Highly‐Efficient, Flexible Piezoelectric PZT Thin Film Nanogenerator on Plastic Substrates
Abstract
A highly-efficient, flexible piezoelectric PZT thin film nanogenerator is demonstrated using a laser lift-off (LLO) process. The PZT thin film nanogenerator harvests the highest output performance of ∼200 V and ∼150 μA·cm(-2) from regular bending motions. Furthermore, power sources generated from a PZT thin film nanogenerator, driven by slight human finger bending motions, successfully operate over 100 LEDs.
Integrity signals
Registry
Cites
Statistics
Claims the paper makes
Claims other papers make about this one
Each is checked against this paper’s own text: does it say what the citing paper says it does?
Piezoelectric PZT thin film can be fabricated on a flexible substrate through a large-area laser lift-off process.
“Piezoelectric PZT thin film can also be fabricated on a flexible substrate through a large-area laser lift-off (LLO) process [Fig.2(c)].46”
From From flexible electronics technology in the era of IoT and artificial intelligence toward future implanted body sensor networks (2019) · cites this paper as [46]
Cites
Piezoelectric Nanogenerators Based on Zinc Oxide Nanowire Arrays
Wang, Z. L., & Song, J. (2006) · Science · doi:10.1126/science.1124005 · Cited by 7,922 · see citing works
Self-citationEnergy harvesting vibration sources for microsystems applications
Beeby, S. P., Tudor, M. J., & White, N. M. (2006) · Measurement Science and Technology · doi:10.1088/0957-0233/17/12/r01 · Cited by 3,008 · see citing works
Energy Harvesting Technologies
Priya, S., & Inman, D. J. (2008) · Springer eBooks · doi:10.1007/978-0-387-76464-1 · Cited by 1,922 · see citing works
Direct-Write Piezoelectric Polymeric Nanogenerator with High Energy Conversion Efficiency
Chang, C., Tran, V. H., Wang, J., Fuh, Y., & Lin, L. (2010) · Nano Letters · doi:10.1021/nl9040719 · Cited by 1,376 · see citing works
Persano, L., Dagdeviren, C., Su, Y., Zhang, Y., Girardo, S., Pisignano, D., Huang, Y., & Rogers, J. A. (2013) · Nature Communications · doi:10.1038/ncomms2639 · Cited by 1,271 · see citing works
Injectable, Cellular-Scale Optoelectronics with Applications for Wireless Optogenetics
Kim, T.-I., McCall, J. G., Jung, Y. H., Huang, X., Siuda, E. R., Li, Y., Song, J., Song, Y. M., Pao, H. A., Kim, R.-H., et al. (2013) · Science · doi:10.1126/science.1232437 · Cited by 1,174 · see citing works
Self-citationNanotechnology‐Enabled Energy Harvesting for Self‐Powered Micro‐/Nanosystems
Wang, Z. L., & Wu, W. (2012) · Angewandte Chemie International Edition · doi:10.1002/anie.201201656 · Cited by 1,063 · see citing works
Self-citationMoulson, A. J., & Herbert, J. M. (2003) · Wiley eBooks · doi:10.1002/0470867965 · Cited by 1,011 · see citing works
Power generation with laterally packaged piezoelectric fine wires
Yang, R., Qin, Y., Dai, L., & Wang, Z. L. (2008) · Nature Nanotechnology · doi:10.1038/nnano.2008.314 · Cited by 931 · see citing works
Self-citationPiezoelectric BaTiO3Thin Film Nanogenerator on Plastic Substrates
Park, K., Xu, S., Liu, Y., Hwang, G., Kang, S. L., Wang, Z. L., & Lee, K. J. (2010) · Nano Letters · doi:10.1021/nl102959k · Cited by 831 · see citing works
Self-citationMEMS power generator with transverse mode thin film PZT
