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Ultra-low-loss high-aspect-ratio Si_3N_4 waveguides
Open accessAbstract
We characterize an approach to make ultra-low-loss waveguides using stable and reproducible stoichiometric Si3N4 deposited with low-pressure chemical vapor deposition. Using a high-aspect-ratio core geometry, record low losses of 8-9 dB/m for a 0.5 mm bend radius down to 3 dB/m for a 2 mm bend radius are measured with ring resonator and optical frequency domain reflectometry techniques. From a waveguide loss model that agrees well with experimental results, we project that 0.1 dB/m total propagation loss is achievable at a 7 mm bend radius with this approach.
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“Also, SiN waveguides can have lower scattering losses from sidewall roughness in comparison to Si waveguides [27,28].”
From Integrated 1 × 3 MEMS silicon nitride photonics switch (2022) · cites this paper as [28]
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Items 401–492 of 492
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Self-citationUltra-thin low loss Si3N4 optical waveguides at 1310 nm
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Um estudo de guias de onda segmentados em óptica integrada
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Integrated Nanophotonic Silicon Devices for Next Generation Computing Chips
Djordjevic, S. S. (2014)
Fabrication Process of Silica Film for Optical Waveguides
吴, 金. (2014) · Optoelectronics · doi:10.12677/oe.2014.43006
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MethodSelf-citationPerformance analysis of polarization transformation waveguide structures for planar light circuits
Samadian, P., Sun, D., & Hall, T. J. (2015) · International Conference on Numerical Simulation of Optoelectronic Devices (NUSOD) · doi:10.1109/nusod.2015.7292873
High density multilayer optical circuit board for unprecedented connectivity at board scales
Michaels, A., & Yablonovitch, E. (2016) · IEEE International Conference on Rebooting Computing (ICRC) · doi:10.1109/icrc.2016.7738709
“03 dB over 30 cm), and can be fabricated using chemical vapor deposition [7] which lends itself to multilayer structures.”
BackgroundFeng, S., Shen, Y., Xie, X., Zang, J., Li, S., Su, T., Shang, K., Lai, W.-C., Liu, G., Campbell, J. C., et al. (2017) · Optical Fiber Communication Conference · doi:10.1364/ofc.2017.w2a.4
Hybrid on-chip microwave photonic signal processor architecture
Rodriguez, J., Xu, L., & Li, Y. (2017) · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · doi:10.1117/12.2266415
Chapter 14: Integrated nanophotonics for multi‒user quantum key distribution networks
Lim, H. C., & Liu, M. T. (2017) · CRC Press eBooks · doi:10.1201/9781315153063-18
Plasmo-thermomechanical suspended nanowire array detectors for mid-infrared spectrum
Zhao, Q., Khan, M. W., Sadri-Moshkenani, P., Torun, R., Zaman, I. U., & Boyraz, O. (2017) · Infrared Sensors, Devices, and Applications · doi:10.1117/12.2274483
“SiN waveguides have been widely used in passive [25]–[31] and active [32]–[36] photonic devices.”
BackgroundIntegrated microwave photonic signal processor invited paper
Yi, X., Song, S., Chew, S. X., Nguyen, L. V. T., & Minasian, R. A. (2017) · International Topical Meeting on Microwave Photonics · doi:10.1109/mwp.2017.8168707
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BackgroundMiniaturized high-Q silicon nitride resonators at visible wavelengths
Moradinejad, H., Askari, M., Atabaki, A. H., Xia, Z., Eftekhar, A. A., & Adibi, A. (2017) · IEEE Photonics Conference · doi:10.1109/ipcon.2017.8116077
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Sun, X. W. (2018) · TSpace (University of Toronto)
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Design of Microring Resonant Sensor Based on Mach Zehnder Interferometer
Shi, M., & Han, Q. (2020) · IOP Conference Series Materials Science and Engineering · doi:10.1088/1757-899x/790/1/012138
MEMS-above CMOS and novel optical MEMS sensor concepts
Tilmans, H. A. C., Rochus, V., Jansen, R. A., Westervelde, W. J., Mahmud-Ul-Hasan, M., Severi, S., Figeys, B., Lodewijks, K., Saseendran, S. S., & Rottenberg, X. (2020) · Elsevier eBooks · doi:10.1016/b978-0-12-817786-0.00050-5
Low-loss, Low-crosstalk Silicon Nitirde Array Waveguide Grating using Multimode Waveguide at 850nm
Park, J., Joo, J., & Kim, G. (2020) · IEEE Photonics Conference · doi:10.1109/ipc47351.2020.9252540
“Recently, various SixNy AWGs have been reported [1-4].”
