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Ultra-low-loss high-aspect-ratio Si_3N_4 waveguides
Open accessAbstract
We characterize an approach to make ultra-low-loss waveguides using stable and reproducible stoichiometric Si3N4 deposited with low-pressure chemical vapor deposition. Using a high-aspect-ratio core geometry, record low losses of 8-9 dB/m for a 0.5 mm bend radius down to 3 dB/m for a 2 mm bend radius are measured with ring resonator and optical frequency domain reflectometry techniques. From a waveguide loss model that agrees well with experimental results, we project that 0.1 dB/m total propagation loss is achievable at a 7 mm bend radius with this approach.
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“Also, SiN waveguides can have lower scattering losses from sidewall roughness in comparison to Si waveguides [27,28].”
From Integrated 1 × 3 MEMS silicon nitride photonics switch (2022) · cites this paper as [28]
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“e used (33) for microheater control, a field-programmable gate array (34) enables dual-comb initialization and automated scanning, and a spiral waveguide extends light-matter interaction with samples (35). Data availability The data that support the findings of this study are available from the corresponding authors o…”
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Superefficient microcombs at the wafer level
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High-Efficiency Fiber Edge Coupling for Silicon Nitride Integrated Photonics
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On-Chip Slow-Light SiN Bragg Grating Waveguides
Chen, A., Begović, A., Anderson, S., & Huang, Z. (2022) · IEEE photonics journal · doi:10.1109/jphot.2022.3220540 · Cited by 6
“SiN/SiO2 waveguide on SOI substrate has demonstrated up to several orders of propagation loss reduction [19], [20], [21], [22], [23] and low loss SiN waveguides have been widely used to produce on-chip optical delay lines [24], [25].”
MethodGundavarapu, S., Belt, M. E., Huffman, T., Tran, M. A., Komljenović, T., Bowers, J. E., & Blumenthal, D. J. (2017) · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · doi:10.1117/12.2263411 · Cited by 6
Self-citationThe first integrated optical driver chip for fiber optic gyroscopes
Tran, M. A., Hulme, J. C., Komljenović, T., Kennedy, M., Blumenthal, D. J., & Bowers, J. E. (2017) · IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) · doi:10.1109/isiss.2017.7935659 · Cited by 6
“In addition, ultra-low loss waveguide has also been achieved on an integrated platform [3].”
BackgroundSelf-citationHou, C., Sun, J., Ning, J., Zhang, J., Zhuo, N., Chen, H., Huang, Y., Wang, Z., Zhang, Z., & Liu, F. (2018) · Optics Express · doi:10.1364/oe.26.013730 · Cited by 6
Piezoelectric tuning of a suspended silicon nitride ring resonator
Jin, W., Stanton, E. J., Volet, N., Polcawich, R. G., Baney, D. M., Morton, P. A., & Bowers, J. E. (2017) · IEEE Photonics Conference · doi:10.1109/ipcon.2017.8116029 · Cited by 6
“INTRODUCTION The silicon nitride (Si3N4) waveguide with silicon dioxide (SiO2) cladding provides extremely low loss waveguides for photonic integrated circuit applications [1].”
BackgroundSelf-citationUltra-Low-Loss Silicon Photonic Waveguides Operating With the Wavelength-Bands of 1.31/1.55/2 μm
Li, G., Hong, S., Zhang, L., Xu, Z., & Daoxin Dai, A. (2025) · IEEE photonics journal · doi:10.1109/jphot.2025.3584956 · Cited by 5
An Integrated Optic Gyroscope Based on a 12.5-m Silica Waveguide Coil
Lu, Y., Li, X., Pei, W., Li, W., Huang, A., Feng, D., Jiao, H., Zhou, Z., & Feng, L. (2025) · Journal of Lightwave Technology · doi:10.1109/jlt.2025.3594722 · Cited by 5
Ultra‐Compact and High‐Speed Thin‐Film Lithium Niobate Tunable Optical Delay Lines
Xie, Y., Wu, J., Cao, C., Hong, S., Zhang, W., Yao, Y., Yao, Q., Xu, H., & Daoxin Dai, A. (2025) · Laser & Photonics Review · doi:10.1002/lpor.202501757 · Cited by 6
Cooling of an integrated Brillouin laser below the thermal limit
Loh, W., Kharas, D., Maxson, R., West, G. N., Medeiros, A., Braje, D., Juodawlkis, P., & McConnell, R. (2022) · Optics Express · doi:10.1364/oe.451622 · Cited by 5
“The configuration of our resonator forms a diffuse optical mode [37] that is primarily overlapped with the low-optical loss oxide.”
