An Integrated-Circuit Approach to Extracellular Microelectrodes
Open accessAbstract
This paper describes a new multielectrode microprobe which utilizes integrated-circuit fabrication techniques to overcome many of the problems associated with conventional microelectrodes. The probe structure consists of an array of gold electrodes which are supported on a silicon carrier and which project beyond the carrier for a distance of about 50 μ to allow a close approach to active neurons. These electrodes are covered with a thin (0.4-μ) layer of silicon dioxide which is selectively removed at the electrode tips using high-resolution photoengraving techniques to define the recording areas precisely. The processing sequence described permits any two-dimensional electrode array to be realized. Interelectrode spacings can be accurately controlled in the range from 10 to 20 μ or larger, and electrode-tip diameters can be as small as 2 μ.
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Neuroscience studies commonly place electrodes into specific cortical regions to record neural electrical activity.
“Typical neuroscience studies involve inserting electrodes [10, 90, 144] into specific regions of the cortex to acquire neural electrical activity.”
From Implantable neurotechnologies: a review of integrated circuit neural amplifiers (2016) · cites this paper as [144]
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- Authors
- Wise, K. D., Angell, J. B., & Starr, A.
- Affiliations
- Stanford University (US)
- Stanford Medicine (US)
- ORCID
- Starr, Arnold
- Venue
- IEEE Transactions on Biomedical Engineering
- Published
- 1970-07
- Volume
- BME-17
- Issue
- 3
- Pages
- 238-247
- ISSN
- 0018-9294 (ISSN-L)
- 1558-2531
- OpenAlex
- W2053012273
- Cited by
- 544
- References
- 14
- Citations by year
- 2026: 12 · 2025: 28 · 2024: 23 · 2023: 19 · 2022: 29 · 2021: 22 · 2020: 22 · 2019: 28 · 2018: 18 · 2017: 16 · 2016: 16 · 2015: 19 · 2014: 22 · 2013: 24 · 2012: 12
- FWCI
- 1.02
- Type
- journal article
- Language
- en
- Open access
- green
- escholarship.org
- Locations
- IEEE Transactions on Biomedical Engineering (publishedVersion)
- PubMed (publishedVersion)
- eScholarship (California Digital Library) (submittedVersion, cc-by)
- Topics
- Life Sciences › Neuroscience › Cellular and Molecular Neuroscience › Neuroscience and Neural Engineering
- Physical Sciences › Engineering › Biomedical Engineering › Analog and Mixed-Signal Circuit Design
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Advanced MEMS and NEMS Technologies
- Keywords
- integrated circuit fabrication, silicon dioxide etching, photoengraving, electrode spacing, neural recording
- MeSH terms
- Animals, Biomedical Engineering, Cats, Electrodes, Electronics, Medical, Neurophysiology
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