The DOI matches its Crossref record; 36 of the 36 references it cites were found in a registry or an index.
Synthesis and Stabilization of Supported Metal Catalysts by Atomic Layer Deposition
Abstract
Supported metal nanoparticles are among the most important catalysts for many practical reactions, including petroleum refining, automobile exhaust treatment, and Fischer-Tropsch synthesis. The catalytic performance strongly depends on the size, composition, and structure of the metal nanoparticles, as well as the underlying support. Scientists have used conventional synthesis methods including impregnation, ion exchange, and deposition-precipitation to control and tune these factors, to establish structure-performance relationships, and to develop better catalysts. Meanwhile, chemists have improved the stability of metal nanoparticles against sintering by the application of protective layers, such as polymers and oxides that encapsulate the metal particle. This often leads to decreased catalytic activity due to a lack of precise control over the thickness of the protective layer. A promising method of catalyst synthesis is atomic layer deposition (ALD). ALD is a variation on chemical vapor deposition in which metals, oxides, and other materials are deposited on surfaces by a sequence of self-limiting reactions. The self-limiting character of these reactions makes it possible to achieve uniform deposits on high-surface-area porous solids. Therefore, design and synthesis of advanced catalysts on the nanoscale becomes possible through precise control over the structure and composition of the underlying support, the catalytic active sites, and the protective layer. In this Account, we describe our advances in the synthesis and stabilization of supported metal catalysts by ALD. After a short introduction to the technique of ALD, we show several strategies for metal catalyst synthesis by ALD that take advantage of its self-limiting feature. Monometallic and bimetallic catalysts with precise control over the metal particle size, composition, and structure were achieved by combining ALD sequences, surface treatments, and deposition temperature control. Next, we describe ALD oxide overcoats applied with atomically precise thickness control that stabilize metal catalysts while preserving their catalytic function. We also discuss strategies for generation and control over the porosity of the overcoats that allow the embedded metal particles to remain accessible by reactants, and the details for ALD alumina overcoats on metal catalysts. Moreover, using methanol decomposition and oxidative dehydrogenation of ethane as probe reactions, we demonstrate that selectively blocking low coordination metal sites by oxide overcoats can provide another strategy to enhance both the durability and selectivity of metal catalysts.
Overview
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Integrity signals
Registry
Cites
Statistics
Verification
Claims the paper makes
The claims and statistics of this paper haven’t been checked yet.
Run the check — free, no account needed. It reads the open-access text and checks the sources it cites.
Self-check
Percentages, sums and reported differences re-computed from the paper’s own numbers.
The self-check needs the paper’s full text.
Citations
Cites
Atomic Layer Deposition: An Overview
George, S. M. (2010) · Chemical Reviews · doi:10.1021/cr900056b · Cited by 5,814
Mechanisms of catalyst deactivation
Bartholomew, C. H. (2001) · Applied Catalysis A: General · doi:10.1016/s0926-860x(00)00843-7 · Cited by 3,083
Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
Puurunen, R. L. (2005) · Journal of Applied Physics · doi:10.1063/1.1940727 · Cited by 2,609
The Impact of Nanoscience on Heterogeneous Catalysis
Bell, A. T. (2003) · Science · doi:10.1126/science.1083671 · Cited by 2,510
Atomic-scale imaging of carbon nanofibre growth
Helveg, S., López-Cartes, C., Sehested, J., Hansen, P. L., Clausen, B. S., Rostrup-Nielsen, J. R., Abild-Pedersen, F., & Nørskov, J. K. (2004) · Nature · doi:10.1038/nature02278 · Cited by 1,467
Thermally stable Pt/mesoporous silica core–shell nanocatalysts for high-temperature reactions