BackgroundA Framework for Discovering Optimal Solutions in Photonic Inverse DesignPreprint
Digani, J., Hon, P., & Davoyan, A. R. (2021) · arXiv (Cornell University) · doi:10.48550/arxiv.2106.08419
“Examples of such structures may include ultralow loss resonators and waveguides for quantum information processing [17-21], ultralight-weight high-power metasurfaces for propulsion [22, 23], near-”
BackgroundLiu, K., Brodnik, G. M., Harrington, M., Isichenko, A., Zhao, Q., Dallyn, J. H., Behunin, R. O., Morton, P. A., Papp, S. B., & Blumenthal, D. J. (2021) · Optical Fiber Communication Conference · doi:10.1364/ofc.2021.th4b.2
Self-citationSilicon Nitride Bus-Coupled Spiral-Ring Resonator for Dual-Mode Locking Temperature Stabilization
Zhao, Q., Harrington, M., Isichenko, A., Bose, D., Wang, J., Liu, K., Behunin, R. O., Rakich, P. T., Hoyt, C., Fertig, C., et al. (2021) · Optical Fiber Communication Conference · doi:10.1364/ofc.2021.th4b.5
Self-citationTuning of silicon nitride micro-cavities by controlled nanolayer deposition
Kalashnikov, D. A., Alagappan, G., Hu, T., Lim, N. C. B., Leong, V., Png, C. E., & Krivitsky, L. A. (2022) · Scientific Reports · doi:10.1038/s41598-022-19255-9
Technologies for single chip integrated optical gyroscopes
Iqbal, M. H. (2021) · ANU Open Research (Australian National University) · doi:10.25911/gd8p-ks70
Wideband-tunable integrated microwave photonic filter based on an ultra-high-Q resonator
Yan, H., Xie, Y., Zhang, L., Xiang, Y., & Daoxin Dai, A. (2021) · Asia Communications and Photonics Conference · doi:10.1364/acpc.2021.m5i.4
“Based on the three-dimensional volume current method [13], we calculate the transmission loss of silicon photonic waveguides as the waveguide width varies with different mean deviations σ, as shown in Figure 1(c).”
MethodUltralow-loss compact silicon photonic waveguide spirals
Hong, S., Zhang, L., Wang, Y., Zhang, M., Xie, Y., & Daoxin Dai, A. (2021) · Asia Communications and Photonics Conference · doi:10.1364/acpc.2021.t1d.3
Efficient grating couplers for optical fibers to ultra-low-loss waveguides
Guo, Y., Ma, Z., Tong, X., & Zhang, L. (2022) · SPIE Silicon Photonics · doi:10.1117/12.2609349
“Material absorption is mainly due to absorption resonances [2].”
BackgroundInfluentialSilicon-Family Materials and Waveguides
Su, Y., & Zhang, Y. (2022) · doi:10.1063/9780735424319_002
Low-Loss TeO2 Waveguides Integrated on a Si3N4 Platform for Active and Nonlinear Optical Devices
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“Silicon nitride waveguides have high refractive index contrast enabling compact waveguide bends, low losses [3] throughout the visible and infrared, nanoscale patterning through mature processing techniques and allow for volume chip production through standard wafer-scale fabrication steps.”
BackgroundSelf-citationChen, H., Zhou, J., Fu, H., Huang, X., & Zhao, Y. (2019) · Conference on Lasers and Electro-Optics · doi:10.1364/cleo_at.2019.jth2a.66
Low-Temperature Direct Bonding Technology for III-V/Si Heterogeneous Integration
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MethodHybrid SiN Polymer Waveguide Ring Resonator Modulator
Yu, H., & Qiu, F. (2022) · Asia Communications and Photonics Conference · doi:10.1109/acp55869.2022.10088988
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BackgroundGirardi, M., Helgason, Ó. B., Caut, A., Karlsson, M., Larsson, A. G., & Victor Torres-Company (2023) · Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) · doi:10.1109/cleo/europe-eqec57999.2023.10231915
“This technology breaks off the fundamental tradeoff between loss and confinement in thick waveguides and opens the door to combine high-performance microcombs with ultra-low-loss silicon nitride waveguide technology [3].”
