The DOI matches its Crossref record; 12 of the 12 references it cites were found in a registry or an index.
Attogram detection using nanoelectromechanical oscillators
Abstract
We report on the fabrication of nanometer-scale mass sensors with subattogram sensitivity. Surface micromachined polycrystalline silicon and silicon nitride nanomechanical oscillators were used to detect the presence of well-defined mass loading. Controlled deposition of thiolate self-assembled monolayers on lithographically defined gold dots were used for calibrated mass loading. We used a dinitrophenyl poly(ethylene glycol) undecanthiol-based molecule (DNP-PEG4-C11thiol) as a model ligand for this study. Due to the fact that the gold mass is attached at the distance l0 from the end x=l of the cantilever beam, an additional moment evolves in the boundary condition of the oscillator, which was taken into consideration through the rotational inertia of the attached mass. We showed that the corresponding correction of the frequency is on the order of γ(l0/l), where γ is the attached mass normalized to the mass of the beam. The rotational inertia correction to the frequency is on the order of γ(l0/l)2. The adopted approach permits accurate determination of the eigenfrequency in the framework of the Euler–Bernoulli beam when rotational inertia of the attached mass is included. From the resonant frequency shift, the mass of the adsorbed species was determined and compared to results obtained by other techniques. Utilizing vacuum encapsulation, we demonstrate sensing capability in the attogram regime of the adsorbed self-assembled monolayer.
Overview
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Integrity signals
Registry
Cites
Statistics
Verification
Claims the paper makes
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Self-check
Percentages, sums and reported differences re-computed from the paper’s own numbers.
The self-check needs the paper’s full text.
Citations
Cites
Formation and Structure of Self-Assembled Monolayers
Ulman, A. (1996) · Chemical Reviews · doi:10.1021/cr9502357 · Cited by 7,906
Encyclopedia of Analytical Chemistry: Applications, Theory and Instrumentation
(2006) · Wiley eBooks · doi:10.1002/9780470027318 · Cited by 7,403
The tension of metallic films deposited by electrolysis
Stoney, G. G. (1909) · Proceedings of the Royal Society of London. Series A, Containing Papers of a Mathematical and Physical Character · doi:10.1098/rspa.1909.0021 · Cited by 4,872
Vibration problems in engineering
Timoshenko, S. P. (1928) · CERN Document Server (European Organization for Nuclear Research) · Cited by 3,449
Silicon as a mechanical material
Petersen, K. E. (1982) · Proceedings of the IEEE · doi:10.1109/proc.1982.12331 · Cited by 2,902
Translating Biomolecular Recognition into Nanomechanics
Fritz, J., Baller, M. K., Lang, H. P., Rothuizen, H., Vettiger, P., Meyer, E., -J. Güntherodt, H., Gerber, C., & Gimzewski, J. K. (2000) · Science · doi:10.1126/science.288.5464.316 · Cited by 1,646
Craighead, H. G. (2000) · Science · doi:10.1126/science.290.5496.1532 · Cited by 1,437
Self-citationNovel optical approach to atomic force microscopy
Meyer, G., & Amer, N. M. (1988) · Applied Physics Letters · doi:10.1063/1.100061 · Cited by 1,290
Nanodevice motion at microwave frequencies
Henry Huang, X. M., Zorman, C. A., Mehregany, M., & Roukes, M. L. (2003) · Nature · doi:10.1038/421496a · Cited by 587
Single cell detection with micromechanical oscillators
Ilic, B., Czaplewski, D., Zalalutdinov, M., Craighead, H. G., Neuzil, P., Campagnolo, C., & Batt, C. (2001) · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena · doi:10.1116/1.1421572 · Cited by 443
Self-citation
Cited by
Ekinci, K. L., & Roukes, M. L. (2005) · Review of Scientific Instruments · doi:10.1063/1.1927327 · Cited by 1,374
Weighing of biomolecules, single cells and single nanoparticles in fluid
Burg, T. P., Godin, M., Knudsen, S. M., Shen, W., Carlson, G., Foster, J. S., Babcock, K., & Manalis, S. R. (2007) · Nature · doi:10.1038/nature05741 · Cited by 1,213
Mechanical properties of suspended graphene sheets
Frank, I. W., Tanenbaum, D. M., van der Zande, A. M., & McEuen, P. L. (2007) · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena · doi:10.1116/1.2789446 · Cited by 1,162
Micro- and nanomechanical sensors for environmental, chemical, and biological detection
Waggoner, P. S., & Craighead, H. G. (2007) · Lab on a Chip · doi:10.1039/b707401h · Cited by 678
Self-citationAn international review of laser Doppler vibrometry: Making light work of vibration measurement
Rothberg, S. J., Allen, M. S., Castellini, P., Di Maio, D., Dirckx, J. J. J., Ewins, D. J., Halkon, B. J., Muyshondt, P., Paone, N., Ryan, T., et al. (2017) · Optics and Lasers in Engineering · doi:10.1016/j.optlaseng.2016.10.023 · Cited by 516
“Figure 6 shows an example of a MEMS device using resonant cantilevers for attogram mass detection [63].”
Method
Metadata
- Authors
- Ilic, B., Craighead, H. G., Krylov, S., Senaratne, W., Ober, C., & Neuzil, P.
- Venue
- Journal of Applied Physics
- Publisher
- AIP Publishing
- Published
- 2004-04-01
- Volume
- 95
- Issue
- 7
- Pages
- 3694-3703
- ISSN
- 0021-8979 (ISSN-L)
- 1089-7550
- OpenAlex
- W1480691295
- Cited by
- 585
- References
- 12
- FWCI
- 46.76
- Type
- journal article
- Language
- en
- Open access
- closed
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
How to cite
Cite CoChat for the checks on this page, and the paper for its own findings.
- This page
- CoChat. (2026). Citation check: Attogram detection using nanoelectromechanical oscillators. https://app.cochat.ai/papers/10.1063/1.1650542
- The paper
- Ilic, B., Craighead, H. G., Krylov, S., Senaratne, W., Ober, C., & Neuzil, P. (2004). Attogram detection using nanoelectromechanical oscillators. Journal of Applied Physics. https://doi.org/10.1063/1.1650542
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
