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Temperature dependence of Fowler-Nordheim current in 6H- and 4H-SiC MOS capacitors
Abstract
This work reports on Fowler-Nordheim (F-N) injection studies on n-type 6H-SiC and 4H-SiC MOS systems under positive gate bias from 25 to 325/spl deg/C. At a given temperature and electric field, the current density in the 4H-SiC MOS system is about five times higher than that in 6H-SiC due to the smaller effective barrier height for the 4H-SiC MOS system as compared to 6H-SiC. The reduction of the effective barrier height with temperature, particularly in 4H-SiC, raises serious concerns about the long-term reliability of gate oxides in SiC. It is concluded that the maximum practical values of electric field in the 4H-SiC MOS system under positive gate bias and high junction temperature should be reduced to below the values used in the Si MOS system.
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Cited by
High-temperature electronics - a role for wide bandgap semiconductors?
Neudeck, P. G., Okojie, R. S., & Chen, L.-Y. (2002) · Proceedings of the IEEE · doi:10.1109/jproc.2002.1021571 · Cited by 1,050
Chen, Z., Yao, Y., Boroyevich, D., Ngo, K. D. T., Mattavelli, P., & Rajashekara, K. (2014) · IEEE Transactions on Power Electronics · doi:10.1109/tpel.2013.2283245 · Cited by 277
Review and analysis of SiC MOSFETs’ ruggedness and reliability
Wang, J., & Jiang, X. (2020) · IET Power Electronics · doi:10.1049/iet-pel.2019.0587 · Cited by 221
Role of Threshold Voltage Shift in Highly Accelerated Power Cycling Tests for SiC MOSFET Modules
Luo, H., Iannuzzo, F., & Turnaturi, M. (2020) · IEEE Journal of Emerging and Selected Topics in Power Electronics · doi:10.1109/jestpe.2019.2894717 · Cited by 82
1200-V SiC MOSFET Short-Circuit Ruggedness Evaluation and Methods to Improve Withstand Time
Xing, D., Hu, B., Kang, M., Zhang, Y., Nayak, S., Wang, J., & Agarwal, A. K. (2022) · IEEE Journal of Emerging and Selected Topics in Power Electronics · doi:10.1109/jestpe.2022.3144995 · Cited by 33
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Metadata
- Authors
- Agarwal, A. K., Seshadri, S., & Rowland, L. B.
- Venue
- IEEE Electron Device Letters
- Published
- 1997-12
- Volume
- 18
- Issue
- 12
- Pages
- 592-594
- ISSN
- 0741-3106 (ISSN-L)
- 1558-0563
- OpenAlex
- W2156650445
- Cited by
- 199
- References
- 0
- FWCI
- 10.55
- Type
- journal article
- Language
- en
- Open access
- closed
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- CoChat. (2026). Citation check: Temperature dependence of Fowler-Nordheim current in 6H- and 4H-SiC MOS capacitors. https://app.cochat.ai/papers/10.1109/55.644081
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- Agarwal, A. K., Seshadri, S., & Rowland, L. B. (1997). Temperature dependence of Fowler-Nordheim current in 6H- and 4H-SiC MOS capacitors. IEEE Electron Device Letters. https://doi.org/10.1109/55.644081
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