MEMS Based Broadband Piezoelectric Ultrasonic Energy Harvester (PUEH) for Enabling Self-Powered Implantable Biomedical Devices
Open accessAbstract
Acoustic energy transfer is a promising energy harvesting technology candidate for implantable biomedical devices. However, it does not show competitive strength for enabling self-powered implantable biomedical devices due to two issues – large size of bulk piezoelectric ultrasound transducers and output power fluctuation with transferred distance due to standing wave. Here we report a microelectromechanical systems (MEMS) based broadband piezoelectric ultrasonic energy harvester (PUEH) to enable self-powered implantable biomedical devices. The PUEH is a microfabricated lead zirconate titanate (PZT) diaphragm array and has wide operation bandwidth. By adjusting frequency of the input ultrasound wave within the operation bandwidth, standing wave effect can be minimized for any given distances. For example, at 1 cm distance, power density can be increased from 0.59 μW/cm 2 to 3.75 μW/cm 2 at input ultrasound intensity of 1 mW/cm 2 when frequency changes from 250 to 240 kHz. Due to the difference of human body and manual surgical process, distance fluctuation for implantable biomedical devices is unavoidable and it strongly affects the coupling efficiency. This issue can be overcome by performing frequency adjustment of the PUEH. The proposed PUEH shows great potential to be integrated on an implanted biomedical device chip as power source for various applications.
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Adjusting ultrasound frequency within the broad bandwidth minimizes standing wave induced power loss for a wide range of implanted depths.
“Through adjusting ultrasound frequency within the broad bandwidth, standing wave induced power loss can be minimized for a wide range of implanted depths.”
From From flexible electronics technology in the era of IoT and artificial intelligence toward future implanted body sensor networks (2019) · cites this paper as [85]
In an underwater test with 1 cm separation, output power density of the PUEH improved from 0.59 μW/cm2 to 3.75 μW/cm2 with frequency adjustment, when input ultrasound intensity is 1 mW/cm2.
“In the underwater test with 1 cm separation between the ultrasound transmitter and the PUEH, output power density can be improved from 0.59 µW/cm 2 to 3.75 µW/cm 2 with frequency adjustment, when the input ultrasound intensity is 1 mW/cm 2 .”
From From flexible electronics technology in the era of IoT and artificial intelligence toward future implanted body sensor networks (2019) · cites this paper as [85]
A miniaturized and broadband piezoelectric ultrasonic energy harvester based on a PZT diaphragm array is proposed as a reliable implantable energy source.
“A miniaturized and broadband piezoelectric ultrasonic energy harvester (PUEH) based on a PZT diaphragm array is proposed as a reliable implantable energy source [Fig.2(k)].85,86”
From From flexible electronics technology in the era of IoT and artificial intelligence toward future implanted body sensor networks (2019) · cites this paper as [85]
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- Authors
- Shi, Q., Wang, T., & Lee, C.
- Affiliations
- National University of Singapore (SG)
- Corresponding author
- Lee, Chengkuo
- Venue
- Scientific Reports
- Published
- 2016-04-26
- Volume
- 6
- Issue
- 1
- Pages
- 24946-24946
- ISSN
- 2045-2322 (ISSN-L)
- PMC
- PMC4844957
- OpenAlex
- W2343660287
- Cited by
- 210
- References
- 48
- Citations by year
- 2026: 5 · 2025: 16 · 2024: 28 · 2023: 21 · 2022: 25 · 2021: 34 · 2020: 21 · 2019: 27 · 2018: 12 · 2017: 15 · 2016: 6
- FWCI
- 17.75
- Type
- journal article
- Language
- en
- Open access
- gold
- doi.org
- Locations
- Scientific Reports (publishedVersion, cc-by)
- PubMed Central (publishedVersion, cc-by)
- PubMed (publishedVersion)
- National University of Singapore (submittedVersion)
- Funders
- National Research Foundation (R-263-000-A27-281)
- Topics
- Physical Sciences › Engineering › Mechanical Engineering › Innovative Energy Harvesting Technologies
- Physical Sciences › Engineering › Mechanics of Materials › Ultrasonics and Acoustic Wave Propagation
- Physical Sciences › Engineering › Biomedical Engineering › Advanced Sensor and Energy Harvesting Materials
- Keywords
- MEMS ultrasonic transducers, biomedical implants, self-powered devices, acoustic energy transfer, coupling efficiency, frequency tuning, power density
- MeSH terms
- Energy Transfer, Equipment Design, Electric Power Supplies, Ultrasonics, Prostheses and Implants, Micro-Electrical-Mechanical Systems
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