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Ultra-low-loss high-aspect-ratio Si_3N_4 waveguides
Open accessAbstract
We characterize an approach to make ultra-low-loss waveguides using stable and reproducible stoichiometric Si3N4 deposited with low-pressure chemical vapor deposition. Using a high-aspect-ratio core geometry, record low losses of 8-9 dB/m for a 0.5 mm bend radius down to 3 dB/m for a 2 mm bend radius are measured with ring resonator and optical frequency domain reflectometry techniques. From a waveguide loss model that agrees well with experimental results, we project that 0.1 dB/m total propagation loss is achievable at a 7 mm bend radius with this approach.
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“Also, SiN waveguides can have lower scattering losses from sidewall roughness in comparison to Si waveguides [27,28].”
From Integrated 1 × 3 MEMS silicon nitride photonics switch (2022) · cites this paper as [28]
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“On the other hand, passive materials platforms such as silicon oxynitride[6] or silicon nitride[7] show record low-losses[8] in the telecommunication C-Band (1530 – 1565 nm) allowing for elaborate on-chip signal processing[3] with hundreds or even thousands of modulators, however, lacking active components such as on-…”
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“Ultra-low-loss waveguides have been successfully manufactured previously [17,18], and the lowest waveguide loss has been reported to be 1.”
BackgroundAdvanced Technologies for Quantum Photonic Devices Based on Epitaxial Quantum Dots
Zhao, T., Chen, Y., Yu, Y., Li, Q., Davanço, M., & Liu, J. (2019) · Advanced Quantum Technologies · doi:10.1002/qute.201900034 · Cited by 22
Wang, M., Zhao, K., Huang, S. W., Wu, J., Lü, P., Ohodnicki, P. R., Lu, P., Li, M.-J., Mihailov, S. J., & Chen, K. P. (2020) · IEEE Sensors Journal · doi:10.1109/jsen.2020.2995606 · Cited by 21
“The propagation loss is calculated from the linear fit of the optical OBR measured return loss [19], [20], and the SNR enhancement is measured from the increase in returned backscattering signal of the Rayleigh enhanced fiber section as compared to the unmodified fiber section, where only intrinsic Rayleigh scattering…”
BackgroundSurface acoustic waves for acousto-optic modulation in buried silicon nitride waveguides
van der Slot, P. J. M., Porcel, M. A. G., & Boller, K. J. (2019) · Optics Express · doi:10.1364/oe.27.001433 · Cited by 21
Microwave Photonic Filters and Applications
Zhou, Y., Wang, L., Liu, Y., Yu, Y., & Zhang, X. (2023) · Photonics · doi:10.3390/photonics10101110 · Cited by 22
Technologies for modulation of visible light and their applications
Park, S., Notaros, M., Mohanty, A., Kim, D., Notaroš, J., & Mouradian, S. (2024) · Progress in Quantum Electronics · doi:10.1016/j.pquantelec.2024.100534 · Cited by 22
Pintus, P., Pasquale, F. D., & Bowers, J. E. (2011) · Optics Letters · doi:10.1364/ol.36.004599 · Cited by 20
Self-citationMa, M., Adams, R., & Chen, L. R. (2017) · Journal of Lightwave Technology · doi:10.1109/jlt.2017.2694003 · Cited by 20
“03 dB/cm [21]), relatively large nonlinearity, and negligible nonlinear loss.”
BackgroundDesign and characterization of whispering-gallery spiral waveguides
Chen, T., Lee, H., & Vahala, K. J. (2014) · Optics Express · doi:10.1364/oe.22.005196 · Cited by 20
Hybrid ultrathin-silicon/graphene waveguide photodetector with a loop mirror reflector
Li, J., Yin, Y., Guo, J., Liu, C., & Daoxin Dai, A. (2020) · Optics Express · doi:10.1364/oe.386103 · Cited by 19
Integrated CARS source based on seeded four-wave mixing in silicon nitride
Epping, J. P., Kues, M., van der Slot, P. J. M., Lee, C. J., Fallnich, C., & Boller, K. J. (2013) · Optics Express · doi:10.1364/oe.21.032123 · Cited by 19
Multi-layer integrated photonics from the ultraviolet to the infrared
Sage, J., Bramhavar, S., Chiaverini, J., Juodawlkis, P., Kharas, D., Loh, W., & Sorace-Agaskar, C. M. (2018) · Frontiers in Biological Detection: From Nanosensors to Systems · doi:10.1117/12.2288411 · Cited by 21
“While it has been known for some time that SiN supports low-loss propagation of light in waveguides at visible (red to blue-green) [8] and NIR wavelengths [9], the performance deep into the blue and NUV has not, to our knowledge, been quantified or reported.”
BackgroundMethodInfluentialLarge thermal tuning of a polymer-embedded silicon nitride nanobeam cavity
Chen, Y., Whitehead, J., Ryou, A., Zheng, J., Xu, P., Fryett, T., & Majumdar, A. (2019) · Optics Letters · doi:10.1364/ol.44.003058 · Cited by 19
Silicon carbide: A promising platform for scalable quantum networks
Zhou, Y., Tan, J., Hu, H., Hua, S., Jiang, C., Liang, B., Bao, T., Nie, X., Xiao, S., Lu, D., et al. (2025) · Applied Physics Reviews · doi:10.1063/5.0262377 · Cited by 21
Integrated Ultra-Low-Loss Silicon Nitride Waveguide Coil for Optical Gyroscopes
Gundavarapu, S., Huffman, T., Moreira, R. L., Belt, M. E., Bowers, J. E., & Blumenthal, D. J. (2016) · Optical Fiber Communication Conference · doi:10.1364/ofc.2016.w4e.5 · Cited by 18
“The waveguide loss was measured using an optical backscatter reflectometer as in [2].”