Joo, S. H., Park, J. Y., Tsung, C.-K., Yamada, Y., Yang, P., & Somorjai, G. A. (2009) · Nature Materials · doi:10.1038/nmat2329 · Cited by 1,467
Suntola, T. (1992) · Thin Solid Films · doi:10.1016/0040-6090(92)90874-b · Cited by 1,367
Cuenya, B. R. (2010) · Thin Solid Films · doi:10.1016/j.tsf.2010.01.018 · Cited by 1,179
The Effect of Size-Dependent Nanoparticle Energetics on Catalyst Sintering
Campbell, C. T., Parker, S. C., & Starr, D. E. (2002) · Science · doi:10.1126/science.1075094 · Cited by 1,050
Supported Metal Clusters: Synthesis, Structure, and Catalysis
Gates, B. C. (1995) · Chemical Reviews · doi:10.1021/cr00035a003 · Cited by 1,047
Synthesis and Surface Engineering of Complex Nanostructures by Atomic Layer Deposition
Knez, M., Nielsch, K., & Niinistö, L. (2007) · Advanced Materials · doi:10.1002/adma.200700079 · Cited by 889
Increased Silver Activity for Direct Propylene Epoxidation via Subnanometer Size Effects
Lei, Y., Mehmood, F., Lee, S., Greeley, J., Lee, B., Seifert, S., Winans, R. E., Elam, J. W., Meyer, R. J., Redfern, P. C., et al. (2010) · Science · doi:10.1126/science.1185200 · Cited by 882
Self-citationCoking- and Sintering-Resistant Palladium Catalysts Achieved Through Atomic Layer Deposition
Lu, J., Fu, B., Kung, M. C., Xiao, G., Elam, J. W., Kung, H. H., & Stair, P. C. (2012) · Science · doi:10.1126/science.1212906 · Cited by 852
Self-citationAtomic layer-deposited tunnel oxide stabilizes silicon photoanodes for water oxidation
Chen, Y. W., Prange, J. D., Dühnen, S., Park, Y., Gunji, M., Chidsey, C. E. D., & McIntyre, P. C. (2011) · Nature Materials · doi:10.1038/nmat3047 · Cited by 738
High‐Temperature‐Stable Catalysts by Hollow Sphere Encapsulation
Arnal, P. M., Comotti, M., & Schüth, F. (2006) · Angewandte Chemie · doi:10.1002/ange.200603507 · Cited by 679
Atomic layer deposition of transition metals
Lim, B. S., Rahtu, A., & Gordon, R. G. (2003) · Nature Materials · doi:10.1038/nmat1000 · Cited by 657
High‐Temperature‐Stable Catalysts by Hollow Sphere Encapsulation
Arnal, P. M., Comotti, M., & Schüth, F. (2006) · Angewandte Chemie International Edition · doi:10.1002/anie.200603507 · Cited by 654
Catalytically Active Gold: From Nanoparticles to Ultrathin Films
Chen, M., & Goodman, D. W. (2006) · Accounts of Chemical Research · doi:10.1021/ar040309d · Cited by 492
Ott, L. S., & Finke, R. G. (2007) · Coordination Chemistry Reviews · doi:10.1016/j.ccr.2006.08.016 · Cited by 454
Zhang, X., Zhao, J., Whitney, A. V., Elam, J. W., & Van Duyne, R. P. (2006) · Journal of the American Chemical Society · doi:10.1021/ja0638760 · Cited by 407
Self-citationUltrathin Coatings on Nano-LiCoO2for Li-Ion Vehicular Applications
Scott, I. D., Jung, Y. S., Cavanagh, A. S., Yan, Y., Dillon, A. C., George, S. M., & Lee, S.-H. (2011) · Nano Letters · doi:10.1021/nl1030198 · Cited by 379
Ultralow Loading Pt Nanocatalysts Prepared by Atomic Layer Deposition on Carbon Aerogels
King, J. S., Wittstock, A., Biener, J., Kucheyev, S. O., Wang, Y. M., Baumann, T. F., Giri, S. K., Hamza, A. V., Baeumer, M., & Bent, S. F. (2008) · Nano Letters · doi:10.1021/nl801299z · Cited by 261
Surface‐Protected Etching of Mesoporous Oxide Shells for the Stabilization of Metal Nanocatalysts
Zhang, Q., Lee, I., Ge, J., Zaera, F., & Yin, Y. (2010) · Advanced Functional Materials · doi:10.1002/adfm.201000428 · Cited by 228
Supported Ru−Pt Bimetallic Nanoparticle Catalysts Prepared by Atomic Layer Deposition
Christensen, S. T., Feng, H., Libera, J. L., Guo, N., Miller, J. T., Stair, P. C., & Elam, J. W. (2010) · Nano Letters · doi:10.1021/nl101567m · Cited by 219
Self-citationAtomic layer deposition of ultrathin and conformal Al2O3 films on BN particles
Ferguson, J. D., Weimer, A. W., & George, S. M. (2000) · Thin Solid Films · doi:10.1016/s0040-6090(00)00973-1 · Cited by 207
Feng, H., Lu, J., Stair, P. C., & Elam, J. W. (2011) · Catalysis Letters · doi:10.1007/s10562-011-0548-8 · Cited by 172
Self-citationChristensen, S. T., Elam, J. W., Rabuffetti, F. A., Ma, Q., Weigand, S. J., Lee, B., Seifert, S., Stair, P. C., Poeppelmeier, K. R., Hersam, M. C., et al. (2009) · Small · doi:10.1002/smll.200801920 · Cited by 170
