High-Performance Flexible Thermoelectric Power Generator Using Laser Multiscanning Lift-Off Process
Abstract
Flexible thermoelectric generators (f-TEGs) are emerging as a semipermanent power source for self-powered sensors, which is an important area of research for next-generation smart network monitoring systems in the Internet-of-things era. We report in this paper a f-TEG produced by a screen-printing technique (SPT) and a laser multiscanning (LMS) lift-off process. A screen-printed TEG was fabricated on a SiO 2 /a-Si/quartz substrate via the SPT process, and the LMS process completely separated the rigid quartz substrate from the original TEG by selective reaction of the XeCl excimer laser with the exfoliation layer (a-Si). Using these techniques, we fabricate a prototype f-TEG composed of an array of 72 TE couples that exhibits high flexibility at various bending radii, together with excellent output performance (4.78 mW/cm 2 and 20.8 mW/g at Δ T = 25 °C). There is no significant change in the device performance even under repeated bending of 8000 cycles.
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When 72 thermoelectric couples are connected in series, a power density of 4.78 mW/cm2 is achieved at a temperature difference of 25°C.
“When 72 thermoelectric couples (p-type and n-type) are connected in series, a power density of 4.78 mW/cm 2 can be achieved at a temperature difference of 25 • C.”
From From flexible electronics technology in the era of IoT and artificial intelligence toward future implanted body sensor networks (2019) · cites this paper as [48]
A flexible thermoelectric power generator using screen-printing and laser multiscanning lift-off consists of p-type Bi0.3Sb1.7Te3 and n-type Bi2Se0.3Te2.7 inorganic films.
“A flexible thermoelectric power generator is developed using screen-printing and laser multiscanning lift-off technique, which consists of p-type Bi 0.3 Sb 1.7 Te 3 inorganic film and n-type Bi 2 Se 0.3 Te 2.7 inorganic film [Fig.2(d)].48”
From From flexible electronics technology in the era of IoT and artificial intelligence toward future implanted body sensor networks (2019) · cites this paper as [48]
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- Authors
- Kim, S. J., Lee, H. E., Choi, H., Kim, Y., We, J. H., Shin, J. S., Lee, K. J., & Cho, B. J.
- Affiliations
- Korea Advanced Institute of Science and Technology (KR)
- Tegway Co. Ltd., #711 National Nano Fab., 291 Daehak-ro, Yuseong, Daejeon 34141, Republic of Korea
- Corresponding author
- Lee, Keon Jae
- Cho, Byung Jin
- Venue
- ACS Nano
- Publisher
- American Chemical Society (ACS)
- Published
- 2016-11-21
- Volume
- 10
- Issue
- 12
- Pages
- 10851-10857
- ISSN
- 1936-0851 (ISSN-L)
- 1936-086X
- OpenAlex
- W2554599776
- Cited by
- 257
- References
- 33
- Citations by year
- 2026: 16 · 2025: 21 · 2024: 22 · 2023: 21 · 2022: 38 · 2021: 34 · 2020: 36 · 2019: 33 · 2018: 24 · 2017: 12
- FWCI
- 10.25
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- ACS Nano (publishedVersion)
- PubMed (publishedVersion)
- Funders
- National Research Foundation of Korea (NRF- 2015R1A5A1036133)
- Topics
- Physical Sciences › Materials Science › Materials Chemistry › Advanced Thermoelectric Materials and Devices
- Physical Sciences › Engineering › Biomedical Engineering › Advanced Sensor and Energy Harvesting Materials
- Physical Sciences › Energy › Nuclear Energy and Engineering › Advanced Energy Technologies and Civil Engineering Innovations
- Keywords
- screen printing, XeCl laser, self-powered sensors, Internet of Things, bending durability
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