Real-time and calibration-free generalized terahertz time-domain spectroscopic ellipsometry
Open accessAbstract
Spectroscopic ellipsometry is a high-precision and powerful optical characterization technique, which can be categorized into two fundamental types of standard and generalized ellipsometry. The latter can obtain the complete Jones matrix to investigate various anisotropic samples. However, terahertz generalized ellipsometry has traditionally relied on frequency-domain instrumentation, which is limited in bandwidth, complicated in polarization manipulation, and slow in operation. In this study, we propose a highly accurate and efficient terahertz time-domain generalized ellipsometer based on a polarization beam coupler-splitter configuration. It measures four independent complex spectra in real-time without mechanical movement, providing ultrahigh data throughput. Each polarizer-antenna unit constructively superimposes their filtering effect, resulting in a 45–65 dB extinction ratio that approaches the system dynamic range. The superb illumination and detection linearity provides an outstanding polarization accuracy and eliminates the need for complicated calibration. Reflection characterization of the magneto-optical properties of an InAs wafer demonstrates the generalized ability to simultaneously obtain multiple dielectric functions. Transmission ellipsometric imaging of liquid crystals subjected to an inhomogeneous electric field further highlights the excellent efficiency. The proposed technique significantly expands the capabilities of terahertz spectroscopy, paving ways to anisotropic materials, in situ monitoring, and polarization-sensitive devices.
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Integrity signals
Registry
Cites
Statistics
Claims the paper makes
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Claims other papers make about this one
Each is checked against this paper’s own text: does it say what the citing paper says it does?
Generalized THz ellipsometry used two photoconductive antennas to generate two orthogonally polarized THz beams, which were combined, reflected, split into orthogonal polarizations, and detected by two photoconductive detectors.
“In generalized THz ellipsometry,10 two photoconductive antennas were used to generate two orthogonally polarized THz beams, which were then combined with a THz polarizer, reflected from a sample, split into orthogonal polarizations, and detected by two photoconductive detectors.”
From Dual-Beam THz Spectrometer with Low-Aberration Optics and Off-Axis Multipixel Photoconductive Emitters for Reduced Systematic Errors (2025) · cites this paper as [10]
The generalized THz ellipsometry system had roughly double the components compared to a standard THz time-domain spectrometer, adding to the system's cost and complexity.
“While an important step forward, compared to a standard THz time-domain spectrometer, the system had roughly double the components,10 adding to the system’s cost and complexity.”
From Dual-Beam THz Spectrometer with Low-Aberration Optics and Off-Axis Multipixel Photoconductive Emitters for Reduced Systematic Errors (2025) · cites this paper as [10]
Self-check
Percentages, sums and reported differences re-computed from the paper’s own numbers.
The self-check needs the paper’s full text.
Cites
Terahertz time-domain spectroscopy
Koch, M., Mittleman, D. M., Ornik, J., & Castro-Camus, E. (2023) · Nature Reviews Methods Primers · doi:10.1038/s43586-023-00232-z · Cited by 410 · see citing works
Quantum Faraday and Kerr rotations in graphene
Shimano, R., Yumoto, G., Yoo, J. Y., Matsunaga, R., Tanabe, S., Hibino, H., Morimoto, T., & Aoki, H. (2013) · Nature Communications · doi:10.1038/ncomms2866 · Cited by 223 · see citing works
Noncontact semiconductor wafer characterization with the terahertz Hall effect
Mittleman, D. M., Cunningham, J. E., Nuss, M. C., & Geva, M. (1997) · Applied Physics Letters · doi:10.1063/1.119456 · Cited by 184 · see citing works
Terahertz polarization imaging
van der Valk, N. C. J., van der Marel, W. A. M., & Planken, P. C. M. (2005) · Optics Letters · doi:10.1364/ol.30.002802 · Cited by 170 · see citing works
Measurement of complex optical constants of a highly doped Si wafer using terahertz ellipsometry
Nagashima, T., & Hangyo, M. (2001) · Applied Physics Letters · doi:10.1063/1.1426258 · Cited by 155 · see citing works
Ultrathin MXene assemblies approach the intrinsic absorption limit in the 0.5–10 THz band