BackgroundUltra-Low-Loss Silicon Waveguides Covering a Very Large Band
Li, G., Hong, S., Zhang, L., Xu, Z., & Daoxin Dai, A. (2023) · Asia Communications and Photonics Conference · doi:10.1109/acp/poem59049.2023.10368676
“However, this high contrast also increases the interaction of the mode field with the rough sidewalls and surfaces of the waveguide, leading to enhanced scattering losses [2].”
BackgroundNovel Optoelectronic Oscillators
Yao, J., Capmany, J., & Li, M. (2024) · doi:10.1002/9781394205318.ch12
Mandal, P. (2024) · Plasmonics · doi:10.1007/s11468-024-02427-w
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Materials for Integrated Photonics
Yue, Y., Fang, Y., Geng, W., & Bao, C. (2024) · Advances in optics and optoelectronics · doi:10.1007/978-981-97-6584-3_2
Mishra, M., Choi, G., Talcott, G. M., Gehl, M. R., Leenheer, A. J., Dominguez, D., Otterstrom, N. T., & Eichenfield, M. (2024) · Frontiers in Optics · doi:10.1364/fio.2024.fw1d.2
PIC-based spectroscopic chemical sensing
Karnik, T. S., Sia, J. X. B., Dao, K. P., Ranno, L., & Hu, J. (2025) · Frontiers in Biological Detection: From Nanosensors to Systems · doi:10.1117/12.3041396
“Silicon nitride photonics have demonstrated remarkably low loss and high-Q resonators exceeding 100 million 39,40 , making them a suitable candidate for PTS.”
Integrated photonic devices for quantum systems
Morton, P. A. (2025) · Components and Packaging for Laser Systems · doi:10.1117/12.3049278
Computation analysis of Si waveguides on AlN substrate with GaN cladding
Roy, B. C., Ebon, M. I. R., & Hossain, J. (2026) · Next Materials · doi:10.1016/j.nxmate.2026.102176
High Finesse Transversely-Coupled Fabry-Pérot Resonators on CMOS-Compatible SiN
Tang, H. R., Morin, T. J., Li, M., Camponeschi, F., Guo, J., & Bowers, J. E. (2025) · IEEE Photonics Technology Letters · doi:10.1109/lpt.2025.3591711
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Self-citationResearch progress of waveguide integrated carbon based infrared detectors
Xiaowei, L. Y. U., Zhang, J., Junyu, C., Zizhuo, L., Wenchao, Z., Qiushi, W., Xu, H., & Xiaoshuang, C. H. E. N. (2025) · Acta Physica Sinica · doi:10.7498/aps.74.20250830
А.И., А., Kovalyuk, V. V., Kitsyuk, E. P., & Светухин, В. В. (2025) · Nanoindustry Russia · doi:10.22184/10.22184/1993-8578.2025.18.7-8.432.439
Zhang, J., Zhang, H., & Yang, Z. (2025) · Sensors · doi:10.3390/s25237231
“We anticipate several major sources of loss [40,41,44,45]: (1) Propagation loss, standard LPCVD processes for stoichiometric Si 3 N 4 consistently yield propagation losses in the range of 0.1 to 1.0 dB/cm at the 1550 nm wavelength.”
InfluentialEffect of waveguide wall roughness on quantum signal transmission
azough, E., Ahmadi, H., & Rostami, A. (2025) · Scientific Reports · doi:10.1038/s41598-025-31901-6
Piezo-Optomechanically Tunable Ultra-Low-Loss Silicon Nitride Waveguide Photonic Circuits
Mishra, M., Choi, G., Talcott, G. M., Gehl, M., Leenheer, A., Dominguez, D., Otterstrom, N. T., & Eichenfield, M. (2025) · doi:10.1364/cleo_si.2025.ss190_7
“Here α π represents the optical loss per modulator caused by absorption from the top metal layer of the actuator and by scattering due to the rough interface of the waveguide [5].”
