The DOI matches its Crossref record; 1 of the 1 references it cites were found in a registry or an index.
A high-yield IC-compatible multichannel recording array
Abstract
This paper reports the development of a multielectrode recording array for use in studies of information processing in the central nervous system and in the closed-loop control of neural prostheses. The probe utilizes a silicon supporting carrier which is defined using a deep boron diffusion and an anisotropic etch stop. This substrate supports an array of polysilicon or tantalum thin-film conductors insulated above and below with silicon nitride and silicon dioxide. Typical probe dimensions include a length of 3 mm, shank width of 50 µm, and a thickness of 15 µm. These structures are capable of simultaneous high-amplitude multichannel recording of neural activity in the cortex. The probe fabrication process requires only four masks and is single-sided using wafers of normal thickness, resulting in yields which exceed 80 percent. The process is also compatible with the inclusion of on-chip MOS circuitry for signal amplification and multiplexing. A complete ten-channel signal processor which requires only three external probe leads is being developed.
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Citations
Cites
An Integrated-Circuit Approach to Extracellular Microelectrodes
Wise, K. D., Angell, J. B., & Starr, A. (1970) · IEEE Transactions on Biomedical Engineering · doi:10.1109/tbme.1970.4502738 · Cited by 544
Self-citation
Research works printed but not linked: 11
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- wise, 1984, A micromachined integrated sensor with on-chip self-test capability, Tech Dig IEEE Solid State Sensor Conf, 12
- 10.1016/0250-6874(84)87009-2 · DOI
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Cited by
Navarro, X., Krueger, T. B., Lago, N., Micera, S., Stieglitz, T., & Dario, P. (2005) · Journal of the Peripheral Nervous System · doi:10.1111/j.1085-9489.2005.10303.x · Cited by 845
Brain-Controlled Interfaces: Movement Restoration with Neural Prosthetics
Schwartz, A. B., Cui, X. T., Weber, D. J., & Moran, D. W. (2006) · Neuron · doi:10.1016/j.neuron.2006.09.019 · Cited by 792
A Review of Organic and Inorganic Biomaterials for Neural Interfaces
Fattahi, P., Yang, G., Kim, G., & Abidian, M. R. (2014) · Advanced Materials · doi:10.1002/adma.201304496 · Cited by 580
A three-dimensional microelectrode array for chronic neural recording
Hoogerwerf, A. C., & Wise, K. D. (1994) · IEEE Transactions on Biomedical Engineering · doi:10.1109/10.335862 · Cited by 371
Self-citationAn implantable multielectrode array with on-chip signal processing
Najafi, K., & Wise, K. D. (1986) · IEEE Journal of Solid-State Circuits · doi:10.1109/jssc.1986.1052646 · Cited by 310
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Metadata
- Authors
- Najafi, K., Wise, K. D., & Mochizuki, T.
- Venue
- IEEE Transactions on Electron Devices
- Published
- 1985-07
- Volume
- 32
- Issue
- 7
- Pages
- 1206-1211
- ISSN
- 0018-9383 (ISSN-L)
- 1557-9646
- OpenAlex
- W2045701127
- Cited by
- 301
- References
- 1
- FWCI
- 1.26
- Type
- journal article
- Language
- en
- Open access
- closed
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- Najafi, K., Wise, K. D., & Mochizuki, T. (1985). A high-yield IC-compatible multichannel recording array. IEEE Transactions on Electron Devices. https://doi.org/10.1109/t-ed.1985.22102
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Contains information from the Semantic Scholar Academic Graph Datasets, made available under the ODC Attribution License (ODC-BY 1.0).
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