Cited by 11Terahertz technology and applicationsOptical Polarization and EllipsometryMetamaterials and Metasurfaces Applications

Real-time and calibration-free generalized terahertz time-domain spectroscopic ellipsometry

Open access
Chen, Hao, Wang, Kaijie, Chen, Xuequan, Fang, Guangyou·2024·Applied Physics Letters

Abstract

Spectroscopic ellipsometry is a high-precision and powerful optical characterization technique, which can be categorized into two fundamental types of standard and generalized ellipsometry. The latter can obtain the complete Jones matrix to investigate various anisotropic samples. However, terahertz generalized ellipsometry has traditionally relied on frequency-domain instrumentation, which is limited in bandwidth, complicated in polarization manipulation, and slow in operation. In this study, we propose a highly accurate and efficient terahertz time-domain generalized ellipsometer based on a polarization beam coupler-splitter configuration. It measures four independent complex spectra in real-time without mechanical movement, providing ultrahigh data throughput. Each polarizer-antenna unit constructively superimposes their filtering effect, resulting in a 45–65 dB extinction ratio that approaches the system dynamic range. The superb illumination and detection linearity provides an outstanding polarization accuracy and eliminates the need for complicated calibration. Reflection characterization of the magneto-optical properties of an InAs wafer demonstrates the generalized ability to simultaneously obtain multiple dielectric functions. Transmission ellipsometric imaging of liquid crystals subjected to an inhomogeneous electric field further highlights the excellent efficiency. The proposed technique significantly expands the capabilities of terahertz spectroscopy, paving ways to anisotropic materials, in situ monitoring, and polarization-sensitive devices.

The claims and statistics of this paper haven’t been checked yet.

Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.

A few free checks a day · papers already verified open instantly · results are public

Integrity signals

Registry

Crossref · 10.1063/5.0188364

Cites

40 of 40 references verified0 citation errors · 0 not checkable

Statistics

Claims the paper makes

The claims and statistics of this paper haven’t been checked yet.

Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.

A few free checks a day · papers already verified open instantly · results are public

Claims other papers make about this one

Each is checked against this paper’s own text: does it say what the citing paper says it does?

Self-check

Percentages, sums and reported differences re-computed from the paper’s own numbers.

The self-check needs the paper’s full text.

Cites

Flagged first, then by citations

Research works printed but not linked: 3

  1. H. Fujiwara, Spectroscopic Ellipsometry: Principles and Applications (John Wiley & Sons, 2007).
  2. M. Mitchell, An Introduction to Genetic Algorithms (MIT Press, 1998).
  3. K. Lil, R. Zhang, Z. Chen, A. K. Srivastava, T. Xin, C. Zhang, V. G. Chigrinov, H. K. Tsang, and E. Pickwell-Macf-Herson, in International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz), 2018.

Authors
Chen, H., Wang, K., Chen, X., & Fang, G.
Affiliations
Chinese Academy of Sciences (CN)
Corresponding author
Chen, Xuequan
Venue
Applied Physics Letters
Published
2024-03-11
Volume
124
Issue
11
ISSN
  • 0003-6951 (ISSN-L)
  • 1077-3118
OpenAlex
W4392708429
Cited by
11
References
40
Citations by year
2026: 5 · 2025: 4 · 2024: 2
FWCI
1.14
Type
journal article
Language
en
Open access
Locations
Applied Physics Letters (publishedVersion, cc-by)
Funders
  • National Natural Science Foundation of China (61988102, 62305069)
  • Key research and development program of Guangdong Province (2019B090917007)
  • Science and Technology Planning Project of Guangdong Province (2019B090909011)
  • Guangzhou Municipal Science and Technology Project (2023A04J0339)
Topics
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Terahertz technology and applications
  • Physical Sciences › Engineering › Biomedical Engineering › Optical Polarization and Ellipsometry
  • Physical Sciences › Materials Science › Electronic, Optical and Magnetic Materials › Metamaterials and Metasurfaces Applications
Keywords
generalized ellipsometry, Jones matrix, calibration-free measurement, real-time measurement, magneto-optical properties, InAs, liquid crystals, anisotropic materials, dielectric function

About these checks

Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.

Statistics and arithmetic are recomputed, not judged.

Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.

What counts as a claim ›How we measure confidence ›How we check this ›

Are you an author, or do you see a problem with this page? Request a review