Self-citationPagán‐Torres, Y. J., Gallo, J. M. R., Wang, D., Pham, H. N., Libera, J. A., Marshall, C. L., Elam, J. W., Datye, A. K., & Dumesic, J. A. (2011) · ACS Catalysis · doi:10.1021/cs200367t · Cited by 140
Self-citationLu, J., Liu, B., Greeley, J., Feng, Z., Libera, J. A., Lei, Y., Bedzyk, M. J., Stair, P. C., & Elam, J. W. (2012) · Chemistry of Materials · doi:10.1021/cm300203s · Cited by 123
Self-citationStabilization of Supported Metal Nanoparticles Using an Ultrathin Porous Shell
Liang, X., Li, J., Yu, M., McMurray, C. N., Falconer, J. L., & Weimer, A. W. (2011) · ACS Catalysis · doi:10.1021/cs200257p · Cited by 117
Lei, Y., Liu, B., Lu, J., Lobo‐Lapidus, R. J., Wu, T., Feng, H., Xia, X., Mane, A. U., Libera, J. A., Greeley, J., et al. (2012) · Chemistry of Materials · doi:10.1021/cm300080w · Cited by 111
Self-citationAdsorption controlled preparation of heterogeneous catalysts
Haukka, S., Lakomaa, E.-L., & Suntola, T. (1999) · Studies in surface science and catalysis · doi:10.1016/s0167-2991(99)80570-9 · Cited by 104
Subnanometer Palladium Particles Synthesized by Atomic Layer Deposition
Feng, H., Libera, J. A., Stair, P. C., Miller, J. T., & Elam, J. W. (2011) · ACS Catalysis · doi:10.1021/cs2000957 · Cited by 102
Self-citationLu, J., & Stair, P. C. (2010) · Angewandte Chemie International Edition · doi:10.1002/anie.200907168 · Cited by 94
Self-citationLu, J., & Stair, P. C. (2010) · Langmuir · doi:10.1021/la101378s · Cited by 79
Self-citationSynthesis Strategy for Protected Metal Nanoparticles
Ray, N. A., Duyne, R. P. V., & Stair, P. C. (2012) · The Journal of Physical Chemistry C · doi:10.1021/jp210688z · Cited by 48
Self-citation
Cited by
Single atom electrocatalysts supported on graphene or graphene-like carbons
Fei, H., Dong, J., Chen, D., Hu, T., Duan, X., Shakir, I., Huang, Y., & Duan, X. (2019) · Chemical Society Reviews · doi:10.1039/c9cs00422j · Cited by 673
New trends in tailoring active sites in zeolite-based catalysts
Shamzhy, M., Opanasenko, M., Concepción, P., & Martínez, A. (2019) · Chemical Society Reviews · doi:10.1039/c8cs00887f · Cited by 508
From the Bottom-Up: Toward Area-Selective Atomic Layer Deposition with High Selectivity
Mackus, A. J. M., Merkx, M. J. M., & Kessels, W. M. M. (2019) · Chemistry of Materials · doi:10.1021/acs.chemmater.8b03454 · Cited by 426
Lu, J., Low, K.-B., Lei, Y., Libera, J. A., Nicholls, A., Stair, P. C., & Elam, J. W. (2014) · Nature Communications · doi:10.1038/ncomms4264 · Cited by 233
Self-citationOnn, T., Küngas, R., Fornasiero, P., Huang, K., & Gorte, R. (2018) · Inorganics · doi:10.3390/inorganics6010034 · Cited by 111
Metadata
- Authors
- Lu, J., Elam, J. W., & Stair, P. C.
- Venue
- Accounts of Chemical Research
- Publisher
- American Chemical Society (ACS)
- Published
- 2013-03-12
- Volume
- 46
- Issue
- 8
- Pages
- 1806-1815
- ISSN
- 0001-4842 (ISSN-L)
- 1520-4898
- OpenAlex
- W2069946148
- Cited by
- 329
- References
- 36
- FWCI
- 10.51
- Type
- journal article
- Language
- en
- Open access
- closed
About these checks
Registry, retraction, Cites and statistics results are computed, not judged, with one exception: a printed reference that no index lists is read once by a model before it counts as a citation error. Claims are extracted by a model and kept only when their quote appears verbatim in the text; each cited source is then checked, with a model’s help, for whether it says what the claim relies on. Those verdicts can be wrong — read the claim’s quote and the cited source before relying on one.
Statistics and arithmetic are recomputed, not judged.
Confidence bands are shown only for fields calibrated on our annotated test set. None is calibrated yet, so no band is shown.
What counts as a claim ›How we measure confidence ›How we check this ›
Are you an author, or do you see a problem with this page? Request a review
Data sources
Bibliographic data: Semantic Scholar, OpenAlex, Crossref.
Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
Semantic Scholar’s data is described in: Kinney, R., et al. (2023). The Semantic Scholar Open Data Platform. arXiv:2301.10140.
