Flexible Dome and Bump Shape Piezoelectric Tactile Sensors Using PVDF-TrFE Copolymer
Abstract
In this paper, a new mold-transfer method to pattern piezoelectric polymer has been developed and applied to fabricate innovative dome and bump shape polyvinylidene-fluoride-trifluoroethylene (PVDF-TrFE) films. The dome and bump shape PVDF-TrFE films have been successfully fabricated and characterized as a sensing component for flexible tactile sensors. The tactile sensors developed using these polymer microstructures show a high sensitivity which can measure as small as 40 mN force for bump shape sensors and 25 mN for dome shape sensors. The newly developed fabrication method provides a flexible way to pattern the piezoelectric polymer with different shapes and dimensions, including bump and dome shape piezoelectric polymer microstructures. In addition, a selective dc poling method for the PVDF-TrFE film has been developed for fabricating precisely located piezoelectric sensors with minimum crosstalk. The bump and dome shape PVDF-TrFE films developed in this paper can have numerous applications for microcatheters or other minimally invasive biomedical devices.
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P(VDF-TrFE) is used as a flexible piezoelectric material with high mechanical strength and biocompatibility.
“We use P(VDF-TrFE) as flexible piezoelectric materials with high mechanical strength and biocompatibility43.”
From A Flexible and Wearable Human Stress Monitoring Patch (2016) · cites this paper as [43]
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Liu, Y., Sun, C.-M., Lin, L.-Y., Tsai, M., & Fang, W. (2010) · Journal of Microelectromechanical Systems · doi:10.1109/jmems.2010.2090494 · Cited by 46 · see citing works
3D flexible tactile sensor using electromagnetic induction coils
Wattanasarn, S., Noda, K., Matsumoto, K., & Shimoyama, I. (2012) · IEEE International Conference on Micro Electro Mechanical Systems (MEMS) · doi:10.1109/memsys.2012.6170230 · Cited by 45 · see citing works
High β‐phase Poly(vinylidene fluoride) Using a Thermally Decomposable Molecular Splint
Choi, J., Lee, K., Lee, M., Kim, T., Eom, S., Sim, J. H., Lee, W. B., Kim, Y., Park, C., & Kang, Y. (2022) · Advanced Electronic Materials · doi:10.1002/aelm.202200279 · Cited by 42 · see citing works
Micro-Cantilever Capacitive Sensor for High-Resolution Measurement of Electric Fields
Han, Z., Xue, F., Yang, G., Yu, Z., Hu, J., & He, J. (2020) · IEEE Sensors Journal · doi:10.1109/jsen.2020.3031291 · Cited by 39 · see citing works
Ryu, J., No, K., Kim, Y., Park, E., & Hong, S. (2016) · Scientific Reports · doi:10.1038/srep36176 · Cited by 39 · see citing works
Screen printed flexible pressure sensors skin
Khan, S., Lorenzelli, L., & Dahiya, R. (2014) · ASMC proceedings · doi:10.1109/asmc.2014.6847002 · Cited by 37 · see citing works
Men, T., Liu, X., Jiang, B., Long, X., & Guo, H. (2018) · Thin Solid Films · doi:10.1016/j.tsf.2018.11.051 · Cited by 35 · see citing works
Lee, C., Park, H., & Lee, J. (2020) · Actuators · doi:10.3390/act9030057 · Cited by 35 · see citing works
Tactile Sensing Systems for Tumor Characterization: A Review
Won, C., Lee, J.-H., & Saleheen, F. (2021) · IEEE Sensors Journal · doi:10.1109/jsen.2021.3078369 · Cited by 35 · see citing works
Ren, K., Shen, Y., & Wang, Z. L. (2023) · Macromolecular Materials and Engineering · doi:10.1002/mame.202300307 · Cited by 36 · see citing works
Piezoelectric P(VDF-TrFE) film inkjet printed on silicon for high-frequency ultrasound applications
Banquart, A., Callé, S., Levassort, F., Fritsch, L., Ossant, F., Siewe, S. T., Chevalliot, S., Capri, A., & Grégoire, J. (2021) · Journal of Applied Physics · doi:10.1063/5.0048444 · Cited by 33 · see citing works
Advanced Materials and Technologies for Touch Sensing in Prosthetic Limbs
Hari, M. A., & Rajan, L. (2021) · IEEE Transactions on NanoBioscience · doi:10.1109/tnb.2021.3072954 · Cited by 33 · see citing works
Realization of Multistage Detection Sensitivity and Dynamic Range in Capacitive Tactile Sensors
Zhang, Y.-R., Jen, Y.-H., Mo, C.-T., Chen, Y., Al-Romaithy, M., Martincic, E., & Lo, C. (2020) · IEEE Sensors Journal · doi:10.1109/jsen.2020.2992484 · Cited by 32 · see citing works
Development of a Tactile and Slip Sensor with a Biomimetic Structure-enhanced Sensing Mechanism
Jiang, Y., Ma, Z., Cao, B., Gong, L., Feng, L. P., & Zhang, D. (2019) · Journal of Bionic Engineering · doi:10.1007/s42235-019-0005-8 · Cited by 32 · see citing works
Carluccio, V., Fachechi, L., Mastronardi, V., Natta, L., Algieri, L., de Marzo, G., Rizzi, F., & Vittorio, M. D. (2023) · IEEE Sensors Journal · doi:10.1109/jsen.2023.3265871 · Cited by 31 · see citing works
- Authors
- Li, C., Wu, P.-M., Lee, S., Gorton, A., Schulz, M. J., & Ahn, C. H.
- Affiliations
- University of Cincinnati (US)
- Venue
- Journal of Microelectromechanical Systems
- Published
- 2008-04
- Volume
- 17
- Issue
- 2
- Pages
- 334-341
- ISSN
- 1057-7157 (ISSN-L)
- 1941-0158
- OpenAlex
- W2158076978
- Cited by
- 245
- References
- 21
- Citations by year
- 2026: 7 · 2025: 11 · 2024: 6 · 2023: 16 · 2022: 19 · 2021: 21 · 2020: 27 · 2019: 21 · 2018: 16 · 2017: 19 · 2016: 10 · 2015: 16 · 2014: 16 · 2013: 9 · 2012: 12
- FWCI
- 4.20
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Journal of Microelectromechanical Systems (publishedVersion)
- Funders
- University of Cincinnati
- Topics
- Physical Sciences › Engineering › Biomedical Engineering › Advanced Sensor and Energy Harvesting Materials
- Physical Sciences › Engineering › Biomedical Engineering › Dielectric materials and actuators
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
- Keywords
- piezoelectric tactile sensor, flexible sensors, microcatheter, crosstalk reduction
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