Zhou, W., Yao, R. (., & Lam, S. (2026) · Microelectronic Engineering · doi:10.1016/j.mee.2025.112440
FDTD Simulations on The Single-Mode Operation of SiON-Doped Si Waveguides for LIDAR Applications
Duru, İ., Şanlı, A. K., Arı, M., Karatutlu, A., Demirtaş, M., & Tabaru, T. E. (2025) · National Conference on Electrical and Electronics Engineering (ELECO) · doi:10.1109/eleco69582.2025.11329226
“Si₃N₄ remains the most mature, exhibiting a refractive index of n ≈ 2.00–2.02 at 905 nm and ultra-low propagation losses [10].”
InfluentialDetail analysis of reflection behavior for O-band and C-band silicon waveguides by OFDR profiles
Horikawa, T., & Nishiyama, N. (2026) · Japanese Journal of Applied Physics · doi:10.35848/1347-4065/ae3ea1
Zhou, W., & Lam, S. (2025) · Photonics & Electromagnetics Research Symposium - Fall (PIERS-Fall) · doi:10.23919/piers-fall62445.2025.11394541
Fatema, T., Xuan, M., Guo, X., Campbell, J. C., Dagenais, M., & Beling, A. (2026) · SPIE Silicon Photonics · doi:10.1117/12.3079898
SiN Based IIR Elliptic Half Band Filter at 193 THz with Low Insertion Loss and High Extinction Ratio
Hossain, M. S., Hasanuzzaman, G. K. M., Charalambous, G., & Tulon, M. T. M. (2025) · IEEE International Conference on Telecommunications and Photonics (ICTP) · doi:10.1109/ictp68765.2025.11415033
“Bauters et al. [10] work on low-loss Si₃N₄ waveguides, on the other hand, was a turning point for integrated photonics.”
Large Area Micro-Transfer-Printed TFLN-on-SiN Racetrack Resonators for Nonlinear Photonics
Sumon, M. S. I., Ghosh, S. K., Vorobev, A. S., Maraviglia, N., Atar, F. B., Maddi, C., Zakaria, R., Ullman, G., Devarapu, G. C. R., Faruque, I. I., et al. (2026) · IEEE Journal of Quantum Electronics · doi:10.1109/jqe.2026.3678154
Integrated silicon photonics for quantum optics
Oser, D. (2019) · theses.fr (ABES) · doi:10.70675/c6616060z96a1z4233zb695za380d5598afa · Cited by 1
Quantum information processing with a multimode fibre
Leedumrongwatthanakun, S. (2019) · theses.fr (ABES) · doi:10.70675/6e171a4cz051bz46cczaee4z55183ff5bb6b
Low-confinement silicon nitride waveguides manufactured via direct glass bonding
Tsvetkov, M. V., Obydennov, D. V., Rykov, A. S., Shevchenko, A. R., Шибалов, М. В., Filippov, I. A., Perov, S. D., Dmitriev, N. Y., & Tarkhov, M. A. (2026) · Optical Materials · doi:10.1016/j.optmat.2026.118403
“Silicon nitride based integral photonics has become one of the key areas for application systems in the telecom range due to combination of wide spectral transparency [1, 2], CMOS-compatibility [3, 4] and potentional low propagation losses [5–8].”
InfluentialCompact high-Q multimode InGaAsP/InP microring resonators enabled by mode-selective excitation
Lv, G., Sun, T., Fu, X., Ma, C., Guo, Y., Liu, H., Zeng, Z., Zhang, B., & Jiang, H. (2026) · Optics Express · doi:10.1364/oe.598764
Crystallographic Analysis of a Nonvolatile HZO Phase Shifter Integrated on a Si 3 N 4 Waveguide
Kong, M., Kang, M. C., Jeong, C.-W., Kim, K., Yu, S., & Lee, S. (2026) · Advanced Electronic Materials · doi:10.1002/aelm.202500765
Haghighat, H., Prins, D., Esmaeeli, O., Chrostowski, L., & Shekhar, S. (2026) · Optical Fiber Communication Conference · doi:10.1364/ofc.2026.th2a.10
“Studies have shown significant linewidth reduction from resonators with 10 5 − 10 8 Q-factors made with specialized platforms or process flows, for example low-loss SiN [7].”
