Thermal conductivity of (Zr,W)N/ScN metal/semiconductor multilayers and superlattices

Rawat, Vijay; Koh, Yee Kan; Cahill, David G.; Sands, Timothy D.

doi:10.1063/1.3065092

Cited by 129Thermal properties of materialsAdvanced Thermoelectric Materials and DevicesMetal and Thin Film Mechanics

Thermal conductivity of (Zr,W)N/ScN metal/semiconductor multilayers and superlattices

Rawat, Vijay, Koh, Yee Kan, Cahill, David G., Sands, Timothy D.·2009·Journal of Applied Physics

DOI 10.1063/1.3065092

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Abstract

The cross-plane thermal conductivities of metal/semiconductor multilayers and epitaxial superlattices have been measured as a function of period by time-domain thermoreflectance at room temperature. (001)-oriented ZrN (metal)/ScN (semiconductor) multilayers and (Zr,W)N/ScN epitaxial superlattices with the rocksalt crystal structure were grown on (001)MgO substrates by reactive magnetron sputtering. A distinct minimum in thermal conductivity at a period of ∼6 nm is observed for ZrN/ScN multilayers. The minimum thermal conductivity of 5.25 W/m K is a factor of ∼2.7 smaller than the mean of the thermal conductivities (including only the lattice contributions) of the values measured for films of the constituent materials, and approximately equal to the lattice component of the thermal conductivity of a Zr0.65Sc0.35N alloy film (∼5 W/m K). Alloying the ZrN layers with WNx reduces the lattice mismatch, yielding epitaxial (Zr,W)N/ScN superlattices. The addition of WNx also reduces the thermal conductivity to ∼2 W/m K, a value that is sufficiently low to suggest promise for these materials as solid-state thermionic generators.

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TDTR is often used to measure the through-plane thermal conductivity Kz of the sample and the transducer/sample interface conductance G without much elaboration.
“Therefore, TDTR is often used to measure the through-plane thermal conductivity Kz of the sample and the transducer/sample interface conductance G without much elaboration.”
From Tutorial: Time-domain thermoreflectance (TDTR) for thermal property characterization of bulk and thin film materials (2018) · cites this paper as [123]
The thermal conductivity of superlattices and nanolaminates has been extensively characterized using TDTR over the last 15 years.
“The thermal conductivity of superlattices and nanolaminates 27, 59, 78, 79, 123, 132-138 (see Figure 6(b) for an example) has been extensively characterized using TDTR over the last 15 years.”
From Tutorial: Time-domain thermoreflectance (TDTR) for thermal property characterization of bulk and thin film materials (2018) · cites this paper as [123]

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Ó 2009 The Author(s). This article is published with open access at Springerlink.com Special Issue Paper Thermoelectric Transport in a ZrN/ScN Superlattice
Zebarjadi, M., Bian, Z., Singh, R., Shakouri, A., Wortman, R., Rawat, V., & Sands, T. (2013)
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Thermoelectric Transport in a ZrN/ScN Superlattice
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Authors: Rawat, V., Koh, Y. K., Cahill, D. G., & Sands, T. D.
Affiliations: Purdue University West Lafayette (US)
University of Illinois Urbana-Champaign (US)
ORCID: Rawat, Vijay
Koh, Yee Kan
Cahill, David G.
Sands, Timothy D.
Venue: Journal of Applied Physics
Publisher: AIP Publishing
Published: 2009-01-15
Volume: 105
Issue: 2
ISSN: 0021-8979 (ISSN-L)
1089-7550
DOI: 10.1063/1.3065092
OpenAlex: W2018333973
Cited by: 129
References: 39
Citations by year: 2026: 3 · 2025: 5 · 2024: 3 · 2023: 7 · 2022: 5 · 2021: 7 · 2020: 4 · 2019: 13 · 2018: 10 · 2017: 12 · 2016: 9 · 2015: 7 · 2014: 9 · 2013: 13 · 2012: 4
FWCI: 3.54
Type: journal article
Language: en
Open access: closed
Locations: Journal of Applied Physics (publishedVersion)
Purdue e-Pubs (Purdue University System) (submittedVersion)
Topics: Physical Sciences › Materials Science › Materials Chemistry › Thermal properties of materials
Physical Sciences › Materials Science › Materials Chemistry › Advanced Thermoelectric Materials and Devices
Physical Sciences › Engineering › Mechanics of Materials › Metal and Thin Film Mechanics
Keywords: thermal conductivity, epitaxial superlattices, scandium nitride, zirconium nitride, lattice mismatch, time-domain thermoreflectance, reactive magnetron sputtering, MgO substrate

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Thermal conductivity of (Zr,W)N/ScN metal/semiconductor multilayers and superlattices

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