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Cited by 24Low-Pressure Plasma Processing and DiagnosticsVacuum and Plasma ArcsMagnetic confinement fusion research

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Electron dynamics in planar radio frequency magnetron plasmas: I. The mechanism of Hall heating and the µ-mode

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Eremin, Denis, Engel, Dennis, Krüger, Dennis, Wilczek, Sebastian, Berger, Birk, Oberberg, Moritz, Wölfel, Christian, Smolyakov, Andrei, Lunze, Jan, Awakowicz, Peter, Schulze, Julian, Brinkmann, Ralf Peter·2023·Plasma Sources Science and Technology
DOI 10.1088/1361-6595/acc481
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Abstract

The electron dynamics and the mechanisms of power absorption in radio-frequency (RF) driven, magnetically enhanced capacitively coupled plasmas at low pressure are investigated. The device in focus is a geometrically asymmetric cylindrical magnetron with a radially nonuniform magnetic field in axial direction and an electric field in radial direction. The dynamics is studied analytically using the cold plasma model and a single-particle formalism, and numerically with the inhouse energy and charge conserving particle-in-cell/Monte Carlo collisions code ECCOPIC1S-M. It is found that the dynamics differs significantly from that of an unmagnetized reference discharge. In the magnetized region in front of the powered electrode, an enhanced electric field arises during sheath expansion and a reversed electric field during sheath collapse. Both fields are needed to ensure discharge sustaining electron transport against the confining effect of the magnetic field. The corresponding azimuthal E × B -drift can accelerate electrons into the inelastic energy range which gives rise to a new mechanism of RF power dissipation. It is related to the Hall current and is different in nature from Ohmic heating, as which it has been classified in previous literature. The new heating is expected to be dominant in many magnetized capacitively coupled discharges. It is proposed to term it the ‘ µ -mode’ to separate it from other heating modes.

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  • Non-linear effects such as the generation of higher harmonics, parametric decay instabilities, non-linear wave-particle interaction including particle trapping effects, and non-linear skin-effect can be important but require evolving the EM fields in the time domain.

    “Non-linear effects, such as the generation of higher harmonics, parametric decay instabilities, non-linear wave-particle interaction including particle trapping effects, non-linear skin-effect (see, e.g., Refs.131-136) can be important but require evolving the EM fields in the time domain.”

    From Plasma propulsion modeling with particle-based algorithms (2023) · cites this paper as [135]

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Metadata

Authors
Eremin, D., Engel, D., Krüger, D., Wilczek, S., Berger, B., Oberberg, M., Wölfel, C., Smolyakov, A., Lunze, J., Awakowicz, P., Schulze, J., & Brinkmann, R. P.
Affiliations
  • Ruhr University Bochum (DE)
  • University of Saskatchewan (CA)
Corresponding author
Eremin, Denis
ORCID
Venue
Plasma Sources Science and Technology
Publisher
IOP Publishing
Published
2023-04-01
Volume
32
Issue
4
Pages
045007
ISSN
  • 0963-0252 (ISSN-L)
  • 1361-6595
DOI
10.1088/1361-6595/acc481
OpenAlex
W4324319757
Cited by
24
References
2
Citations by year
2026: 7 · 2025: 5 · 2024: 9 · 2023: 3
FWCI
1.78
Type
journal article
Language
en
Open access
Licence
Locations
  • Plasma Sources Science and Technology (publishedVersion, cc-by)
  • arXiv (Cornell University) (submittedVersion)
  • arXiv (Cornell University)
Funders
DFG (417888799)
Topics
  • Physical Sciences › Engineering › Electrical and Electronic Engineering › Low-Pressure Plasma Processing and Diagnostics
  • Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Vacuum and Plasma Arcs
  • Physical Sciences › Physics and Astronomy › Nuclear and High Energy Physics › Magnetic confinement fusion research
Keywords
capacitively coupled plasma, electron dynamics, RF power absorption, magnetized plasma, sheath expansion, E×B drift, electron heating, cold plasma model, low-pressure plasma

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