Wearable Microfluidic Diaphragm Pressure Sensor for Health and Tactile Touch Monitoring
Open accessAbstract
Flexible pressure sensors have many potential applications in wearable electronics, robotics, health monitoring, and more. In particular, liquid‐metal‐based sensors are especially promising as they can undergo strains of over 200% without failure. However, current liquid‐metal‐based strain sensors are incapable of resolving small pressure changes in the few kPa range, making them unsuitable for applications such as heart‐rate monitoring, which require a much lower pressure detection resolution. In this paper, a microfluidic tactile diaphragm pressure sensor based on embedded Galinstan microchannels (70 µm width × 70 µm height) capable of resolving sub‐50 Pa changes in pressure with sub‐100 Pa detection limits and a response time of 90 ms is demonstrated. An embedded equivalent Wheatstone bridge circuit makes the most of tangential and radial strain fields, leading to high sensitivities of a 0.0835 kPa−1 change in output voltage. The Wheatstone bridge also provides temperature self‐compensation, allowing for operation in the range of 20–50 °C. As examples of potential applications, a polydimethylsiloxane (PDMS) wristband with an embedded microfluidic diaphragm pressure sensor capable of real‐time pulse monitoring and a PDMS glove with multiple embedded sensors to provide comprehensive tactile feedback of a human hand when touching or holding objects are demonstrated.
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Bulky piezoresistive e-skins rely primarily on pressure-induced changes in the number of conductive pathways or in the shape of the sensing material.
“Bulky piezoresistive e-skins, like sponge-based sensors, rely primarily on pressure-induced changes in the number of conductive pathways[112] or in the shape of the sensing material.[113]”
From Flexible Electronics and Devices as Human–Machine Interfaces for Medical Robotics (2022) · cites this paper as [113]
The Introduction explains that pressure deforms the sensor’s microchannels, changing their cross-sectional area and electrical resistance. This supports the shape-change mechanism associated with citation [113], but the paper describes a flexible microfluidic sensor, not bulky piezoresistive e-skins generally. (LLM, conf=0.84)
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- Authors
- Gao, Y., Ota, H., Schaler, E. W., Chen, K., Zhao, A., Gao, W., Fahad, H. M., Leng, Y., Zheng, A., Xiong, F., Zhang, C., Tai, L., Zhao, P., Fearing, R. S., & Javey, A.
- Affiliations
- Lawrence Berkeley National Laboratory (US)
- University of California, Berkeley (US)
- Tianjin University (CN)
- Bournemouth University (GB)
- Corresponding author
- Javey, Ali
- ORCID
- Venue
- Advanced Materials
- Publisher
- Wiley
- Published
- 2017-08-18
- Volume
- 29
- Issue
- 39
- ISSN
- 0935-9648 (ISSN-L)
- 1521-4095
- OpenAlex
- W2747780986
- Semantic Scholar
- 674bf3a894ed6a7bf4e853389f3ab30a5d4e35d8
- Cited by
- 614
- References
- 31
- Citations by year
- 2026: 46 · 2025: 64 · 2024: 73 · 2023: 101 · 2022: 79 · 2021: 83 · 2020: 71 · 2019: 57 · 2018: 39 · 2017: 1
- FWCI
- 20.67
- Type
- journal article
- Language
- en
- Open access
- green
- escholarship.org
- Locations
- Advanced Materials (publishedVersion)
- PubMed (publishedVersion)
- eScholarship (California Digital Library) (submittedVersion)
- OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) (submittedVersion)
- CaltechAUTHORS (California Institute of Technology) (submittedVersion)
- Funders
- China Scholarship Council (201406250097)
- Topics
- Physical Sciences › Engineering › Biomedical Engineering › Advanced Sensor and Energy Harvesting Materials
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Nanomaterials and Printing Technologies
- Physical Sciences › Engineering › Biomedical Engineering › Non-Invasive Vital Sign Monitoring
- Keywords
- wearable electronics, Galinstan, tactile sensing, health monitoring, pulse monitoring, heart rate monitoring, Wheatstone bridge, temperature self-compensation, flexible electronics
- MeSH terms
- Wearable Electronic Devices, Diaphragm, Humans, Pressure, Touch, Microfluidics
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