BackgroundMeynard, B., Millard, K., Fowler, D., Lee, Y., Garcia, S., Ribaud, K., Grosse, P., & Martinez, C. (2023) · Journal of Lightwave Technology · doi:10.1109/jlt.2023.3259734 · Cited by 5
“The refractive indices are non-uniformly distributed in the simulation environment to represent the 2D equivalent of the 3D bent waveguide [46], [47].”
BackgroundHighly nonlinear sub-micron silicon nitride trench waveguide coated with gold nanoparticles
Huang, Y., Zhao, Q., Sharac, N., Ragan, R., & Boyraz, O. (2015) · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · doi:10.1117/12.2182290 · Cited by 5
“55, makes the silicon nitride waveguide with silicon dioxide cladding suitable for low loss propagation [7].”
BackgroundChallenges in passive resonant miniature optical gyroscope based on integrated optics technologies
Feugnet, G. A., Descampeaux, M., & Bretenaker, F. (2022) · Laser Resonators, Microresonators, and Beam Control · doi:10.1117/12.2616221 · Cited by 5
An Ultra-Low-Loss Waveguide Based on BIC Used for an On-Chip Integrated Optical Gyroscope
Yuan, Z., Chen, J., Chen, D., Zhu, S., Yang, J., & Zhang, Z. (2023) · Photonics · doi:10.3390/photonics10040453 · Cited by 5
Polymer micro-ring modulator on silicon nitride platform
Yu, H., Li, B., Wang, L., & Qiu, F. (2023) · Applied Physics Letters · doi:10.1063/5.0169017 · Cited by 5
An integrated optoelectronic chip for sensing aromatic hydrocarbon contaminants in groundwater
Erickson, T. A., & Lear, K. L. (2014) · Sensors and Actuators B Chemical · doi:10.1016/j.snb.2014.06.020 · Cited by 5
Mu, J., Alexoudi, T., Yong, Y.-S., Vázquez-Córdova, S. A., Dijkstra, M., Wörhoff, K., Duis, J., & García‐Blanco, S. M. (2016) · IEEE Photonics Technology Letters · doi:10.1109/lpt.2016.2616021 · Cited by 5
“The couplers with the best performance exhibited losses of ∼0.5 dB for all wavelengths in the C-band.”
BackgroundInfluentialHigh performance chirped microwave generator for space applications
Brunetti, G., Marocco, G., Armenise, M. N., & Ciminelli, C. (2021) · International Conference on Space Optics (ICSO) · doi:10.1117/12.2599455 · Cited by 5
“8 μm waveguide [23], with a minimum radius of 4 mm [24].”
BackgroundIntegrated silicon-photonic reservoir computing with an on-chip Si3N4 microcavity
Zhao, L., Bai, Q., Wu, M., Ran, C., Zeng, Y., Deng, C., Wu, Z.-M., Yang, W., & Wu, J. (2025) · Optics Communications · doi:10.1016/j.optcom.2025.132133 · Cited by 4
Kim, D. W., Kim, S., Choi, J., Lee, J., Baek, Y., Lee, K., Park, D. H., & Kim, J. (2025) · Applied Physics Reviews · doi:10.1063/5.0276463 · Cited by 4
Universal loss and gain characterization inside photonic integrated circuits
Chen, H., Liu, R., Koehler, G., Tabatabaei, F., Guo, X., Sun, S., Yang, Z., Wang, B., Beling, A., & Yi, X. (2026) · Nature Photonics · doi:10.1038/s41566-025-01837-4 · Cited by 5
“So far, its success in PICs has been limited to measuring the loss and dispersion of long waveguides 15–17 .”