BackgroundMethodInfluentialSelf-citationDeuterated SiNx: a low‐loss, back‐end CMOS‐compatible platform for nonlinear integrated optics
Chia, X. X., & Tan, D. T. H. (2023) · Nanophotonics · doi:10.1515/nanoph-2022-0626 · Cited by 18
Silicon nitride photonics: from visible to mid-infrared wavelengths
Muñoz, P., Doménech, D., Domı́nguez, C., Sánchez, A., Micó, G., Bru, L. A., Pastor, D., Fernández, J. P. S., & Cirera, J. M. (2018) · SPIE Silicon Photonics · doi:10.1117/12.2287421 · Cited by 18
Silicon nitride waveguide as a power delivery component for on-chip dielectric laser accelerators
Tan, S., Zhao, Z., Urbanek, K., Hughes, T. W., Lee, Y. J., Fan, S., Harris, J. S., & Byer, R. L. (2019) · Optics Letters · doi:10.1364/ol.44.000335 · Cited by 18
Si3N4 photonic integration platform at 1 µm for optical interconnects
Hu, X., Girardi, M., Ye, Z., Muñoz, P., & Larsson, A. G. (2020) · Optics Express · doi:10.1364/oe.386494 · Cited by 18
Compact thermo-optic modulator based on a titanium dioxide micro-ring resonator
Yu, H., & Qiu, F. (2022) · Optics Letters · doi:10.1364/ol.456876 · Cited by 18
Chou, B. C. S., Sato, Y., Sukumaran, V., Sun, J., Sundaram, V., Chang, G., & Tummala, R. (2013) · IEEE Electronic Components and Technology Conference (ECTC) · doi:10.1109/ectc.2013.6575585 · Cited by 18
Low-Temperature and Low-Pressure Silicon Nitride Deposition by ECR-PECVD for Optical Waveguides
Bonneville, D. B., Miller, J. W., Smyth, C., Mascher, P., & Bradley, J. D. B. (2021) · Applied Sciences · doi:10.3390/app11052110 · Cited by 17
Integrated waveguide coupled ultralow-loss multimode waveguides based on silicon nitride resonators
Cui, S., Yu, Y., Cao, K., Pan, Z., Gao, X., & Zhang, X. (2023) · Optics Express · doi:10.1364/oe.507791 · Cited by 17
Eskandari, H., Attari, A. R., & Majedi, M. S. (2017) · Journal of the Optical Society of America B · doi:10.1364/josab.35.000054 · Cited by 17
Molluscum contagiosum occurring in an epidermal inclusion cyst.
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A versatile, inexpensive integrated photonics platformPreprint
Shainline, J. M., Buckley, S. M., Nader, N., Gentry, C. M., Cossel, K. C., Popović, M. A., Newbury, N. R., Nam, S. W., & Mirin, R. P. (2016) · arXiv (Cornell University) · doi:10.48550/arxiv.1611.02346 · Cited by 24
Interferometric Integrated Optical Gyroscope Based on Silicon Nitride Waveguide Ring
Feng, C., Jiao, H., Miao, B., Gu, Z., Hu, Y., Jiang, T., Li, J., Li, X., Li, H., & Li, J. (2024) · IEEE Sensors Journal · doi:10.1109/jsen.2024.3412169 · Cited by 16
Metadata
- Authors
- Bauters, J. F., Heck, M. J. R., John, D., Dai, D., Tien, M.-C., Barton, J. S., Leinse, A., Heideman, R. G., Blumenthal, D. J., & Bowers, J. E.
- Affiliations
- University of California, Santa Barbara (US)
- Venue
- Optics Express
- Publisher
- Optica Publishing Group
- Published
- 2011-02-03
- Volume
- 19
- Issue
- 4
- Pages
- 3163
- ISSN
- 1094-4087 (ISSN-L)
- OpenAlex
- W2169561975
- Cited by
- 492
- References
- 28
- Citations by year
- 2026: 33 · 2025: 48 · 2024: 37 · 2023: 22 · 2022: 38 · 2021: 38 · 2020: 39 · 2019: 30 · 2018: 35 · 2017: 47 · 2016: 33 · 2015: 25 · 2014: 17 · 2013: 22 · 2012: 14
- FWCI
- 14.56
- Type
- journal article
- Language
- en
- Open access
- gold
- doi.org
- Locations
- Optics Express (publishedVersion)
- PubMed (publishedVersion)
- Funders
- Defense Advanced Research Projects Agency
- Topics
- Physical Sciences › Engineering › Electrical and Electronic Engineering › Photonic and Optical Devices
- Physical Sciences › Physics and Astronomy › Atomic and Molecular Physics, and Optics › Photorefractive and Nonlinear Optics
- Physical Sciences › Physics and Astronomy › Condensed Matter Physics › GaN-based semiconductor devices and materials
- Keywords
- silicon nitride waveguides, low-loss waveguides, low-pressure chemical vapor deposition, bending loss, ring resonator, optical frequency domain reflectometry, integrated photonics
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