The DOI matches its Crossref record; 15 of the 15 references it cites were found in a registry or an index.
A Flexible Polymer Tactile Sensor: Fabrication and Modular Expandability for Large Area Deployment
Abstract
In this paper, we propose and demonstrate a modular expandable capacitive tactile sensor using polydimethylsiloxsane (PDMS) elastomer. A sensor module consists of 16times16 tactile cells with 1 mm spatial resolution, similar to that of human skin, and interconnection lines for expandability. The sensor has been fabricated by using five PDMS layers bonded together. In order to customize the sensitivity of a sensor, we cast PDMS by spin coating and cured it on a highly planarized stage for uniform thickness. The cell size is 600times600 mum2and initial capacitance of each cell is about 180 fF. Tactile response of a cell has been measured using a commercial force gauge having 1 mN resolution and a motorized z-axis precision stage with 100 nm resolution. The fabricated cell shows a sensitivity of 3%/mN within the full scale range of 40 mN (250 kPa). Four tactile modules have been successfully attached by using anisotropic conductive paste to demonstrate expandability of the proposed sensors. Various tactile images have been successfully captured by single sensor module as well as the expanded 32times32 array sensors
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Cites
Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer
Jo, B.-H., Van Lerberghe, L. M., Motsegood, K. M., & Beebe, D. J. (2000) · Journal of Microelectromechanical Systems · doi:10.1109/84.825780 · Cited by 1,098
Review Article Tactile sensing for mechatronics—a state of the art survey
Lee, M. H., & Nicholls, H. R. (1999) · Mechatronics · doi:10.1016/s0957-4158(98)00045-2 · Cited by 704
A Tactile Sensor Sheet Using Pressure Conductive Rubber With Electrical-Wires Stitched Method
Shimojo, M., Namiki, A., Ishikawa, M., Makino, R., & Mabuchi, K. (2004) · IEEE Sensors Journal · doi:10.1109/jsen.2004.833152 · Cited by 421
Development of polyimide flexible tactile sensor skin
Engel, J., Chen, J., & Liu, C. (2003) · Journal of Micromechanics and Microengineering · doi:10.1088/0960-1317/13/3/302 · Cited by 291
A traction stress sensor array for use in high-resolution robotic tactile imaging
Kane, B. J., Cutkosky, M. R., & Kovacs, G. T. A. (2000) · Journal of Microelectromechanical Systems · doi:10.1109/84.896763 · Cited by 235
Tactile sensing technology for minimal access surgery––a review
Eltaib, M. E. H., & Hewit, J. R. (2003) · Mechatronics · doi:10.1016/s0957-4158(03)00048-5 · Cited by 221
Dry etching of polydimethylsiloxane for microfluidic systems
Garra, J., Long, T., Currie, J., Schneider, T., White, R., & Paranjape, M. (2002) · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · doi:10.1116/1.1460896 · Cited by 188
A large area force sensor for smart skin applications
Papakostas, T. V., Lima, J., & Lowe, M. (2003) · Proceedings of IEEE Sensors · doi:10.1109/icsens.2002.1037366 · Cited by 162
An integrated MEMS three-dimensional tactile sensor with large force range
Mei, T., Li, W. J., Yu, G., Chen, Y., Ni, L., & Chan, M. H. (2000) · Sensors and Actuators A Physical · doi:10.1016/s0924-4247(99)00261-7 · Cited by 140
Kawaguchi, H., Someya, T., Sekitani, T., & Sakurai, T. (2005) · IEEE Journal of Solid-State Circuits · doi:10.1109/jssc.2004.837259 · Cited by 126
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Hammock, M. L., Chortos, A., Tee, B. C. ‐., Tok, J. B. ‐., & Bao, Z. (2013) · Advanced Materials · doi:10.1002/adma.201302240 · Cited by 2,396
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Gong, S., Schwalb, W., Wang, Y., Chen, Y., Tang, Y., Si, J., Shirinzadeh, B., & Cheng, W. (2014) · Nature Communications · doi:10.1038/ncomms4132 · Cited by 2,064
Skin-inspired highly stretchable and conformable matrix networks for multifunctional sensing
Hua, Q., Sun, J., Liu, H., Bao, R., Yu, R., Zhai, J., Pan, C., & Wang, Z. L. (2018) · Nature Communications · doi:10.1038/s41467-017-02685-9 · Cited by 1,413
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Metadata
- Authors
- Lee, H.-K., Chang, S.-I., & Yoon, E.
- Venue
- Journal of Microelectromechanical Systems
- Published
- 2006-12
- Volume
- 15
- Issue
- 6
- Pages
- 1681-1686
- ISSN
- 1057-7157 (ISSN-L)
- OpenAlex
- W2127045241
- Cited by
- 396
- References
- 15
- FWCI
- 6.58
- Type
- journal article
- Language
- en
- Open access
- closed
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- Lee, H.-K., Chang, S.-I., & Yoon, E. (2006). A Flexible Polymer Tactile Sensor: Fabrication and Modular Expandability for Large Area Deployment. Journal of Microelectromechanical Systems. https://doi.org/10.1109/jmems.2006.886021
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