Jeon, Y., Sood, R., Jeong, J.-H., & Kim, S. (2005) · Sensors and Actuators A Physical · doi:10.1016/j.sna.2004.12.032 · Cited by 796 · see citing works
Kim, D., Lu, N., Ghaffari, R., Kim, Y., Lee, S. P., Xu, L., Wu, J. C., Kim, R.-H., Song, J., Liu, Z., et al. (2011) · Nature Materials · doi:10.1038/nmat2971 · Cited by 766 · see citing works
Self-citationFlexible Nanocomposite Generator Made of BaTiO 3 Nanoparticles and Graphitic Carbons
Park, K., Lee, M. K., Liu, Y., Moon, S., Hwang, G., Zhu, G., Kim, J. E., Kim, S. O., Kim, D. K., Wang, Z. L., et al. (2012) · Advanced Materials · doi:10.1002/adma.201200105 · Cited by 712 · see citing works
Self-citationQi, Y., Kim, J., Nguyen, T. D., Lisko, B., Purohit, P. K., & McAlpine, M. C. (2011) · Nano Letters · doi:10.1021/nl104412b · Cited by 516 · see citing works
Progress in nanogenerators for portable electronics
Wang, Z. L., Zhu, G., Yang, Y. F., Wang, S., & Pan, C. (2012) · Materials Today · doi:10.1016/s1369-7021(13)70011-7 · Cited by 508 · see citing works
Self-citationPiezoelectric nanogenerators—Harvesting ambient mechanical energy at the nanometer scale
Wang, X. (2011) · Nano Energy · doi:10.1016/j.nanoen.2011.09.001 · Cited by 499 · see citing works
Piezoelectric Ribbons Printed onto Rubber for Flexible Energy Conversion
Qi, Y. P., Jafferis, N. T., Lyons, K., Lee, C. M., Ahmad, H. M. N., & McAlpine, M. C. (2010) · Nano Letters · doi:10.1021/nl903377u · Cited by 496 · see citing works
Choi, M., Choi, D., Jin, M., Kim, I.-S., Kim, S., Choi, J., Lee, S., Kim, J. M., & Kim, S. (2009) · Advanced Materials · doi:10.1002/adma.200803605 · Cited by 438 · see citing works
Self-citationSelf-Powered System with Wireless Data Transmission
Hu, Y., Zhang, Y., Xu, C., Lin, L., Snyder, R. L., & Wang, Z. L. (2011) · Nano Letters · doi:10.1021/nl201505c · Cited by 429 · see citing works
Self-citationA Conformal, Bio-Interfaced Class of Silicon Electronics for Mapping Cardiac Electrophysiology
Viventi, J., Kim, D., Moss, J. D., Kim, Y., Blanco, J. A., Annetta, N. V., Hicks, A., Xiao, J., Huang, Y., Callans, D. J., et al. (2010) · Science Translational Medicine · doi:10.1126/scitranslmed.3000738 · Cited by 419 · see citing works
Porous PVDF As Effective Sonic Wave Driven Nanogenerators
Cha, S., Kim, S. M., Kim, H., Ku, J., Sohn, J. I., Park, Y. J., Song, B. G., Jung, M. H., Lee, E. K., Choi, B. L., et al. (2011) · Nano Letters · doi:10.1021/nl202208n · Cited by 384 · see citing works
Self-citationFlexible Piezoelectric PMN–PT Nanowire-Based Nanocomposite and Device
Xu, S., Yeh, Y., Poirier, G. R., McAlpine, M. C., Register, R. A., & Yao, N. (2013) · Nano Letters · doi:10.1021/nl400169t · Cited by 339 · see citing works
Park, K., Jeong, C. K., Ryu, J., Hwang, G., & Lee, K. J. (2013) · Advanced Energy Materials · doi:10.1002/aenm.201300458 · Cited by 245 · see citing works
Self-citationKim, T., Jung, Y. H., Song, J., Kim, D., Li, Y., Kim, H., Song, I., Wierer, J. J., Pao, H. A., Huang, Y. Y., et al. (2012) · Small · doi:10.1002/smll.201200382 · Cited by 221 · see citing works
Synthesis and piezoresponse of highly ordered Pb(Zr0.53Ti0.47)O3 nanowire arrays
Zhang, X. Y., Zhao, X., Lai, C. W., et al. (2004) · Applied Physics Letters · doi:10.1063/1.1814427 · Cited by 159 · see citing works
