Characterization of the temperature dependence of the thermoreflectance coefficient for conductive thin films
Abstract
We describe a novel approach for calibration of the thermoreflectance coefficient, ideally suited for measurements in a vacuum thermostat, and present the high temperature thermoreflectance coefficients for several metals commonly encountered in electronic devices: gold, platinum, and aluminum. The effect of passivation on these metals is also examined, and we demonstrate the signal to noise ratio of a thermoreflectance measurement can be improved with informed selection of the dielectric layer thickness. Furthermore, the thermo-optic coefficients of the metals are extracted over a wide temperature range. The results presented here can be utilized in the optimization of experimental configurations for high temperature thermoreflectance imaging.
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For a Ti:sapphire oscillator centered around 800 nm, an Al thin layer with thickness about 100 nm is a common choice as the transducer layer due to its strong absorption (99% absorption depth <60 nm) and exceptionally large thermoreflectance coefficient dR/dT ~10−4 K−1 at 800 nm.
“For a Ti:sapphire oscillator centered around 800 nm, an Al thin layer with a thickness of ~100 nm is a common choice as the transducer layer due to its strong absorption (the 99% absorption depth is <60 nm) 104 and an exceptionally large thermoreflectance coefficient d R /d T ~ 10 -4 K -1 at the 800-nm wavelength. 98, 105, 106”
From Tutorial: Time-domain thermoreflectance (TDTR) for thermal property characterization of bulk and thin film materials (2018) · cites this paper as [106]
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- Authors
- Favaloro, T., Bahk, J.-H., & Shakouri, A.
- Affiliations
- University of California, Santa Cruz (US)
- Purdue University West Lafayette (US)
- Venue
- Review of Scientific Instruments
- Publisher
- AIP Publishing
- Published
- 2015-02-01
- Volume
- 86
- Issue
- 2
- Pages
- 024903-024903
- ISSN
- 0034-6748 (ISSN-L)
- 1089-7623
- OpenAlex
- W2047905832
- Cited by
- 127
- References
- 23
- Citations by year
- 2026: 12 · 2025: 19 · 2024: 16 · 2023: 17 · 2022: 13 · 2021: 11 · 2020: 18 · 2019: 4 · 2018: 6 · 2017: 5 · 2016: 4 · 2015: 2
- FWCI
- 5.30
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Review of Scientific Instruments (publishedVersion)
- PubMed (publishedVersion)
- OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) (submittedVersion)
- Funders
- U.S. Department of Energy (DE-SC0001009)
- Defense Advanced Research Projects Agency (W911NF0810347)
- Topics
- Physical Sciences › Engineering › Mechanics of Materials › Thermography and Photoacoustic Techniques
- Physical Sciences › Materials Science › Materials Chemistry › Thermal properties of materials
- Physical Sciences › Engineering › Aerospace Engineering › Calibration and Measurement Techniques
- Keywords
- temperature dependence, conductive thin films, gold, platinum, aluminum, surface passivation, dielectric thickness, signal-to-noise ratio, thermo-optic coefficient, thin metal films
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