InfluentialFatema, T., Xuan, M. W., Singaraju, P., Kim, T., Circir, K., Guo, X., Herrera, D. J., Campbell, J. C., Dagenais, M., & Beling, A. (2026) · Optics Express · doi:10.1364/oe.587067 · Cited by 4
Caut, A., & Karlsson, M. (2024) · IEEE photonics journal · doi:10.1109/jphot.2024.3361802 · Cited by 4
Shujun, 刘. L., Ruoran, 刘. L., Xiaowan, 沈. S., Lijia, 宋. S., Dajian, 刘. L., Xiaolin, 易. Y., Weike, 赵. Z., Shihan, 洪. H., Long, 张. Z., & Daoxin Dai, A. (2024) · Acta Optica Sinica · doi:10.3788/aos241176 · Cited by 4
Heterogeneous integration of silicon nitride and amorphous silicon carbide photonics
Li, Z., Lopez-Rodriguez, B., Sharma, N., van der Kolk, R. J. H., Scholte, T., Smedes, H., Erdogan, R. T., Chang, J., Voncken, H., Gao, J., et al. (2025) · APL Photonics · doi:10.1063/5.0285619 · Cited by 4
Low-loss photonic integrated circuits for UV applications
Hendriks, W. A. P. M., Dijkstra, M., Mardani, S., Hegeman, I., & García‐Blanco, S. M. (2023) · Integrated Optics: Devices, Materials, and Technologies · doi:10.1117/12.2657143 · Cited by 4
“Amongst the different silicon photonic platforms, silicon nitride based devices are quite mature, particularly for visible and near infrared (NIR) wavelengths [4], [5].”
BackgroundLiu, J., Liang, Y., Gao, L., Sun, C., Guan, J., Wang, Z., Liu, Z., Fang, Z., Min, W., Zhang, H., et al. (2024) · Nanomaterials · doi:10.3390/nano14171466 · Cited by 4
Metadata
- Authors
- Bauters, J. F., Heck, M. J. R., John, D., Dai, D., Tien, M.-C., Barton, J. S., Leinse, A., Heideman, R. G., Blumenthal, D. J., & Bowers, J. E.
- Affiliations
- University of California, Santa Barbara (US)
- Venue
- Optics Express
- Publisher
- Optica Publishing Group
- Published
- 2011-02-03
- Volume
- 19
- Issue
- 4
- Pages
- 3163
- ISSN
- 1094-4087 (ISSN-L)
- OpenAlex
- W2169561975
- Cited by
- 492
- References
- 28
- Citations by year
- 2026: 33 · 2025: 48 · 2024: 37 · 2023: 22 · 2022: 38 · 2021: 38 · 2020: 39 · 2019: 30 · 2018: 35 · 2017: 47 · 2016: 33 · 2015: 25 · 2014: 17 · 2013: 22 · 2012: 14
- FWCI
- 14.56
- Type
- journal article
- Language
- en
- Open access
- gold
- doi.org
- Locations
- Optics Express (publishedVersion)
- PubMed (publishedVersion)
- Funders
- Defense Advanced Research Projects Agency
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Photorefractive and Nonlinear Optics
- Physical Sciences › Physics and Astronomy › Condensed Matter Physics › GaN-based semiconductor devices and materials
- Keywords
- silicon nitride waveguides, low-loss waveguides, low-pressure chemical vapor deposition, bending loss, ring resonator, optical frequency domain reflectometry, integrated photonics
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