Nanogenerators for Self-powered Devices and Systems
Wang, Z. L. (2011) · SMARTech Repository (Georgia Institute of Technology) · Cited by 119 · see citing works
Self-citationMaterials and Designs for Wirelessly Powered Implantable Light‐Emitting Systems
Kim, R.-H., Tao, H., Kim, T., Zhang, Y., Kim, S. E., Panilaitis, B., Yang, M., Kim, D., Jung, Y. H., Kim, B. H., et al. (2012) · Small · doi:10.1002/smll.201200943 · Cited by 99 · see citing works
Large-area interdigitated array microelectrodes for electrochemical sensing
Cohen, A. E., & Kunz, R. R. (2000) · Sensors and Actuators B Chemical · doi:10.1016/s0925-4005(99)00372-x · Cited by 96 · see citing works
Do, Y. H., Jung, W. S., Kang, M., et al. (2012) · Sensors and Actuators A Physical · doi:10.1016/j.sna.2012.10.034 · Cited by 67 · see citing works
Camargo, E. R., Frantti, J., & Kakihana, M. (2001) · Journal of Materials Chemistry · doi:10.1039/b009096o · Cited by 61 · see citing works
Fabrication of flexible device based on PAN-PZT thin films by laser lift-off process
Do, Y. H., Kang, M., Kim, J. S., et al. (2012) · Sensors and Actuators A Physical · doi:10.1016/j.sna.2012.06.012 · Cited by 38 · see citing works
Park, K., Lee, S. Y., Kim, S., et al. (2010) · Electrochemical and Solid-State Letters · doi:10.1149/1.3407622 · Cited by 25 · see citing works
Self-citationPreparation of PNN-PZT Thick Film on Pt/Ti/SiO2/Si Substrate by Laser Lift-Off Process
Li, K. F., Tai, N., & Lin, I. (2005) · Integrated ferroelectrics · doi:10.1080/10584580590897470 · Cited by 11 · see citing works
Denner, P., & Walter, B. (1997) · physica status solidi (a) · doi:10.1002/1521-396x(199701)159:1 · Cited by 1 · see citing works
Flagged first, then by citations
Cited by
Sorted by citations
Wearable sensors: modalities, challenges, and prospects
Heikenfeld, J., Jajack, A., Rogers, J., Gutruf, P., Tian, L., Pan, T., Li, R., Khine, M., Kim, J., Wang, J., et al. (2018) · Lab on a Chip · doi:10.1039/c7lc00914c · Cited by 1,434 · see citing works
Bio-Integrated Wearable Systems: A Comprehensive Review
Ray, T. R., Choi, J., Bandodkar, A. J., Krishnan, S., Gutruf, P., Tian, L., Ghaffari, R., & Rogers, J. A. (2019) · Chemical Reviews · doi:10.1021/acs.chemrev.8b00573 · Cited by 1,350 · see citing works
Advances of flexible pressure sensors toward artificial intelligence and health care applications
Zang, Y., Zhang, F., Di, C.-A., & Zhu, D. (2015) · Materials Horizons · doi:10.1039/c4mh00147h · Cited by 1,272 · see citing works
Recent Progress in Electronic Skin
Wang, X., Dong, L., Zhang, H., Yu, R., Pan, C., & Wang, Z. L. (2015) · Advanced Science · doi:10.1002/advs.201500169 · Cited by 976 · see citing works
Self-citationLim, S., Son, D., Kim, J., Lee, Y. B., Song, J., Choi, S., Lee, D. J., Kim, J. H., Lee, M., Hyeon, T., et al. (2015) · Advanced Functional Materials · doi:10.1002/adfm.201402987 · Cited by 582 · see citing works
Hong, Y. J., Jeong, H., Cho, K. W., Lu, N., & Kim, D. (2019) · Advanced Functional Materials · doi:10.1002/adfm.201808247 · Cited by 559 · see citing works
Applications of Phosphorene and Black Phosphorus in Energy Conversion and Storage Devices