SPAD-based time-of-flight for dispersion measurement of integrated waveguides
Finazzi, L., Doshi, S. P., Gray, D. J., Reens, D., Kharas, D., Sumant, A., Pesantes, K. H. A., Carnati, C., Tosi, A., Loh, W., et al. (2026) · Optics Express · doi:10.1364/oe.599480
Skyrmion Photonics: From Topological Fundamentals to Integrated Devices and Critical Assessment
Yao, R., Zhao, Y., & Toqeer, I. (2026) · Annalen der Physik · doi:10.1002/andp.70235
Absorption spectroscopy based on PICs
Hu, J., Spott, A., & Agarwal, A. (2026) · Elsevier eBooks · doi:10.1016/b978-0-443-26578-5.00002-9
Photonic integrated circuit loss characterization enabled by drop-in nonlinearity
Koehler, G., Liu, R., Chen, H., Sun, S., Yang, Z., Wang, B., & Yi, X. (2026) · doi:10.1364/cleo_si.2026.sth3a.2
guo, Y., Jiang, W., Bao, X., Zhou, R., Guo, L., Zhang, B., Chen, W., & Zhou, L. (2026) · Optics Express · doi:10.1364/oe.607566
Coupled integrated photonic quantum memristors using a single photon source made of a colour center
Baldazzi, A., Ancel, R. P. G. K., Guaraldo, S., Fattori, I., Chen, X., Akar, Z. A., Déturche, R., Azzini, S., Couteau, C., & Pavesi, L. (2026) · Opto-Electronic Advances · doi:10.29026/oea.2026.260048
“…source of single photons is off-chip, the deterministic coupling of SiV − color centers [40, 39], as well as their direct integration [63, 64] in silicon nitride photonic circuits has been already reported, thus providing to our demonstration a perspective of full integration and scalability.”
High quantum-efficiency InGaAs/InP photodiodes heterogeneously integrated on SiN waveguides
Le, S. P., Kim, T., Fang, K., Beling, A., & Campbell, J. C. (2026) · Applied Physics Letters · doi:10.1063/5.0336859
High-gain amplification at 1.06 µm based on freestanding Nd:YAG optical amplifier
Qu, Z., Yan, X., Liu, Y., Tan, Y., & Chen, F. (2026) · Optics Express · doi:10.1364/oe.611290
LLM-assisted agentic workflow for silicon photonic design automation
Chung, L.-W. (2026) · Optics Express · doi:10.1364/oe.604609
Нелинейная фотоника: проблемы и перспективы
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Горелов, Д. В., Kadochkin, A. S., Генералов, С. С., А.И., А., Светухин, В. В., & Амеличев, В. В. (2026) · Nanoindustry Russia · doi:10.22184/1993-8578.2026.19.14s.10.18
Thermo-optically tunable Bragg soliton-effect compression in on-chip silicon nitride gratings
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Metadata
- Authors
- Bauters, J. F., Heck, M. J. R., John, D., Dai, D., Tien, M.-C., Barton, J. S., Leinse, A., Heideman, R. G., Blumenthal, D. J., & Bowers, J. E.
- Affiliations
- University of California, Santa Barbara (US)
- Venue
- Optics Express
- Publisher
- Optica Publishing Group
- Published
- 2011-02-03
- Volume
- 19
- Issue
- 4
- Pages
- 3163
- ISSN
- 1094-4087 (ISSN-L)
- OpenAlex
- W2169561975
- Cited by
- 492
- References
- 28
- Citations by year
- 2026: 33 · 2025: 48 · 2024: 37 · 2023: 22 · 2022: 38 · 2021: 38 · 2020: 39 · 2019: 30 · 2018: 35 · 2017: 47 · 2016: 33 · 2015: 25 · 2014: 17 · 2013: 22 · 2012: 14
- FWCI
- 14.56
- Type
- journal article
- Language
- en
- Open access
- gold
- doi.org
- Locations
- Optics Express (publishedVersion)
- PubMed (publishedVersion)
- Funders
- Defense Advanced Research Projects Agency
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Photorefractive and Nonlinear Optics
- Physical Sciences › Physics and Astronomy › Condensed Matter Physics › GaN-based semiconductor devices and materials
- Keywords
- silicon nitride waveguides, low-loss waveguides, low-pressure chemical vapor deposition, bending loss, ring resonator, optical frequency domain reflectometry, integrated photonics
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