Accurate measurements of cross-plane thermal conductivity of thin films by dual-frequency time-domain thermoreflectance (TDTR)
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Accurate measurements of the cross-plane thermal conductivity Λcross of a high-thermal-conductivity thin film on a low-thermal-conductivity (Λs) substrate (e.g., Λcross/Λs > 20) are challenging, due to the low thermal resistance of the thin film compared with that of the substrate. In principle, Λcross could be measured by time-domain thermoreflectance (TDTR), using a high modulation frequency fh and a large laser spot size. However, with one TDTR measurement at fh, the uncertainty of the TDTR measurement is usually high due to low sensitivity of TDTR signals to Λcross and high sensitivity to the thickness hAl of Al transducer deposited on the sample for TDTR measurements. We observe that in most TDTR measurements, the sensitivity to hAl only depends weakly on the modulation frequency f. Thus, we performed an additional TDTR measurement at a low modulation frequency f0, such that the sensitivity to hAl is comparable but the sensitivity to Λcross is near zero. We then analyze the ratio of the TDTR signals at fh to that at f0, and thus significantly improve the accuracy of our Λcross measurements. As a demonstration of the dual-frequency approach, we measured the cross-plane thermal conductivity of a 400-nm-thick nickel-iron alloy film and a 3-μm-thick Cu film, both with an accuracy of ∼10%. The dual-frequency TDTR approach is useful for future studies of thin films.
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The dual-frequency TDTR approach was verified by measuring the through-plane thermal conductivity of a 3 μm-thick Cu film on a SiO2 substrate, with excellent agreement with four-point measurements, whereas conventional TDTR showed approximately 20% discrepancy.
“This dual-frequency TDTR approach was verified by measuring the through-plane thermal conductivity of a 3μ m-thick Cu film on a SiO2 substrate. 184”
From Tutorial: Time-domain thermoreflectance (TDTR) for thermal property characterization of bulk and thin film materials (2018) · cites this paper as [184]
The dual-frequency approach has been shown to improve the accuracy in determining Kz of thin films by approximately 3 times.
“This dual-frequency approach has been shown to be able to improve the accuracy in determining Kz of thin films by ൎ 3 times”
From Tutorial: Time-domain thermoreflectance (TDTR) for thermal property characterization of bulk and thin film materials (2018) · cites this paper as [184]
A dual-frequency TDTR approach has been developed that takes advantage of the different frequency dependence in the sensitivities of different parameters.
“To overcome this challenge, a dual-frequency TDTR approach has been developed 184 that takes the advantage of the different frequency dependence in the sensitivities of the different parameters.”
From Tutorial: Time-domain thermoreflectance (TDTR) for thermal property characterization of bulk and thin film materials (2018) · cites this paper as [184]
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Self-citationWilson, R. W., Kelleher-Ferguson, J., Wu, E. C., & Schwartz, B. J. (2026) · Chemistry of Materials · doi:10.1021/acs.chemmater.6c01465
Interfacial thermal transport spectroscopy: a review of theory and experiment
Xu, Y., Xiang, X., Liu, W., Zhu, Y., Hu, Y., Li, M., Ma, H., Cao, B., & Zhou, Y. (2026) · Physical Chemistry Chemical Physics · doi:10.1039/d6cp02619b
Deng, Z., Ma, J., & Jiang, P. (2026) · Journal of Applied Physics · doi:10.1063/5.0341686
Self-citationKim, H., Park, H. M., Joo, K.-N., & Oh, D. (2026) · Case Studies in Thermal Engineering · doi:10.1016/j.csite.2026.108547
Physics-derived natural coordinates for fast uncertainty propagation in multilayer thermoreflectance
Chen, T., Wang, D., & Jiang, P. (2026) · International Journal of Heat and Mass Transfer · doi:10.1016/j.ijheatmasstransfer.2026.129653
Self-citationXiao, B., Chen, T., & Jiang, P. (2026) · Journal of Applied Physics · doi:10.1063/5.0347652
Self-citation
- Authors
- Jiang, P., Huang, B., & Koh, Y. K.
- Affiliations
- National University of Singapore (SG)
- Venue
- Review of Scientific Instruments
- Publisher
- AIP Publishing
- Published
- 2016-07-01
- Volume
- 87
- Issue
- 7
- Pages
- 075101-075101
- ISSN
- 0034-6748 (ISSN-L)
- 1089-7623
- OpenAlex
- W2252624863
- Cited by
- 66
- References
- 36
- Citations by year
- 2026: 13 · 2025: 5 · 2024: 5 · 2023: 9 · 2022: 7 · 2021: 3 · 2020: 4 · 2019: 7 · 2018: 8 · 2017: 3 · 2016: 2
- FWCI
- 2.97
- Type
- journal article
- Language
- en
- Open access
- green
- arxiv.org
- Locations
- Review of Scientific Instruments (publishedVersion)
- PubMed (publishedVersion)
- arXiv (Cornell University) (submittedVersion)
- arXiv (Cornell University)
- Funders
- Ministry of Education - Singapore (R-265-000-364-133)
- Topics
- Physical Sciences › Materials Science › Materials Chemistry › Thermal properties of materials
- Physical Sciences › Engineering › Mechanics of Materials › Thermography and Photoacoustic Techniques
- Physical Sciences › Engineering › Mechanics of Materials › Thermoelastic and Magnetoelastic Phenomena
- Keywords
- through-plane thermal conductivity, time-domain thermoreflectance, dual-frequency measurements, thin films, substrate thermal conductivity, measurement accuracy, copper films, high thermal conductivity
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