Pang, J., Bachmatiuk, A., Yin, Y., Trzebicka, B., Zhao, L., Fu, L., Mendes, R. G., Gemming, T., Liu, Z., & Rummeli, M. H. (2018) · Advanced Energy Materials · doi:10.1002/aenm.201702093 · Cited by 518 · see citing works
Self-Powered, Ultrasensitive, Flexible Tactile Sensors Based on Contact Electrification
Zhu, G., Yang, W. Q., Zhang, T., Jing, Q., Chen, J., Zhou, Y. S., Bai, P., & Wang, Z. L. (2014) · Nano Letters · doi:10.1021/nl5005652 · Cited by 464 · see citing works
Self-citationOne‐Dimensional Nanomaterials for Soft Electronics
Gong, S., & Cheng, W. (2017) · Advanced Electronic Materials · doi:10.1002/aelm.201600314 · Cited by 361 · see citing works
High-Performance Flexible Thermoelectric Power Generator Using Laser Multiscanning Lift-Off Process
Kim, S. J., Lee, H. E., Choi, H., Kim, Y., We, J. H., Shin, J. S., Lee, K. J., & Cho, B. J. (2016) · ACS Nano · doi:10.1021/acsnano.6b05004 · Cited by 257 · see citing works
Self-citationLee, S., Shi, Q., & Lee, C. (2019) · APL Materials · doi:10.1063/1.5063498 · Cited by 164 · see citing works
Self-citationUltrasound-induced wireless energy harvesting: from materials strategies to functional applications
Jiang, L., Yang, Y., Chen, Y., & Zhou, Q. (2020) · Nano Energy · doi:10.1016/j.nanoen.2020.105131 · Cited by 131 · see citing works
Han, J. H., Kwak, J.-H., Joe, D. J., Hong, S. K., Wang, H. S., Park, J. H., Hur, S., & Lee, K. J. (2018) · Nano Energy · doi:10.1016/j.nanoen.2018.08.053 · Cited by 128 · see citing works
Self-citationWearable Skin Sensors and Their Challenges: A Review of Transdermal, Optical, and Mechanical Sensors
Ahmad Tarar, A., Mohammad, U., & K. Srivastava, S. (2020) · Biosensors · doi:10.3390/bios10060056 · Cited by 119 · see citing works
- Authors
- Park, K., Son, J. H., Hwang, G., Jeong, C. K., Ryu, J., Koo, M., Choi, I., Lee, S. H., Byun, M., Wang, Z. L., & Lee, K. J.
- Affiliations
- Korea Advanced Institute of Science and Technology (KR)
- Korea Institute of Materials Science (KR)
- Georgia Institute of Technology (US)
- Corresponding author
- Lee, Keon Jae
- ORCID
- Venue
- Advanced Materials
- Publisher
- Wiley
- Published
- 2014-02-12
- Volume
- 26
- Issue
- 16
- Pages
- 2514-2520
- ISSN
- 0935-9648 (ISSN-L)
- 1521-4095
- OpenAlex
- W2076256736
- Cited by
- 835
- References
- 34
- Citations by year
- 2026: 29 · 2025: 50 · 2024: 58 · 2023: 74 · 2022: 95 · 2021: 85 · 2020: 84 · 2019: 88 · 2018: 94 · 2017: 72 · 2016: 57 · 2015: 31 · 2014: 17
- FWCI
- 30.61
- Type
- journal article
- Language
- en
- Open access
- closed
- Locations
- Advanced Materials (publishedVersion)
- PubMed (publishedVersion)
- Topics
- Physical Sciences › Engineering › Biomedical Engineering › Advanced Sensor and Energy Harvesting Materials
- Physical Sciences › Engineering › Mechanical Engineering › Innovative Energy Harvesting Technologies
- Physical Sciences › Materials Science › Materials Chemistry › Ferroelectric and Piezoelectric Materials
- Keywords
- piezoelectric nanogenerators, PZT thin films, flexible energy harvesting, laser lift-off, plastic substrates, bending motion, LED powering, wearable power sources
- MeSH terms
- Ceramics, Electricity, Humans, Lasers, Plastics, Electric Power Supplies, Nanotechnology, Nanocomposites, Mechanical Phenomena
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