Zhao, T., Xie, P., Wan, H., et al. (2023) · Nature Photonics · doi:10.1038/s41566-023-01197-x · Cited by 146 · see citing works
Polarization-sensitive terahertz detection by multicontact photoconductive receivers
Castro-Camus, E., Lloyd‐Hughes, J., Johnston, M. B., Fraser, M. D., Tan, H. H., & Jagadish, C. (2005) · Applied Physics Letters · doi:10.1063/1.1951051 · Cited by 140 · see citing works
Lockwood, D. J., Yu, G., & Rowell, N. L. (2005) · Solid State Communications · doi:10.1016/j.ssc.2005.08.030 · Cited by 139 · see citing works
Phase-sensitive time-domain terahertz reflection spectroscopy
Pashkin, A., Kempa, M., Němec, H., Kadlec, F., & Kužel, P. (2003) · Review of Scientific Instruments · doi:10.1063/1.1614878 · Cited by 114 · see citing works
Three-dimensional cross-nanowire networks recover full terahertz state
Peng, K., Jevtics, D., Zhang, F., Sterzl, S., Damry, D. A., Rothmann, M. U., Guilhabert, B., Strain, M. J., Tan, H. H., Herz, L. M., et al. (2020) · Science · doi:10.1126/science.abb0924 · Cited by 112 · see citing works
Machine learning powered ellipsometry
Liu, J., Zhang, D., Yu, D., Ren, M., & Xu, J. (2021) · Light: Science & Applications · doi:10.1038/s41377-021-00482-0 · Cited by 102 · see citing works
Variable-wavelength frequency-domain terahertz ellipsometry
Hofmann, T., Herzinger, C. M., Boosalis, A., et al. (2010) · Review of Scientific Instruments · doi:10.1063/1.3297902 · Cited by 98 · see citing works
Terahertz frequency Hall measurement by magneto-optical Kerr spectroscopy in InAs
Shimano, R., Ino, Y., Svirko, Y., & Kuwata-Gonokami, M. (2002) · Applied Physics Letters · doi:10.1063/1.1492319 · Cited by 85 · see citing works
Magneto-optical properties of InSb for terahertz applications
Chochol, J., Postava, K., Čada, M., et al. (2016) · AIP Advances · doi:10.1063/1.4968178 · Cited by 73 · see citing works
Schmidt, D. F., Booso, B. D., Hofmann, T., et al. (2009) · Applied Physics Letters · doi:10.1063/1.3062996 · Cited by 72 · see citing works
Kühne, P., Armakavicius, N., Stanishev, V., et al. (2018) · IEEE Transactions on Terahertz Science and Technology · doi:10.1109/tthz.2018.2814347 · Cited by 65 · see citing works
Makabe, H., Hirota, Y., Tani, M., & Hangyo, M. (2007) · Optics Express · doi:10.1364/oe.15.011650 · Cited by 64 · see citing works
Terahertz time domain magneto-optical ellipsometry in reflection geometry
Ino, Y., Shimano, R., Svirko, Y. P., et al. (2004) · Physical Review B · doi:10.1103/physrevb.70.155101 · Cited by 61 · see citing works
Terahertz time-domain spectroscopic ellipsometry: instrumentation and calibration
Neshat, M., & Armitage, N. P. (2012) · Optics Express · doi:10.1364/oe.20.029063 · Cited by 61 · see citing works
Chochol, J., Postava, K., Čada, M., & Pištora, J. (2017) · Scientific Reports · doi:10.1038/s41598-017-13394-0 · Cited by 54 · see citing works
Liquid crystal tunable terahertz lens with spin-selected focusing property
Shen, Z., Zhou, S., Ge, S., et al. (2019) · Optics Express · doi:10.1364/oe.27.008800 · Cited by 53 · see citing works
Gopalan, P., Knight, S., Chanana, A., Stokey, M., Ranga, P., Scarpulla, M. A., Krishnamoorthy, S., Darakchieva, V., Galazka, Z., Irmscher, K., et al. (2020) · Applied Physics Letters · doi:10.1063/5.0031464 · Cited by 52 · see citing works
An introduction to terahertz time-domain spectroscopic ellipsometry
Chen, X., & Pickwell‐MacPherson, E. (2022) · APL Photonics · doi:10.1063/5.0094056 · Cited by 51 · see citing works
Self-citationTHz Spectroscopy of Liquid Crystals from the CB Family
Wilk, R., Vieweg, N., Kopschinski, O., et al. (2009) · Journal of Infrared Millimeter and Terahertz Waves · doi:10.1007/s10762-009-9537-z · Cited by 48 · see citing works
Terahertz quantum Hall effect for spin-split heavy-hole gases in strained Ge quantum wells
Failla, M., Keller, J., Scalari, G., Maissen, C., Faist, J., Reichl, C., Wegscheider, W., Newell, O. J., Leadley, D. R., Myronov, M., et al. (2016) · New Journal of Physics · doi:10.1088/1367-2630/18/11/113036 · Cited by 45 · see citing works
Uncertainty and ambiguity in terahertz parameter extraction and data analysis
Krüger, M., Funkner, S., Bründermann, E., & Havenith, M. (2011) · Journal of Infrared, Millimeter, and Terahertz Waves · doi:10.1007/s10762-010-9669-1 · Cited by 43 · see citing works
THz dielectric anisotropy of metal slanted columnar thin films
Hofmann, T., Schmidt, D. J., Boosalis, A., et al. (2011) · Applied Physics Letters · doi:10.1063/1.3626846 · Cited by 37 · see citing works
