization of bulk and thin film materials (2018) · cites this paper as [25]
The transient thermoreflectance technique can be implemented as both the TDTR method and the frequency-domain thermoreflectance (FDTR) method.
“The transient thermoreflectance technique can be implemented as both the TDTR method 22, 24, 25 and the frequency-domain thermoreflectance (FDTR) method 93, 94 (see Section III(A) for more details of FDTR).”
From Tutorial: Time-domain thermoreflectance (TDTR) for thermal property characterization of bulk and thin film materials (2018) · cites this paper as [25]
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- Authors
- Zhu, J., Tang, D., Wang, W., Liu, J., Holub, K. W., & Yang, R.
- Affiliations
- University of Colorado Boulder (US)
- Chinese Academy of Sciences (CN)
- University of Colorado at Boulder 1 Department of Mechanical Engineering, , Colorado 80309, USA
- Venue
- Journal of Applied Physics
- Publisher
- AIP Publishing
- Published
- 2010-11-01
- Volume
- 108
- Issue
- 9
- ISSN
- 0021-8979 (ISSN-L)
- 1089-7550
- OpenAlex
- W1998608423
- Cited by
- 232
- References
- 30
- Citations by year
- 2026: 20 · 2025: 22 · 2024: 23 · 2023: 24 · 2022: 28 · 2021: 16 · 2020: 17 · 2019: 18 · 2018: 15 · 2017: 12 · 2016: 11 · 2015: 9 · 2014: 6 · 2013: 7 · 2012: 1
- FWCI
- 1.73
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Journal of Applied Physics (publishedVersion)
- Topics
- Physical Sciences › Materials Science › Materials Chemistry › Thermal properties of materials
- Physical Sciences › Engineering › Mechanics of Materials › Thermography and Photoacoustic Techniques
- Physical Sciences › Engineering › Mechanics of Materials › Thermoelastic and Magnetoelastic Phenomena
- Keywords
- time-domain thermoreflectance, frequency-domain thermoreflectance, thermal conductivity, interface thermal conductance, thin films, three-layer structure, SiO2 thin films, Si/SiO2 interface, thermal conduction model
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