Robust and accurate terahertz time-domain spectroscopic ellipsometry
Chen, X., Parrott, E. P. J., Huang, Z. Q., Chan, H.-P., & Pickwell‐MacPherson, E. (2018) · Photonics Research · doi:10.1364/prj.6.000768 · Cited by 37 · see citing works
Self-citationChen, X., Li, K., Zhang, R., et al. (2019) · Advanced Optical Materials · doi:10.1002/adom.201901321 · Cited by 35 · see citing works
Self-citationXu, K., Bayati, E., Oguchi, K., et al. (2020) · Optics Express · doi:10.1364/oe.389651 · Cited by 34 · see citing works
Generalized ellipsometry for materials characterization
Jellison, G. E. (2004) · Thin Solid Films · doi:10.1016/j.tsf.2003.10.148 · Cited by 33 · see citing works
Chen, X., Sun, Q., Wang, J., et al. (2020) · Advanced Photonics Research · doi:10.1002/adpr.202000024 · Cited by 27 · see citing works
Self-citationAccurate THz ellipsometry using calibration in time domain
Mazaheri, Z., Koral, C., & Andreone, A. (2022) · Scientific Reports · doi:10.1038/s41598-022-10804-w · Cited by 27 · see citing works
Hofmann, T., Schade, U., Agarwal, K. C., et al. (2006) · Applied Physics Letters · doi:10.1063/1.2168258 · Cited by 26 · see citing works
Guo, Q., Zhang, Y., Lyu, Z., Zhang, D.-W., Huang, Y.-D., Meng, C., Zhao, Z.-X., & Yuan, J.-M. (2019) · IEEE Transactions on Terahertz Science and Technology · doi:10.1109/tthz.2019.2921200 · Cited by 19 · see citing works
Chen, X., & Pickwell-MacPherson, E. (2019) · Sensors · doi:10.3390/s19194118 · Cited by 18 · see citing works
Self-citationHot electron cooling in InSb probed by ultrafast time-resolved terahertz cyclotron resonance
Xia, C. Q., Monti, M., Boland, J. L., et al. (2021) · Physical review. B./Physical review. B · doi:10.1103/physrevb.103.245205 · Cited by 16 · see citing works
Precise and accurate control of the ellipticity of THz radiation using a photoconductive pixel array
Mosley, C. D. W., Deveikis, J., & Lloyd‐Hughes, J. (2021) · Applied Physics Letters · doi:10.1063/5.0064146 · Cited by 14 · see citing works
Simultaneous measurement of orthogonal terahertz fields via an emission multiplexing scheme
Ou, H., Stantchev, R. I., Chen, X., Blu, T., Semtsiv, M., Masselink, W. T., Serrano, A. H., Costa, G., Young, J., Chopra, N., et al. (2024) · Optics Express · doi:10.1364/oe.505567 · Cited by 9 · see citing works
Self-citationKnight, S., Prabhakaran, D., Binek, C., & Schubert, M. M. (2019) · Scientific Reports · doi:10.1038/s41598-018-37639-8 · Cited by 8 · see citing works
Flagged first, then by citations
Research works printed but not linked: 3
- H. Fujiwara, Spectroscopic Ellipsometry: Principles and Applications (John Wiley & Sons, 2007).
- M. Mitchell, An Introduction to Genetic Algorithms (MIT Press, 1998).
- K. Lil, R. Zhang, Z. Chen, A. K. Srivastava, T. Xin, C. Zhang, V. G. Chigrinov, H. K. Tsang, and E. Pickwell-Macf-Herson, in International Conference on Infrared, Millimeter and Terahertz Waves (IRMMW-THz), 2018.
Cited by
Sorted by citations
Chopra, N., & Lloyd-Hughes, J. (2025) · ACS Photonics · doi:10.1021/acsphotonics.4c01934 · Cited by 8 · see citing works
- Authors
- Chen, H., Wang, K., Chen, X., & Fang, G.
- Affiliations
- Chinese Academy of Sciences (CN)
- Corresponding author
- Chen, Xuequan
- Venue
- Applied Physics Letters
- Publisher
- AIP Publishing
- Published
- 2024-03-11
- Volume
- 124
- Issue
- 11
- ISSN
- 0003-6951 (ISSN-L)
- 1077-3118
- OpenAlex
- W4392708429
- Cited by
- 11
- References
- 40
- Citations by year
- 2026: 5 · 2025: 4 · 2024: 2
- FWCI
- 1.14
- Type
- journal article
- Language
- en
- Open access
- hybrid
- doi.org
- Licence
- Locations
- Applied Physics Letters (publishedVersion, cc-by)
- Funders
- National Natural Science Foundation of China (61988102, 62305069)
- Key research and development program of Guangdong Province (2019B090917007)
- Science and Technology Planning Project of Guangdong Province (2019B090909011)
- Guangzhou Municipal Science and Technology Project (2023A04J0339)
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Terahertz technology and applications
- Physical Sciences › Engineering › Biomedical Engineering › Optical Polarization and Ellipsometry
- Physical Sciences › Materials Science › Electronic, Optical and Magnetic Materials › Metamaterials and Metasurfaces Applications
- Keywords
- generalized ellipsometry, Jones matrix, calibration-free measurement, real-time measurement, magneto-optical properties, InAs, liquid crystals, anisotropic materials, dielectric function
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review